Influence of Side-Insulation Film on Hybrid Process of Micro EDM and ECM for 3D Micro Structures

2011 ◽  
Vol 230-232 ◽  
pp. 517-521 ◽  
Author(s):  
Man Hong Hu ◽  
Yong Li ◽  
Xiao Gu Zhu ◽  
Hao Tong
Keyword(s):  
3D Structure ◽  
Side Wall ◽  
Hybrid Process ◽  
Machining Accuracy ◽  
Tool Electrode ◽  
Micro Edm ◽  
Film Property ◽  
Workpiece Material ◽  
Machining Speed ◽  
Micro Structures

This paper describes a hybrid process of Micro EDM and ECM to fabricate 3D microstructures. Micro electro discharge servo scanning machining (Micro EDSSM) is used to remove most part of workpiece material with fast machining speed, while Micro electrochemical scanning machining (Micro ECSM) with side-insulated tool electrode is used to remove the residual material and form the final 3D-structure surface. The application of side-insulated electrode during Micro ECSM is a key technological method to improve the machining accuracy of hybrid process. The effect of side-insulation film property to the movement of hydrogen bubble generated during Micro ECSM is discussed. The hydrophobic film can reduce damages to the junction between film edge and tool-electrode through the attraction to hydrogen, and a hydrophilic 704-silica material is firstly introduced for the fabrication of side-insulation film on the micro rod tool electrode by spin-coating technique. The 704-silica insulation film can effectively isolate the side of tool electrode with electrolyte. Micro 3D structures with uniform side-machining gap and small tape side-wall are machined. The surface with no heat-influence layer and 0.52μm Rahas been achieved.

CAD/CAM Integration System of 3D Micro EDM

2007 ◽  
Author(s):  
Hao Tong ◽  
Jing Cui ◽  
Yong Li ◽  
Yang Wang
Keyword(s):  
Real Time ◽  
Numerical Control ◽  
Machining Process ◽  
Tool Electrode ◽  
Electrode Wear ◽  
Micro Edm ◽  
Model Design ◽  
Integration System ◽  
Cad Cam ◽  
Micro Structures

In 3D scanning micro electro discharge machining (EDM), the CAD/CAM systems being used in mechanical milling of numerical control (NC) are unable to be applied directly due to the particularity of tool electrode wear. Based on industry computer and RT-Linux software platform, a CAD/CAM integration system of 3D micro EDM is developed. In the developed CAD/CAM integration system, the hardware includes mainly a micro feed mechanism for servo control, XY worktable, a high frequency pulse power supply, monitoring circuits etc., and the functions consist of model design, scanning path planning and simulation, NC code generation and post processing, real-time compensating of tool electrode wear, and machining control of states and process. The method of double buffer storage is adopted to transmit numbers of NC machining data. Servo scanning EDM method is used to realize real-time electrode wear compensating and thereby 3D micro structures are machined automatically. The machining experiments are made about model design, parameters optimizing, and process control. The typical 3D micro structures with space curved surfaces and lines have been machined such as micro prism, micro half tube, camber correlation line, and so on. The machining process and results show that the CAD/CAM integration system has the characters of higher real-time, reliability, and general using.

scholarly journals Limiting current density in electrochemical micromachining

2018 ◽  
Author(s):  
Chuanjun Zhao ◽  
Lizhong Xu
Keyword(s):  
Current Density ◽  
Steel Plate ◽  
Limiting Current ◽  
Diffusion Current ◽  
Electrochemical Micromachining ◽  
Machining Accuracy ◽  
Tool Electrode ◽  
Limiting Current Density ◽  
Machining Speed ◽  
Small Clearance

<p class="PaperAbstract"><span lang="EN-US">In this paper, a method of calculating the diffusion current density on the electric pole in the electrochemical micromachining is proposed. Changes of the diffusion current with system factors are investigated from which a method of increasing the diffusion current density on the electric pole under small clearance between the hole and the tool is proposed. This is the electrochemical micromachining method using vibrating tool electrode. Using this method, an etching experiment on a steel plate is performed which shows that a reasonable machining speed and high machining accuracy are simultaneously obtained.</span></p>

Investigation on the Influence of Machining Fluid on Processing Characteristics in Micro-EDM

2012 ◽  
Vol 479-481 ◽  
pp. 407-413 ◽  
Author(s):  
Sha Li ◽  
Wataru Natsu ◽  
Takeshi Masaki ◽  
Zu Yuan Yu
Keyword(s):  
Feed Rate ◽  
Deionized Water ◽  
Tool Electrode ◽  
Electrode Wear ◽  
Micro Edm ◽  
Machining Speed ◽  
Small Electrode ◽  
Short Circuits ◽  
Edm Drilling

In this paper the influence of machining liquid on the processing characteristics, such as the tool electrode wear and the tool actual feed were discussed. Micro EDM drilling was carried out using deionized water and oil dielectric as the machining liquid. It was found that using deionized water reduced the tool electrode wear. Also, occurrence of short-circuits during the processing is one of the reasons for causing large electrode wear. In the case of using oil dielectric, processed depth influences the tool electrode wear greatly and causes the change in the actual feed rate. While using deionized water, processed depth also causes the change in the actual feed rate, but nearly had no influence on the tool electrode wear. Meanwhile, when using deionized water, although the small electrode wear and high machining speed can be obtained, electrolytic dissolution may occur. Therefore, the effective method of decreasing the open voltage and increasing the feed rate to prevent the electrolytic dissolution was mentioned and experimentally verified.

