Design and Fabrication of Micro Oxygen Sensor

2011 ◽  
Vol 483 ◽  
pp. 237-242
Author(s):  
Chia Yen Lee ◽  
Long Kai Lin Liou ◽  
Chin Lung Chang ◽  
Chang Hsing Tai ◽  
Lung Ming Fu
Keyword(s):  
Thin Film ◽  
Electrical Conductivity ◽  
Gas Sensor ◽  
Oxygen Sensor ◽  
Rf Sputtering ◽  
Experimental Results ◽  
Surface Pattern ◽  
Working Temperature ◽  
Measured Resistance ◽  
Sensing Performance

In the study, a MEMS-based gas sensor is presented, which consists of a sensing thin film deposited by RF sputtering and annealed at 375°C. The structure and surface pattern of the thin film are analyzed by XRD and SEM. The sensor consists of a substrate, Pt interdigitated electrodes and an SnO2 sensing layer. As concentration of oxygen changes, a change in the electrical conductivity of the SnO2 film is caused. The experimental results show that the measured resistance increases as the concentration of oxygen increases at a working temperature of 300°C. A good oxygen sensing performance is presented in the study.

Integration of microcatalysts on thin membrane for thermoelectric gas sensor devices

2004 ◽  
Vol 828 ◽  
Author(s):  
Yeongsoo Choi ◽  
Woosuck Shin ◽  
Kazuki Tajima ◽  
Noriya Izu ◽  
Ichiro Matsubara ◽  
...  
Keyword(s):  
Thin Film ◽  
Rf Sputtering ◽  
Hydrogen Sensor ◽  
Thin Membrane ◽  
Alumina Catalyst ◽  
Sensor Devices ◽  
Thin Film Catalysts ◽  
Voltage Signal ◽  
Catalyst Temperature ◽  
Sensing Performance

ABSTRACTDispenser technique was employed to integrate the Pt loaded on alumina (Pt/alumina) micro-catalysts on thin membrane of micro-thermoelectric hydrogen sensor (μ-THS). The μ-THS with Pt loaded alumina showed higher sensing performance than bulk-type THS with Pt thin film prepared by RF sputtering method. For the μ-THS with Pt/alumina catalyst, its voltage signal was 7.3 mV for hydrogen concentration of 1 % in dry air at catalyst temperature of 100 °C. In the case of the bulk-type THS with Pt thin film catalysts, the voltage signal was 0.33 mV under the same condition.

Electrical Conductivity Manipulation and Switching Phenomena of Poly(p-Phenylenebenzobisthiazole) Thin Film by Doping Process

2010 ◽  
Author(s):  
Jiahua Zhu ◽  
Thomas C. Ho ◽  
Zhanhu Guo ◽  
Suying Wei ◽  
Sung Park ◽  
...  
Keyword(s):  
Thin Film ◽  
Electrical Conductivity

Ternary CuO:SnO2:ZnO (1:1:1) composite thin film for room temperature gas sensor application

Optik ◽  
2021 ◽  
Vol 234 ◽  
pp. 166615
Author(s):  
S.R. Cynthia ◽  
R. Sivakumar ◽  
C. Sanjeeviraja
Keyword(s):  
Thin Film ◽  
Gas Sensor ◽  
Room Temperature ◽  
Composite Thin Film ◽  
Sensor Application

scholarly journals Optimizing the Properties of La0.8Sr0.2CrO3 Thin Films through Post-Annealing for High-Temperature Sensing

Nanomaterials ◽  
2021 ◽  
Vol 11 (7) ◽  
pp. 1802
Author(s):  
Dan Liu ◽  
Peng Shi ◽  
Yantao Liu ◽  
Yijun Zhang ◽  
Bian Tian ◽  
...  
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Annealing Temperature ◽  
Rf Sputtering ◽  
Maximum Size ◽  
Cross Sectional ◽  
Post Annealing ◽  
Maximum Conductivity ◽  
Different Temperatures ◽  
Post Annealing Temperature

