Development of Three-Dimensional Dynamometer for Wafer Grinder

2010 ◽  
Vol 126-128 ◽  
pp. 361-366 ◽  
Author(s):  
Xiang Long Zhu ◽  
Ren Ke Kang ◽  
Yong Qing Wang ◽  
Dong Ming Guo

Grinding forces during grinding silicon wafer have great influences on the accuracy, surface quality and grinding yield of the wafer. It is necessary to develop an accurate and reliable grinding dynamometer for measuring and monitoring the grinding process of the large and thin wafer. In this work, a new 3D (three-dimensional) grinding dynamometer using piezoelectric sensors is designed and developed, which is used for a wafer grinder based on wafer rotating grinding method. The calibrating experiments of the 3D grinding dynamometer are carried out. The FEA and modal analysis are made and compared with the results of mode testing. Furthermore, the static performance parameters of the dynamometer are obtained from the loading experiment. The experiment results indicate that the 3D grinding dynamometer can measure axial, radial and tangential grinding force of grinding wheel with high sensitivity, good linearity, good repeatability and high natural frequency, and fully satisfied requirement for measuring and monitoring of the grinding force in wafer grinding process.

Materials ◽  
2018 ◽  
Vol 11 (11) ◽  
pp. 2293 ◽  
Author(s):  
Shuyue Zhang ◽  
Kun Zhou ◽  
Haohao Ding ◽  
Jun Guo ◽  
Qiyue Liu ◽  
...  

A three-dimensional finite element model of rail grinding was established to explore the effects of grinding passes and grinding direction on the material removal behaviour of grinding rails during the grinding process. The results indicate that as the number of grinding passes increases, a decrease in the grinding force reduces both the amount of removed rail material and the surface roughness. There is a decrease in the grinding ratio caused by the increase in the wear on the grinding wheel and the decreased removal of the rail material. When the grinding direction changes, the wear of the grinding wheel decreases, which is contrary to the increasing trend of the amount of removed rail material, the grinding ratio, the surface roughness and the grinding force.


2021 ◽  
Vol 11 (9) ◽  
pp. 4128
Author(s):  
Peng-Zhan Liu ◽  
Wen-Jun Zou ◽  
Jin Peng ◽  
Xu-Dong Song ◽  
Fu-Ren Xiao

Passive grinding is a new rail grinding strategy. In this work, the influence of grinding pressure on the removal behaviors of rail material in passive grinding was investigated by using a self-designed passive grinding simulator. Meanwhile, the surface morphology of the rail and grinding wheel were observed, and the grinding force and temperature were measured during the experiment. Results show that the increase of grinding pressure leads to the rise of rail removal rate, i.e., grinding efficiency, surface roughness, residual stress, grinding force and grinding temperature. Inversely, the enhancement of grinding pressure and grinding force will reduce the grinding ratio, which indicates that service life of grinding wheel decreases. The debris presents dissimilar morphology under different grinding pressure, which reflects the distinction in grinding process. Therefore, for rail passive grinding, the appropriate grinding pressure should be selected to balance the grinding quality and the use of grinding wheel.


2018 ◽  
Vol 198 ◽  
pp. 02004
Author(s):  
Junping Zhang ◽  
Weidong Wang ◽  
Songhua Li ◽  
Han Tao

The impacts of different linear speed of grinding wheel, grinding depth and workpiece feed speed with or without grinding fluid on grinding force were studied by plane grinding machining of zirconia ceramics. The impacts of different machining environment and grinding parameter on normal and tangential grinding forceswere studied by testing the grinding force during grinding with a force measuring device. The studies showed that the normal and tangential grinding forces decrease with the increase of the linear speed of grinding wheel and increase with the improvement of grinding depth and workpiece feed speed. The grinding depth has the greatest impacts on the normal and tangential grinding forces in dry grinding environment; while in wet grinding environment, the grinding depth exerts the greatest impacts on the normal grinding force and the linear speed of grinding wheel imposes the greatest impacts on the tangential grinding force. In addition, it was found that the normal grinding force in dry grinding is minor than that in wet grinding, that the tangential grinding force in dry grinding is greater than that in wet grinding, and that the grinding force ratio in dry grinding is lower than that in wet grinding.


2020 ◽  
Vol 2020 ◽  
pp. 1-12
Author(s):  
Amon Gasagara ◽  
Wuyin Jin ◽  
Angelique Uwimbabazi

This article presents a new model of the flat surface grinding process vibration conditions. The study establishes a particular analysis and comparison between the influence of the normal and tangential components of grinding forces on the vibration conditions of the process. The bifurcation diagrams are used to examine the process vibration conditions for the depth of cut and the cutting speed as the bifurcation parameters. The workpiece is considered to be rigid and the grinding wheel is modeled as a nonlinear two-degrees-of-freedom mass-spring-damper oscillator. To verify the model, experiments are carried out to analyze in the frequency domain the normal and tangential dynamic grinding forces. The results of the process model simulation show that the vibration condition is more affected by the normal component than the tangential component of the grinding forces. The results of the tested experimental conditions indicate that the cutting speed of 30 m/s can permit grinding at the depth of cut up to 0.02 mm without sacrificing the process of vibration behavior.


