High Frequency FM MEMS Accelerometer Using Piezoresistive Resonators
Keyword(s):
Q Factor
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A novel frequency modulated (FM) accelerometer based on piezoresistive resonators is presented. The accelerometer uses two differential resonators, connected to the accelerometer proofmass by an amplifying leverage mechanism. The piezoresistive double-mass resonators are electrostatically driven in anti-phase and the output signal is measured piezoresistively by applying a bias current to the connecting microbeam of the double-mass resonators. Accelerometers were fabricated using SOI technology with a 5 µm device layer. Fabricated resonators show a high resonance frequency around 705 kHz and a Q-factor close to 20,000 when measured in vacuum. Preliminary measurements show a sensitivity around 0.46 Hz/g for a single resonator.
Keyword(s):
2018 ◽
Vol 284
◽
pp. 587-592
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2012 ◽
Vol 468-471
◽
pp. 879-884
Keyword(s):
2015 ◽
Vol 86
(9)
◽
pp. 094702
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Keyword(s):
1999 ◽
Vol 13
(09n10)
◽
pp. 1253-1258