La0.8Sr0.2CrO3 (0.2LSCO) thin films were prepared via the RF sputtering method to fabricate thin-film thermocouples (TFTCs), and post-annealing processes were employed to optimize their properties to sense high temperatures. The XRD patterns of the 0.2LSCO thin films showed a pure phase, and their crystallinities increased with the post-annealing temperature from 800 °C to 1000 °C, while some impurity phases of Cr2O3 and SrCr2O7 were observed above 1000 °C. The surface images indicated that the grain size increased first and then decreased, and the maximum size was 0.71 μm at 1100 °C. The cross-sectional images showed that the thickness of the 0.2LSCO thin films decreased significantly above 1000 °C, which was mainly due to the evaporation of Sr2+ and Cr3+. At the same time, the maximum conductivity was achieved for the film annealed at 1000 °C, which was 6.25 × 10−2 S/cm. When the thin films post-annealed at different temperatures were coupled with Pt reference electrodes to form TFTCs, the trend of output voltage to first increase and then decrease was observed, and the maximum average Seebeck coefficient of 167.8 µV/°C was obtained for the 0.2LSCO thin film post-annealed at 1100 °C. Through post-annealing optimization, the best post-annealing temperature was 1000 °C, which made the 0.2LSCO thin film more stable to monitor the temperatures of turbine engines for a long period of time.

scholarly journals Enhancing room-temperature NO2 gas sensing performance based on a metal phthalocyanine/graphene quantum dot hybrid material

RSC Advances ◽  
2021 ◽  
Vol 11 (10) ◽  
pp. 5618-5628
Author(s):  
Wenkai Jiang ◽  
Xinwei Chen ◽  
Tao Wang ◽  
Bolong Li ◽  
Min Zeng ◽  
...  
Keyword(s):  
Quantum Dot ◽  
Gas Sensor ◽  
Hybrid Material ◽  
High Performance ◽  
Room Temperature ◽  
Gas Sensing ◽  
Metal Phthalocyanine ◽  
Graphene Quantum Dot ◽  
Sensing Performance

A high performance gas sensor based on a metal phthalocyanine/graphene quantum dot hybrid material was fabricated for NO2 detection at room-temperature.

Synthesis of Nanocomposite thin film Ti/Al Multilayers and Ti-Aluminides

1996 ◽  
Vol 457 ◽  
Author(s):  
R. Banerjee ◽  
X. D. Zhang ◽  
S. A. Dregia ◽  
H. L. Fraser
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Magnetron Sputtering ◽  
Layer Thickness ◽  
Thermodynamic Model ◽  
Interfacial Reactions ◽  
Experimental Results ◽  
Structural Transitions ◽  
Nanocomposite Thin Film ◽  
Multilayered Thin Films

ABSTRACTNanocomposite Ti/Al multilayered thin films have been deposited by magnetron sputtering. These multilayers exhibit interesting structural transitions on reducing the layer thickness of both Ti and Al. Ti transforms from its bulk stable hep structure to fee and Al transforms from fee to hep. The effect of ratio of Ti layer thickness to Al layer thickness on the structural transitions has been investigated for a constant bilayer periodicity of 10 nm by considering three different multilayers: 7.5 nm Ti / 2.5 nm Al, 5 nm Ti / 5 nm Al and 2.5 nm Ti / 7.5 nm Al. The experimental results have been qualitatively explained on the basis of a thermodynamic model. Preliminary experimental results of interfacial reactions in Ti/Al bilayers resulting in the formation of Ti-aluminides are also presented in the paper.

Study of Optical Gas Chamber Based on Infrared Gas Sensor

2012 ◽  
Vol 472-475 ◽  
pp. 1102-1106
Author(s):  
Ting Liang ◽  
Xu Jun Yang ◽  
Cheng Yang Xue ◽  
Wen Dong Zhang
Keyword(s):  
Gas Sensor ◽  
Design Method ◽  
Experimental Results ◽  
Work Design ◽  
Pyroelectric Detector ◽  
Infrared Source ◽  
Response Sensitivity ◽  
Gas Chamber

In this work, design method for fabricating optical gas chamber of infrared gas sensor was introduced in detail. IRL715 infrared source, PYS3228 pyroelectric detector with double filters and optical gas chamber were assembled into the optical gas chamber, and then the Nor-infrared (NDIR)gas sensor was produced. After tested in specific methane environment, the performance of optical gas chamber was verified. Meanwhile, optical gas chamber was processed with dustproof and waterproof measures. Experimental results show that response sensitivity of optical gas chamber is good.

Molecularly Mediated Thin Film Assembly of Nanoparticles on Flexible Devices: Electrical Conductivity versus Device Strains in Different Gas/Vapor Environment

ACS Nano ◽  
2011 ◽  
Vol 5 (8) ◽  
pp. 6516-6526 ◽  
Author(s):  
Jun Yin ◽  
Peipei Hu ◽  
Jin Luo ◽  
Lingyan Wang ◽  
Melissa F. Cohen ◽  
...  
Keyword(s):  
Thin Film ◽  
Electrical Conductivity ◽  
Flexible Devices ◽  
Film Assembly
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