Characterization of Nanostructured Titania Thin Film and its Application in Gas Sensor
2013 ◽
Vol 289
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pp. 45-51
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Keyword(s):
X Ray
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In this paper, Nanostructured Titania (NST) was fabricated by aging titanium film in hydrogen peroxide solution. NST was analyzed and characterized using scanning electron microscope (SEM), X-ray photoelectron spectroscopy (XPS), energy-dispersive X-ray spectroscopy (EDX), X-ray diffraction (XRD), nano-indentation method and the BET method. Results showed that NST was porous TiO2 with pore diameter of 90-133 nm, hardness of 1.35Gpa, and specific surface area of 37.26 m2/g. Gas sensors using NST film as sensitive material were presented in this paper too. Electrodes were deposited upon NST patterns to create electrical connections. Gas sensors with a simple package were successfully fabricated.
2020 ◽
1999 ◽
Vol 14
(5)
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pp. 1782-1790
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