Electrochemical Machining of Micro-Structures With Nanosecond Pulses

2007 ◽  
Author(s):  
Zhaoyang Zhang ◽  
Di Zhu ◽  
Ningsong Qu ◽  
Kun Wang
Keyword(s):  
Pulse Duration ◽  
Electrochemical Machining ◽  
Experimental System ◽  
Machining Accuracy ◽  
Tool Electrode ◽  
Voltage Amplitude ◽  
Nanosecond Pulses ◽  
Micro Ecm ◽  
Micro Tool ◽  
Micro Structures

Electrochemical machining (ECM) is considered an advanced and promising technique due to several special advantages, such as non-contact machining without cutting force, no tool wear and heat-affected layer, etc. Base on the experimental results of micro-ECM, the influence of predominant process parameters, i.e. electrolyte concentration, pulse duration, period and voltage amplitude of power supply, on machining accuracy were investigated and discussed. Experimental showed that lower voltage amplitude and shorter pulse duration in micro-ECM process could produce more accurate micro structure shape. Using the self-developed experimental system, the micro tool-electrode and the complex micro-structures were sequentially machined. Upon the application of ultrashort voltage pulses, the letters with 20μm in line width were fabricated stably by the W tool electrode with 10μm diameter.

Study on Micro Growth Process and Characteristics of Deposited Material in Micro EDM Deposition

2011 ◽  
Vol 697-698 ◽  
pp. 182-186
Author(s):  
Zi Long Peng ◽  
Yi Nan Li ◽  
Z.L. Wang
Keyword(s):  
Growth Process ◽  
Pulse Discharge ◽  
Hardness Test ◽  
Deposition Process ◽  
Tool Electrode ◽  
Micro Edm ◽  
Electrode Diameter ◽  
Initial Stage ◽  
Fine Surface ◽  
Micro Structures

The micro growth process and characteristics of deposited material in micro EDM deposition are researched in this paper. In the initial stage of the deposition the deposited material is not an even layer in the diameter direction of tool electrode. The emergence of deposited material will affect the next pulse discharge distribution between tool electrode and workpiece. A micro cylinder with the diameter of 85µm, height of 255µm formed successfully with the fine surface quality using the tool electrode diameter of 200µm. It has shown that micro EDM deposition process has the ability to fabrication more finer micro structures with thinner electrode. The characteristics of deposited material including bonding behavior between deposited material and workpiece, energy spectrum analysis, hardness test and resist compression test of the deposited material have been tested. Results show that the deposited material has compact microstructure and bonds close to the workpiece, which can be used in the occasion of withstanding compress.

The Deposition and Removal Process for Micro Machining Based on Electrical Discharge

2012 ◽  
Vol 472-475 ◽  
pp. 2448-2451
Author(s):  
Zi Long Peng ◽  
Yi Nan Li
Keyword(s):  
Electrical Discharge ◽  
Deposition Process ◽  
Process Conditions ◽  
Tool Electrode ◽  
Electrode Wear ◽  
Discharge Process ◽  
Micro Edm ◽  
Micro Machining ◽  
Removal Process ◽  
Micro Structures

Based on the analysis of electrical discharge process characteristics, the principle of achieving deposition process and removal process using micro EDM is proposed. By controlling the tool electrode wear in one micro EDM system, it is easy to achieve the different machining type of deposition or removal process. Centering on the problem of tool electrode wear, the process conditions of the deposition and removal including machining polarity, machining dielectric medium, discharge parameters and the tool electrode rotation are researched detailedly. Results show that under the discharge phenomena between electrodes, metal material can be deposited to form micro structures, and the transfer strategy from deposition to removal process can be controlled easily. The machining procedure for fabrication of micro structures based on depostion and removal process are put forward. And finally, some examles with well shape and dimension accuracy are given to validate the processing ability for micro machining.

scholarly journals An Investigation into Accumulative Difference Mechanism in Time and Space for Material Removal in Micro-EDM Milling

Micromachines ◽  
2021 ◽  
Vol 12 (6) ◽  
pp. 711
Author(s):  
Qi Jing ◽  
Yongbin Zhang ◽  
Lingbao Kong ◽  
Min Xu ◽  
Fang Ji
Keyword(s):  
Cross Section ◽  
Process Parameters ◽  
Material Removal ◽  
Machining Accuracy ◽  
Tool Electrode ◽  
Micro Edm ◽  
Cylindrical Electrode ◽  
Time And Space ◽  
Simulation Results ◽  
The Cross

