Design of Miniaturized, Self-Out-Readable Cantilever Resonator for Highly Sensitive Airborne Nanoparticle Detection
In this paper, a self-out-readable, miniaturized cantilever resonator for highly sensitiveairborne nanoparticle (NP) detection is presented. The cantilever, which is operated in thefundamental in-plane resonance mode, is used as a microbalance with femtogram resolution. Toachieve a maximum measurement signal of the piezo resistive Wheatstone half-bridge, thegeometric parameters of the sensor design were optimized by finite element modelling (FEM).Struts at the sides of the cantilever resonator act as piezo resistors and enable an electrical read-outof the phase information of the cantilever movement whereby they do not contribute to theresonators rest mass. For the optimized design, a resonator mass of 0.93 ng, a resonance frequencyof ~440 kHz, and thus a theoretical sensitivity of 4.23 fg/Hz can be achieved. A μ-channel guiding aparticle-laden air flow towards the cantilever is integrated into the sensor chip. Electrically chargedNPs will be collected by an electrostatic field between the cantilever and a counter-electrode at theedges of the μ-channel. Such μ-channels will also be used to accomplish particle separation for sizeselectiveNP detection. Throughout, the presented airborne NP sensor is expected to demonstratesignificant improvements in the field of handheld, MEMS-based NP monitoring devices.