scholarly journals Design and Fabrication of a Novel MEMS Relay with Low Actuation Voltage

Micromachines ◽  
2020 ◽  
Vol 11 (2) ◽  
pp. 171 ◽  
Author(s):  
Hao Li ◽  
Yong Ruan ◽  
Zheng You ◽  
Zhiqiang Song

Compared with conventional solid-state relays, micro-electro mechanical system (MEMS) relays have the advantages of high isolation, low contact resistance, low power consumption, and abrupt switching characteristics. Nevertheless, the widespread application of MEMS relays has been limited due to the issue of the conflict between low actuation voltages and high device performance. This article presents a novel cantilever MEMS relay with an embedded contact electrode which helps to achieve a low actuation voltage (below 8 V) and high restoring force simultaneously. Meanwhile, the contact resistance is as low as around 0.4 Ω and the reliability is verified. To thoroughly investigate and analyze the novel cantilever MEMS relay, a static theoretical model of the structure was developed. Based on the model, the cantilever MEMS relay was designed and optimized. Then, the relays were fabricated by the bulk-silicon micromachining process based on the silicon–glass anodic bonding technology. Finally, the switching performance of the novel cantilever MEMS relay was measured. Experimental results demonstrate that the proposed MEMS relay has a low actuation voltage below 8 V and high performance, which is in good agreement with the simulation results, and shows significant advantages when compared with previous reports. Therefore, the proposed MEMS relay with an embedded contact electrode is promising in practical applications.

Author(s):  
George G. Adams

Microswitches have the potential to be used in numerous applications [1]. Microswitches are slower and currently less reliable than semiconductor switches. However they have the advantage of reduced power consumption, less insertion loss, and better isolation. The operation of a microswitch involves many interesting phenomena which will be reviewed. In an electrostatically actuated switch a voltage difference is applied between the beam and the gate. The resulting electrostatic force pulls the beam toward the gate such that its tip contacts the drain and completes the circuit. However the momentum of the beam causes it to deflect further, even after the tip is in contact with the drain. This stored elastic energy can be sufficient to cause the tip to separate from the drain resulting in what is often referred to as “contact bounce” [2]. Contact bounce causes several problems. First the switch cannot be used until the bouncing has stopped, thus increasing the effective time-to-closure. Second the tip and drain are subjected to more mechanical open-close contacts than are intended. Third the impact force between the tip and drain can be several times greater than the force in the closed position. These last two phenomena can prematurely degrade the contact surfaces. Attempts have been made to tailor the actuation voltage in order to reduce both the impact force and contact bounce [3]. Switches can fail in either of two failure modes. In one mode the contact resistance decreases with cycling. This behavior, while seemingly not a problem, is symptomatic of the contact being cleaned due to repeated contacts (i.e. “contact scrub” as it is known in the industry). As the resistance decreases the force of adhesion increases between these clean metal-to-metal contacts, eventually causing the switch to stick shut when the restoring force in the beam is insufficient to pull the contacts apart [4]. Another failure mechanism is a steady increase in contact resistance until the point at which the switch is no longer useable. These failures are attributable to the growth of contamination in the form of a friction polymer on the contacting surfaces [5]. Another measure of switch performance is intermodulation distortion which quantifies the distortion of a pair of harmonic RF signals with nearly equal frequencies. The beating between two such components causes the power to vary relatively slowly, i.e. at the beat frequency. This beat frequency may be sufficiently close to the thermal response time of the switch leading to distortion and false signals in the frequency range of interest [6].


Fish is an inevitable part of Kerala’s food style and around 3% of the State’s economy is attributed to Fisheries. The recent news that hit the headlines of Kerala was the seizing of formalin laced fish from many parts of Kerala. There are numerous conventional chemical methods for detecting formalin concentration in fish. The main drawback is that the majority of these techniques are time-consuming, tedious and destructive that requires welltrained operators and cannot be applied for on-field detection. In this current paper, the hazardous effects of formalin in human body, traditional methods used at present and the recently developed novel techniques for effective detection of formaldehyde concentration in fish, are analyzed. An overview of the conventional methods- chemical methods and microbial attributes are discussed. The novel techniques include high performance liquid chromatography (HPLC), electrochemical biosensors, catalytic kinetic flurimetry technique, fluorescence spectroscopy, photonic crystal fiber based sensor, enhanced Raman spectroscopy (SERS) technique and optical fiber bundle sensor. Also, the advantages of these techniques over traditional methods are pointed out. The novel techniques exhibit good linearity, stability, sensitivity, non-invasive, non-destructive and most of them have the potential to be developed as a portable device. Using this non-destructive technique, unethical means of food preservation can be monitored, thereby ensuring fish quality in Kerala. Even though there has been great advancement in this field, traditional methods are still dominant in practical applications. It is high time that new techniques find their way out, because the quality of fish consumed by the people of this State is decreasing by a quick rate. Therefore, further efforts are necessary to facilitate early adoption of novel technologies in the fish industry and promote their standardization to complement or replace current legislation standards for the evaluation of fish quality.


Crystals ◽  
2021 ◽  
Vol 11 (3) ◽  
pp. 235
Author(s):  
Shuqi Zhao ◽  
Tongtong Yu ◽  
Ziming Wang ◽  
Shilei Wang ◽  
Limei Wei ◽  
...  

