A New Optical Proximity Correction with Mapping Model between Segments and Control Sites
2019 ◽
Vol 111
(3)
◽
pp. 419-432
Keyword(s):
2010 ◽
Vol 44-47
◽
pp. 1677-1681
2013 ◽
Vol 313-314
◽
pp. 1012-1016
Keyword(s):
Keyword(s):
2018 ◽
Vol 2
(2)
◽
2011 ◽
Vol 12
(5)
◽
pp. 436-442
◽
Keyword(s):
1973 ◽
Vol 31
◽
pp. 164-165
Keyword(s):
1982 ◽
Vol 40
◽
pp. 204-204
1978 ◽
Vol 36
(2)
◽
pp. 582-583
1977 ◽
Vol 35
◽
pp. 136-137