In micro-electrical discharge machining (micro-EDM) milling, the cross-section of the microgroove machine is frequently not an ideal rectangle. For instance, there are arc shapes on the bottom and corners, and the sidewall is not steep. The theoretical explanation for this phenomenon is still lacking. In addition to the tip discharge effect, the essential reason is that there is an accumulative difference in time and space during the shape change process of a tool electrode and the microstructure formation on a workpiece. The process parameters are critical influencing factors that determine this accumulative difference. Therefore, the accumulative difference mechanism in time and space is investigated in this paper, and then a theoretical model is developed to simulate the micro-EDM milling process with a straight-line single path. The simulation results for a cylindrical electrode at the two rotational speeds of 0 (nonrotating) and 300 rpm are compared, while the results for a cylindrical electrode and a square electrode at a rotation speed of 0 are also compared to verify that different process parameters generate accumulative differences in the time and space of material removal. Finally, micro-EDM milling experiments are carried out to verify the simulation model. The maximum mean relative deviation between the microgroove profiles of simulation results and those of experiments is 11.09%, and the profile shapes of simulations and experiments have a good consistency. A comparative experiment between a cylindrical electrode and a hollow electrode is also performed, which further verifies the mechanism revealed in the study. Furthermore, the cross-section profile of a microgroove can be effectively controlled by adjusting the process parameters when utilising these accumulative differences through fabricating a microgroove with a V-shaped cross-section by a square electrode and a microgroove with a semi-circular cross-section by a cylindrical electrode. This research provides theoretical guidance for solving the problems of the machining accuracy of detail features in micro-EDM milling, for instance, to machine a microgroove with an ideal rectangular cross-section.

Experimental Research of Micro Reversible Electrical Discharge Machining

2009 ◽  
Vol 69-70 ◽  
pp. 177-181
Author(s):  
Zi Long Peng ◽  
Zhen Long Wang ◽  
Ying Huai Dong ◽  
Hui Chen
Keyword(s):  
Electrical Discharge ◽  
Electrical Discharge Machining ◽  
Machining Process ◽  
Tool Electrode ◽  
Micro Edm ◽  
Micro Electrical Discharge Machining ◽  
Metallurgical Bonding ◽  
Machining System ◽  
Micro Structures ◽  
Edm Process

Based on the principle of micro electrical discharge machining (EDM), a reversible machining method is proposed, which can achieve depositing or removing selectively metal material for the fabrication of micro structures. It is easy to transform the machining process from deposition to removal in one machining system. The characteristics of the deposited material show that the components of deposited material are almost the same as those of the tool electrode, and the metallurgical bonding has formed on the interface between the deposited material and the base. Moreover, the deposited material has well machinability in different micro EDM selective removal process, including micro EDM die-sinking and micro EDM milling. As a result, a micro square column with 0.1mm in side length, 0.88mm in height and a micro cylinder with 0.14mm in diameter, 1.18mm in height were fabricated by using the micro reversible EDM process.

Influence of Low-Level Voltage in Pulse ECM on Electrode Wear and Machining Accuracy

2012 ◽  
Vol 217-219 ◽  
pp. 2388-2392 ◽  
Author(s):  
Katsuaki Endo ◽  
Wataru Natsu
Keyword(s):  
Tool Wear ◽  
Pulse Voltage ◽  
Duty Ratio ◽  
Machining Accuracy ◽  
Tool Electrode ◽  
Electrode Wear ◽  
Low Level ◽  
Machining Conditions ◽  
Machining Speed ◽  
Speed And Accuracy

It is well-known that using pulse voltage could improve the machining accuracy in ECM process. However, the tool electrode wear occurs under some machining conditions in pulse ECM. In order to acquire the high machining accuracy, a method to eliminate the electrode wear by raising the low-level voltage was proposed and the relation between the low-level voltage and the machining accuracy was experimentally investigated in this research. It was found that the low-level voltage of 2V could not only prevent the tool electrode wear, but also improve the machining accuracy and the machining speed. In addition to the low-level voltage, the influence of the pulse duty ratio on the tool wear, the machining speed and accuracy was investigated. It was found that the raised low-level voltage was also effective when the duty ratio was increased and the increased duty ratio itself reduced the tool electrode wear.

scholarly journals Limiting current density in electrochemical micromachining

2018 ◽  
Vol 8 (4) ◽  
pp. 321-330
Author(s):  
Chuanjun Zhao ◽  
Lizhong Xu
Keyword(s):  
Current Density ◽  
Steel Plate ◽  
Limiting Current ◽  
Diffusion Current ◽  
Electrochemical Micromachining ◽  
Machining Accuracy ◽  
Tool Electrode ◽  
Limiting Current Density ◽  
Machining Speed ◽  
Small Clearance

In this paper, a method of calculating the diffusion current density on the electric pole in the electrochemical micromachining is proposed. Changes of the diffusion current with system factors are investigated from which a method of increasing the diffusion current density on the electric pole under small clearance between the hole and the tool is proposed. This is the electrochemical micromachining method using vibrating tool electrode. Using this method, an etching experiment on a steel plate is performed which shows that a reasonable machining speed and high machining accuracy are simultaneously obtained.

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