Theoretical Analysis and Experimental Verification of Triangular Fracture Defects of MgO Single Crystal Substrate in Lapping or Polishing Process
2008 ◽
Vol 254
(15)
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pp. 4856-4863
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2010 ◽
Vol 256
(9)
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pp. 2691-2699
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2007 ◽
pp. 225-230
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2007 ◽
Vol 329
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pp. 225-230
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2005 ◽
Vol 44
(10)
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pp. 7605-7607
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2020 ◽
Vol 65
(3)
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pp. 299-304