Overview of Micro-Force Sensing Methods
2013 ◽
Vol 462-463
◽
pp. 25-31
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Keyword(s):
At present, reliable micro-force sensing is one of the most important research for micromanipulation and micro-assembly. Six kinds of methods to detect micro-force are described in this paper. Analysis of the basic principle and detection accuracy of each sensing method, and applications in micro-assembly and micromanipulation are briefly introduced. The purpose of this paper is to be useful to provide some references for scholars engaging in the micro-force sensing, which in turn promotes automatic processing level of micro-assembly and micromanipulation to reliably manufacture micro devices of high quality.
2012 ◽
Vol 2012
(0)
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pp. _1P1-A05_1-_1P1-A05_4
Keyword(s):
2011 ◽
Vol 480-481
◽
pp. 590-594
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Keyword(s):
2011 ◽
Vol 332-334
◽
pp. 72-76
Keyword(s):
Keyword(s):
2019 ◽
Vol 12
(8)
◽
pp. 466-471
2019 ◽
Vol 34
(06)
◽
pp. 2054018
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Keyword(s):