An In Situ Measuring Method for Young's Modulus of a MEMS Film Base on Resonance Frequency

2012 ◽  
Vol 503 ◽  
pp. 308-311
Author(s):  
Han Chen ◽  
Hua Rong
Keyword(s):  
Thin Film ◽  
Resonance Frequency ◽  
Young’S Modulus ◽  
Circular Plate ◽  
Material Property ◽  
Young's Modulus ◽  
Measuring Method ◽  
Test Structure ◽  
Film Research

Large-scale measurement of material property is not suit for the MEMS thin-film. Research the in-situ measuring method for material property of the MEMS thin-film is urgently. A center-anchored circular plate is adopted as the test structure here. The resonance frequency of the circular plate is measured to extract the Young’s modulus of a MEMS thin-film. The accuracy of this non-contact in-situ measuring method has been verified by CoventorWare. The inferences of the stress gradient have been analyzed. The advantages of the test structure and the measuring method present here also have been discussed.

A In Situ Measuring Method for Stress Gradient of a MEMS Film

2009 ◽  
Vol 60-61 ◽  
pp. 357-360 ◽  
Author(s):  
Han Chen ◽  
Hua Rong ◽  
Ming Wang
Keyword(s):  
Thin Film ◽  
Circular Plate ◽  
Stress Gradient ◽  
Measuring Method ◽  
Mechanical Parameter ◽  
Curvature Radius ◽  
Mems Devices ◽  
Out Of Plane

The stress gradient of a deposited thin-film is a mechanical parameter that affects the performance of MEMS devices, so in-situ measuring stress gradient of a thin-film is great significant. A new in-situ measuring method based on a center-anchored circular plate is presented. The Mirau interferometer has been used to measure the out-of-plane height at the edge of circular plate, then the curvature radius of the plate and the stress gradient of the film can be calculated. The measuring method has been verified by CoventorWare. The accuracy of the presented measuring method is ideal. The advantages of the method also have been discussed.

Mechanical Properties of Pyrolytic "SiOCN" Thin Coatings

1993 ◽  
Vol 308 ◽  
Author(s):  
Sandrine Bec ◽  
André Tonck ◽  
Jean-Luc Loubet
Keyword(s):  
Mechanical Properties ◽  
Heat Treatment ◽  
Young’S Modulus ◽  
Young's Modulus ◽  
Ceramic Coatings ◽  
Optical Observation ◽  
Thin Coatings ◽  
Polymer Precursors ◽  
Polymeric State

ABSTRACTPyrolysis of polymer precursors (polysilazane) is a technologically and economically interesting way to produce thin ceramic coatings. However, many cracks appear and decohesion occurs during pyrolysis when the ceramic coatings (SiOCN) are thicker than 0.5 micrometers. In order to understand these cracking phenomena, the coatings are mechanically characterized by nanoindentation at different stages of the pyrolysis heat treatment.During pyrolysis, the cracking temperature is detected by in-situ optical observation. The thickness of the coatings varies during pyrolysis from 3 micrometers at the polymeric state to 1 micrometer at the ceramic state. The coatings' properties, hardness and Young's modulus are evaluated after heat treatment, taking into account the substrate's influence. A large variation of these properties occurs at the cracking temperature. Both the hardness and the Young's modulus are multiplied by a factor of 10. By analysing these results, we show that cracking is correlated with the evolution of the coatings' mechanical properties during the transformation.

scholarly journals Young’s Modulus of Polycrystalline Titania Microspheres Determined by In Situ Nanoindentation and Finite Element Modeling

2014 ◽  
Vol 2014 ◽  
pp. 1-5 ◽  
Author(s):  
Peida Hao ◽  
Yanping Liu ◽  
Yuanming Du ◽  
Yuefei Zhang
Keyword(s):  
Finite Element ◽  
Finite Element Simulation ◽  
Young’S Modulus ◽  
Young's Modulus ◽  
Deformation Mechanisms ◽  
Displacement Curve ◽  
Element Simulation ◽  
Nanoindentation Experiment ◽  
Force Displacement

In situ nanoindentation was employed to probe the mechanical properties of individual polycrystalline titania (TiO2) microspheres. The force-displacement curves captured by a hybrid scanning electron microscope/scanning probe microscope (SEM/SPM) system were analyzed based on Hertz’s theory of contact mechanics. However, the deformation mechanisms of the nano/microspheres in the nanoindentation tests are not very clear. Finite element simulation was employed to investigate the deformation of spheres at the nanoscale under the pressure of an AFM tip. Then a revised method for the calculation of Young’s modulus of the microspheres was presented based on the deformation mechanisms of the spheres and Hertz’s theory. Meanwhile, a new force-displacement curve was reproduced by finite element simulation with the new calculation, and it was compared with the curve obtained by the nanoindentation experiment. The results of the comparison show that utilization of this revised model produces more accurate results. The calculated results showed that Young’s modulus of a polycrystalline TiO2microsphere was approximately 30% larger than that of the bulk counterpart.

