The Analysis and Study Based on MEMS Sensor
2011 ◽
Vol 282-283
◽
pp. 271-274
Keyword(s):
A kind of ultra micro pressure range MEMS pressure sensor is elaborated and analyzed in detail. The chip structure selection of pressure sensor is researched by the relative theory and the reasonable chip structure is designed in this paper. In order to design the Wheatstone bridge properly, we explore the width and length of the resistors on the membrane of the pressure sensor. At last, through the finite element analysis method, the relevant dynamic properties are analyzed for the sensor too. The dynamic response time is 3.2×10-5s. The response speed is fast and the sensor has many advantages under the periodic variation pressure.
2012 ◽
Vol 468-471
◽
pp. 746-752
2011 ◽
Vol 194-196
◽
pp. 1977-1981
2011 ◽
Vol 2
(3)
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2014 ◽
Vol 609-610
◽
pp. 1088-1093
2012 ◽
Vol 503-504
◽
pp. 802-804
◽
2011 ◽
Vol 328-330
◽
pp. 1467-1470
2013 ◽
Vol 753-755
◽
pp. 1102-1105
2010 ◽
Vol 450
◽
pp. 119-123
◽
2014 ◽
Vol 487
◽
pp. 455-459
◽