Separation Gap Estimation in Dynamic Systems Actuated by Casimir Force
Keyword(s):
In this paper, a new estimation method is proposed to estimate the separation gap and other unknown parameters in Casimir force actuated systems. Real experimental conditions like the finite conductivity and surface roughness are considered as well. Simulation study shows that the method is accurate even when the system has severe nonlinearity.
2021 ◽
Vol 8
(1)
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2010 ◽
Vol 34
(2)
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pp. 295-308
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2020 ◽
Vol 5
(7)
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pp. 1277-1289
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1963 ◽
Vol 8
(3)
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pp. 255-256
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Keyword(s):