The Analysis and Study Based on MEMS Sensor

2011 ◽  
Vol 282-283 ◽  
pp. 271-274
Author(s):  
Yan Bing LI ◽  
Meng Yuan ◽  
Ji Yong Xu

A kind of ultra micro pressure range MEMS pressure sensor is elaborated and analyzed in detail. The chip structure selection of pressure sensor is researched by the relative theory and the reasonable chip structure is designed in this paper. In order to design the Wheatstone bridge properly, we explore the width and length of the resistors on the membrane of the pressure sensor. At last, through the finite element analysis method, the relevant dynamic properties are analyzed for the sensor too. The dynamic response time is 3.2×10-5s. The response speed is fast and the sensor has many advantages under the periodic variation pressure.

2018 ◽  
Vol 251 ◽  
pp. 04040
Author(s):  
Zaven Ter-Martirosyan ◽  
Ivan Luzin

The article presents the results of a comprehensive research of the dynamic impacts on a modified base. The modified base was obtained as a result of compensatory injection at the experimental site for the accident recovery at the hydraulic engineering structure. The complex study of the dynamic impacts includes special laboratory tests to determine the soil parameters, the finite element analysis of the experimental site, taking into account the dynamic properties, the selection of the necessary equipment for field experiments based on the numerical solution results, a full-scale experiment with the measurement of the foundation sediments of the experimental site.


2012 ◽  
Vol 468-471 ◽  
pp. 746-752
Author(s):  
Hai Yan Hu ◽  
Wei Da Li ◽  
Juan Li ◽  
Li Ning Sun

The colonoscopic robot with continuum structure can offer enhanced environmental interaction by deforming to fit environmental constraints. In order to improve its perception ability and avoid perforation and other kickbacks, it is necessary to integrate pressure sensors into colonoscopic robot. A surface pressure sensor for the measure of contact pressure between colonoscopic robot and colon wall is designed. The sensor is made of aluminum and is 15.6mm in diameter and 3mm in width. It consists of external ring, internal ring, connection and two resistance strain gauge. The mechanical structure of the sensor is introduced. The mechanical characteristics is analyzed and simulated by the finite element analysis software ANSYS. The experiment system is built and the data is sampled through Wheatstone bridge. The data fitting is performed based on least squares method with Matlab software. The result shows that the surface pressure sensor has advantages of good linearity and accuracy. This study lays a foundation for the practical application of colonoscopic robot.


2011 ◽  
Vol 194-196 ◽  
pp. 1977-1981
Author(s):  
Dong Qiang Gao ◽  
Zhi Yun Mao ◽  
Zhong Yan Li ◽  
Fei Zhang

The modal analysis and harmonic response analysis of the machine tool table with periodic truss-core structures are analyzed and calculated by finite element analysis software-ANSYS Workbench, then we get the finite element analysis results. After comparing the results with finite element analysis results of the original machine tool table, we come to the conclusion that the dynamic properties of the machine tool table with periodic truss-core structures are better than the original machine tool table’s. It makes a base for optimized design and remanufacturing.


Author(s):  
S. Sathyanarayanan ◽  
A. Vimala Juliet

Micromachining technology has greatly benefited from the success of developments in implantable biomedical microdevices. In this paper, microelectromechanical systems (MEMS) capacitive pressure sensor operating for biomedical applications in the range of 20–400 mm Hg was designed. Employing the microelectromechanical systems technology, high sensor sensitivities and resolutions have been achieved. Capacitive sensing uses the diaphragm deformation-induced capacitance change. The sensor composed of a rectangular polysilicon diaphragm that deflects due to pressure applied over it. Applied pressure deflects the 2 µm diaphragm changing the capacitance between the polysilicon diaphragm and gold flat electrode deposited on a glass Pyrex substrate. The MEMS capacitive pressure sensor achieves good linearity and large operating pressure range. The static and thermo electromechanical analysis were performed. The finite element analysis data results were generated. The capacitive response of the sensor performed as expected according to the relationship of the spacing of the plates.


2014 ◽  
Vol 609-610 ◽  
pp. 1088-1093
Author(s):  
Lei Li ◽  
Xiao Feng Zhao ◽  
Yang Yu ◽  
Dian Zhong Wen ◽  
Jing Ya Cao ◽  
...  