2012 ◽  
Vol 217-219 ◽  
pp. 2051-2055
Author(s):  
Ming Li Xie ◽  
Ling Lu

In the process of cam grinding, the fluctuation of grinding force can lead to the abnormal wear of the grinding wheel, the decrease of the grinding surface quality and even the damage of the grinding process system. The paper took the grinding process of numerical control cam grinding machine as research subject, the grinding force mathematical model was built, the indirect test and control measures were researched and an adaptive control method based on neural network was proposed and applied to the grinding force control of the cam grinding process. At last, the controller was designed and the grinding simulation was performed with MATLAB, which proved that the system could solve the fluctuation of grinding force during the process of cam grinding and the controller was equipped with good dynamic characteristic. The results indicate that the method can realize the purpose of optimal metal removal rate and enhance the grinding quality of cams.


Author(s):  
Yihao Zheng ◽  
Yao Liu ◽  
Yang Liu ◽  
Albert J. Shih

This study investigated the grinding force in rotational atherectomy, a clinical procedure that uses a high-speed grinding wheel to remove hardened, calcified plaque inside the human arteries. The grinding force, wheel motion, and ground surface were measured based on a ring-shape bovine bone surrogate for the calcified plaque. At 135,000, 155,000, and 175,000 rpm wheel rotational speed, the grinding forces were 1.84, 1.92, and 2.22 N and the wheel orbital speeds were 6060, 6840, and 7800 rpm, respectively. The grinding wheel was observed to bounce on the wall of the bone surrogate, leaving discrete grinding marks. Based on this observation, we modeled the grinding force in two components: impact and cutting forces. The impact force between the grinding wheel and the bone surrogate was calculated by the Hertz contact model. A multigrain smoothed particle hydrodynamics (SPH) model was established to simulate the cutting force. The grinding wheel model was built according to the wheel surface topography scanned by a laser confocal microscope. The workpiece was modeled by kinematic-geometrical cutting. The simulation predicted a cutting force of 41, 51, and 99 mN at the three investigated wheel rotational speeds. The resultant grinding forces, combining the impact and cutting forces modeled by the Hertz contact and SPH simulation, matched with the experimental measurements with relative errors less than 10%.


2009 ◽  
Vol 76-78 ◽  
pp. 107-112
Author(s):  
Kazuki Kondo ◽  
Shin-Ichi Tooe

A new system for measuring a tangential grinding force using the slip of the rotational speed of an induction motor was developed. The motor slip is measured as the change in the rotational period for the induction motor. The system operates LabVIEW software on a personal computer, and a rotary encoder is connected with the motor spindle, which drives the axis of a grinding wheel. A signal of one pulse per rotation from the rotary encoder is input to the interface of the computer to measure the rotational period. LabVIEW has the flexibility of a programming language and operates within a graphic environment in compiling the signal, analyzing measurements, and displaying analysis results. Thus, the present system is simpler than previous development tools. This work conducts a grinding experiment using the developed system to verify the sensitivity and response in measuring the motor slip. As an example of application, semidry grinding is investigated by measuring tangential grinding forces. Hence, we demonstrate the effectiveness of the developed system for data processing in the analysis of grinding phenomena.


Author(s):  
Taghi Tawakoli ◽  
Abdolreza Rasifard ◽  
Alireza Vesali

The efficiency of the grinding process highly depends on the coolant lubricant used. In grinding with CBN grinding wheels grinding oils are used increasingly. In the last decade new grinding oils based on different oil types are brought into the market, whose effect on the CBN grinding wheels performance until now not sufficiently been investigated. The Institute of Grinding and Precision Technology (KSF) investigated the influence of four different grinding oils on the performance of vitrified CBN grinding while grinding of 100Cr6 (M.-No. 1.3505), which is a heat-treatable steel with a very good grindability, and Nimonic A80, which is a difficult to grind heat-resistance superalloy. The obtained results show that the performance of the vitrified CBN grinding wheels—while using grinding oil as coolant lubricant—regarding the quality of the work piece surface, the grinding forces as well as the wear of the grinding wheel, highly depend on the viscosity of the grinding oil. Moreover, the results show that the surface quality and the grinding forces while using different grinding oils depend significantly on the work piece material.


2011 ◽  
Vol 188 ◽  
pp. 368-371
Author(s):  
H.L. Zhang ◽  
H. Guo

In the present paper, a three-dimensional finite element model was used for simulating the grinding force at different cutting conditions. The effects of the wheel speed, feed and grinding depth on the grinding force per unit width were analyzed in detail. The results show that both the normal force and tangential force increase linearly with the increasing of feed and grinding depth, however, with the increasing of wheel speed, the grinding force decreases gradually. The predicted normal and tangential grinding forces were compared with those experimentally obtained and the results show reasonable agreement quantitatively.


2013 ◽  
Vol 823 ◽  
pp. 143-148
Author(s):  
Xiao Xue Li ◽  
Jun Ming Wang ◽  
Yu Qin Sun ◽  
Zhen Gang Gao

In order to calculate the grinding force of the basin-like grinding wheel in grinding outer race elliptical grooves, the thesis simplifies the grinding process as follow: the evenly distributed abrasive grains move around grinding wheel axis along an imaginary ellipse at high speed, while the imaginary ellipse moves along the trace deflected from the grinding wheel axis simultaneously. The analysis of grinding force in CVJ outer race elliptical groove grinding with basin-like grinding wheel reveals that, the grinding force will be decreased, if wheel velocity increased and feed velocity decreased. On the other hand, with the decrease of inter-grain spacing, the grinding force of basin-like grinding wheel will be increased, but the grinding force of abrasive grit will be decreased.


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