Measurement of Young's Modulus and Poisson's Ratio of Thin Film by Combination of Bulge Test and Nano-Indentation

2008 ◽  
Vol 33-37 ◽  
pp. 969-974 ◽  
Author(s):  
Bong Bu Jung ◽  
Seong Hyun Ko ◽  
Hun Kee Lee ◽  
Hyun Chul Park
Keyword(s):  
Thin Film ◽  
Mechanical Properties ◽  
Young’S Modulus ◽  
Poisson’S Ratio ◽  
Young's Modulus ◽  
Applied Pressure ◽  
Indentation Test ◽  
Poisson's Ratio ◽  
Bulge Test ◽  
Nano Indentation

This paper will discuss two different techniques to measure mechanical properties of thin film, bulge test and nano-indentation test. In the bulge test, uniform pressure applies to one side of thin film. Measurement of the membrane deflection as a function of the applied pressure allows one to determine the mechanical properties such as the elastic modulus and the residual stress. Nano-indentation measurements are accomplished by pushing the indenter tip into a sample and then withdrawing it, recording the force required as a function of position. . In this study, modified King’s model can be used to estimate the mechanical properties of the thin film in order to avoid the effect of substrates. Both techniques can be used to determine Young’s modulus or Poisson’s ratio, but in both cases knowledge of the other variables is needed. However, the mathematical relationship between the modulus and Poisson's ratio is different for the two experimental techniques. Hence, achieving agreement between the techniques means that the modulus and Poisson’s ratio and Young’s modulus of thin films can be determined with no a priori knowledge of either.

Parabolic-Apex Numerical Back-Analysis of Mechanics Parameters of Surrounding Rock

2012 ◽  
Vol 204-208 ◽  
pp. 196-201 ◽  
Author(s):  
Jian Cong Xu ◽  
Yi Wei Xu
Keyword(s):  
Young’S Modulus ◽  
Young's Modulus ◽  
Pressure Coefficient ◽  
Back Analysis ◽  
Surrounding Rock ◽  
In Situ Monitoring ◽  
Monitoring Data ◽  
3D Fem ◽  
Physical Mechanics

The parabolic-apex numerical back-analysis method (PNBM) was proposed to obtain such physical-mechanics parameters as Young's modulus and lateral pressure coefficient of surrounding rock by 3D FEM numerical analysis based on in-situ monitoring data. Taking Xiang-an Subsea Tunnel (located in Xiamen, Fujian Province, China) for example, adopting the PNBM using ABAQUS software, three dimensional elastic-plastic FEM-PNBM of tunnel surrounding rock was validated using in-situ monitoring data. The results show as follows: Using the PNBM, not only may high calculation precision be obtained, better meeting the demand of actual projects, but also more reasonable and reliable physical mechanics indices of surrounding rock such as Young's modulus and lateral confinement pressure coefficient, may be obtained. The applicability and the simplicity of this proposed method also support its usefulness.

Determination of Mechanical Properties of Thin Film on Silicon Wafer

2003 ◽  
Author(s):  
Enboa Wu ◽  
Albert J. D. Yang ◽  
Ching-An Shao ◽  
C. S. Yen
Keyword(s):  
Thin Film ◽  
Mechanical Properties ◽  
Thermal Expansion ◽  
Young’S Modulus ◽  
Silicon Wafer ◽  
Coefficient Of Thermal Expansion ◽  
Young's Modulus ◽  
Poisson Ratio ◽  
Bulk State

Nondestructive determination of Young’s modulus, coefficient of thermal expansion, Poisson ratio, and thickness of a thin film has long been a difficult but important issue as the film of micrometer order thick might behave differently from that in the bulk state. In this paper, we have successfully demonstrated the capability of determining all these four parameters at one time. This novel method includes use of the digital phase-shifting reflection moire´ (DPRM) technique to record the slope of wafer warpage under temperature drop condition. In the experiment, 1-um thick aluminum was sputtered on a 6-in silicon wafer. The convolution relationship between the measured data and the mechanical properties was constructed numerically using the conventional 3D finite element code. The genetic algorithm (GA) was adopted as the searching tool for search of the optimal mechanical properties of the film. It was found that the determined data for Young’s modulus (E), Coefficient of Thermal Expansion (CTE), Poisson ratio (ν), and thickness (h) of the 1.00 um thick aluminum film were 104.2Gpa, 38.0 ppm/°C, 0.38, and 0.98 um, respectively, whereas that in the bulk state were measured to be E=71.4 Gpa, CTE=23.0 ppm/°C, and ν=0.34. The significantly larger values on the Young’s modulus and the coefficient of thermal expansion determined by this method might be attributed to the smaller dislocation density due to the thin dimension and formation of the 5-nm layer of Al2O3 formed on top of the 1-um thick sputtered film. The Young’s Modulus and the Poisson ratio of this nano-scale Al2O3 film were then determined. Their values are consistent with the physical intuition of the microstructure.

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