Two-dimensional (2D) materials driven by their unique electronic and optoelectronic properties have opened up possibilities for their various applications. The large and high-quality single crystals are essential to fabricate high-performance 2D devices for practical applications. Herein, IV-V 2D GeP single crystals with high-quality and large size of 20 × 15 × 5 mm3 were successfully grown by the Bi flux growth method. The crystalline quality of GeP was confirmed by high-resolution X-ray diffraction (HRXRD), Laue diffraction, electron probe microanalysis (EPMA) and Raman spectroscopy. Additionally, intrinsic anisotropic optical properties were investigated by angle-resolved polarized Raman spectroscopy (ARPRS) and transmission spectra in detail. Furthermore, we fabricated high-performance photodetectors based on GeP, presenting a relatively large photocurrent over 3 mA. More generally, our results will significantly contribute the GeP crystal to the wide optoelectronic applications.


2021 ◽  
Vol 4 (1) ◽  
Author(s):  
Yehe Liu ◽  
Andrew M. Rollins ◽  
Richard M. Levenson ◽  
Farzad Fereidouni ◽  
Michael W. Jenkins

AbstractSmartphone microscopes can be useful tools for a broad range of imaging applications. This manuscript demonstrates the first practical implementation of Microscopy with Ultraviolet Surface Excitation (MUSE) in a compact smartphone microscope called Pocket MUSE, resulting in a remarkably effective design. Fabricated with parts from consumer electronics that are readily available at low cost, the small optical module attaches directly over the rear lens in a smartphone. It enables high-quality multichannel fluorescence microscopy with submicron resolution over a 10× equivalent field of view. In addition to the novel optical configuration, Pocket MUSE is compatible with a series of simple, portable, and user-friendly sample preparation strategies that can be directly implemented for various microscopy applications for point-of-care diagnostics, at-home health monitoring, plant biology, STEM education, environmental studies, etc.


2021 ◽  
Vol 5 (1) ◽  
Author(s):  
Myungwoo Son ◽  
Jaewon Jang ◽  
Yongsu Lee ◽  
Jungtae Nam ◽  
Jun Yeon Hwang ◽  
...  

AbstractHere, we demonstrate the fabrication of a Cu-graphene heterostructure interconnect by the direct synthesis of graphene on a Cu interconnect with an enhanced performance. Multilayer graphene films were synthesized on Cu interconnect patterns using a liquid benzene or pyridine source at 400 °C by atmospheric pressure chemical vapor deposition (APCVD). The graphene-capped Cu interconnects showed lower resistivity, higher breakdown current density, and improved reliability compared with those of pure Cu interconnects. In addition, an increase in the carrier density of graphene by doping drastically enhanced the reliability of the graphene-capped interconnect with a mean time to failure of >106 s at 100 °C under a continuous DC stress of 3 MA cm−2. Furthermore, the graphene-capped Cu heterostructure exhibited enhanced electrical properties and reliability even if it was a damascene-patterned structure, which indicates compatibility with practical applications such as next-generation interconnect materials in CMOS back-end-of-line (BEOL).


2019 ◽  
Vol 87 (3) ◽  
pp. 20 ◽  
Author(s):  
Miléna Lengyel ◽  
Nikolett Kállai-Szabó ◽  
Vince Antal ◽  
András József Laki ◽  
István Antal

Microparticles, microspheres, and microcapsules are widely used constituents of multiparticulate drug delivery systems, offering both therapeutic and technological advantages. Microparticles are generally in the 1–1000 µm size range, serve as multiunit drug delivery systems with well-defined physiological and pharmacokinetic benefits in order to improve the effectiveness, tolerability, and patient compliance. This paper reviews their evolution, significance, and formulation factors (excipients and procedures), as well as their most important practical applications (inhaled insulin, liposomal preparations). The article presents the most important structures of microparticles (microspheres, microcapsules, coated pellets, etc.), interpreted with microscopic images too. The most significant production processes (spray drying, extrusion, coacervation, freeze-drying, microfluidics), the drug release mechanisms, and the commonly used excipients, the characterization, and the novel drug delivery systems (microbubbles, microsponges), as well as the preparations used in therapy are discussed in detail.


2021 ◽  
pp. 138902
Author(s):  
Zhangxin Chen ◽  
Binbin Yu ◽  
Jiajie Cao ◽  
Xiuli Wen ◽  
Minghui Luo ◽  
...  

Nanophotonics ◽  
2017 ◽  
Vol 6 (4) ◽  
pp. 663-679 ◽  
Author(s):  
Francesco Chiavaioli ◽  
Francesco Baldini ◽  
Sara Tombelli ◽  
Cosimo Trono ◽  
Ambra Giannetti

AbstractOptical fiber gratings (OFGs), especially long-period gratings (LPGs) and etched or tilted fiber Bragg gratings (FBGs), are playing an increasing role in the chemical and biochemical sensing based on the measurement of a surface refractive index (RI) change through a label-free configuration. In these devices, the electric field evanescent wave at the fiber/surrounding medium interface changes its optical properties (i.e. intensity and wavelength) as a result of the RI variation due to the interaction between a biological recognition layer deposited over the fiber and the analyte under investigation. The use of OFG-based technology platforms takes the advantages of optical fiber peculiarities, which are hardly offered by the other sensing systems, such as compactness, lightness, high compatibility with optoelectronic devices (both sources and detectors), and multiplexing and remote measurement capability as the signal is spectrally modulated. During the last decade, the growing request in practical applications pushed the technology behind the OFG-based sensors over its limits by means of the deposition of thin film overlays, nanocoatings, and nanostructures, in general. Here, we review efforts toward utilizing these nanomaterials as coatings for high-performance and low-detection limit devices. Moreover, we review the recent development in OFG-based biosensing and identify some of the key challenges for practical applications. While high-performance metrics are starting to be achieved experimentally, there are still open questions pertaining to an effective and reliable detection of small molecules, possibly up to single molecule, sensing in vivo and multi-target detection using OFG-based technology platforms.


Sign in / Sign up

Export Citation Format

Share Document