A silicon bridge magnetic sensor based on cantilever beam is presented in this paper. Thesensor is composed of the Wheatstone bridge that made up of nano-polysilicon thin-film transistors(TFTs) and a ferromagnetic magnet adhered to the free end of cantilever beam. Through building thesimulation model, the finite element analysis of the sensor is carried out by using ANSYS software.The results show that this sensor can realize the measurement to the external magnetic field. Accordingto the simulation results, fabrication and packaging of the sensor chip are achieved by using the microelectromechanical system (MEMS) technology. Experiment result shows that when the supply voltageis 3.0 V, the sensitivity of the sensor is 94 mV/T.


2012 ◽  
Vol 503-504 ◽  
pp. 802-804 ◽  
Author(s):  
Ping Wei ◽  
Jiang Han ◽  
Hui Lian Geng

Introduces the general twist drill analysis, Through the continuous experiment and practice, obtained some processing key question method. As a result of small and deep hole parts of the scene processing efficiency is low, the improper selection of cutting quantity will cause premature wear of cutting tool. The traditional method is the empirical method and experimental method to solve the waste of material and time comparison. This article mainly is the finite element analysis software, the analysis of the ordinary drill thermal stress, transient dynamics, to solve the optimization of cutting parameters before processing, improve processing efficiency, save cost.


2011 ◽  
Vol 328-330 ◽  
pp. 1467-1470
Author(s):  
Zhou Qin ◽  
Kun Peng Ma

Although the zinc-aluminum alloy has gotten substantial increase in terms of strength and friction characteristics than the traditional zinc alloy, it has limitation in the operating temperature and speed. In order to further improve the frictional characteristic and expand its application range, we adopted the inexpensive zinc-aluminum alloy of ZA27 reinforced by TiC nano-particles to replace the traditional bronze alloys (ZQSn6-6-3) to produce bearing bush. And through its dynamic performance of the finite element analysis to prove particle reinforced ZA27 bearing bush has good dynamic performance.


2013 ◽  
Vol 753-755 ◽  
pp. 1102-1105
Author(s):  
Li Ying Ju ◽  
Yao Gang Li ◽  
Chang Sheng Qiao ◽  
Hong Chao Ji ◽  
Zhi Ran Liu

The article mainly studies the micro electric vehicles shock absorbing coil spring. For its actual working conditions, the finite element analysis software ANSYS is used to analyze the nonlinear of the spring. The large deformation and the contact between flexible surface and flexible surface should be considered in the nonlinear analysis. And we get the spring stress, displacement etc. Then the results are reprocessed. For the shock absorbing coil spring used in the micro electric vehicles, there are no improved research methods and theoretical support, this study provides the basis for optimization design and selection of the shock absorbing coil spring.


2010 ◽  
Vol 450 ◽  
pp. 119-123 ◽  
Author(s):  
Kemal Çalışkan ◽  
Erhan Ilhan Konukseven (1) ◽  
Y. Samim Ünlüsoy

The basic problem in the finite element analysis of parts made of hyperelastic materials is the identification of mathematical material model coefficients. Furthermore, selection of a suitable mathematical hyperelastic material model may not be straightforward. In this study, a systematic design methodology is presented for hyperelastic suspension jounce bumpers. The presented methodology involves a critical examination of material testing procedures, material model selection, and coefficient identification. The identified material model coefficients are verified through comparison of the finite element analysis results with actual tests.


2014 ◽  
Vol 487 ◽  
pp. 455-459 ◽  
Author(s):  
Yuan Zhang ◽  
Qiang Liu ◽  
Guang Han ◽  
Jian Wang

Finite element analysis has been done to analyze pump bearing assembly in interference assembly condition by ANSYS software. The press-in assembly environment has been simulated, and the maximum stress and maximum deformation of inner race have been analyzed. Studies show that with the increase of bearing size, the change law of maximum stress and maximum deformation does not single unidirectionally increase or decrease simply. At the same time, the interference value also influences the change law. So, in the bearing assembly tolerance selection the influence of the interference must be considered fully. The finite element analysis can guide the selection of fit tolerance.


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