High-Accuracy Calibration of CMM Using Temporal-Coherence Fiber Interferometer with Fast-Repetition Comb Laser
A coordinate measuring machine (CMM) is a measuring system with the means to move probing system and capability to determine spatial coordinates on working surface. CMM is used in many industry fields from few micrometers of work pieces to a 5-meter truck. The verification method of CMM is done following international standard. The artifacts for calibrated reference length are the end standards, such as gauge block and step gauge, or laser interferometer for large size CMM. The current laser interferometer is operated by continuous laser and interference fringe counting. One constraint of continuous laser is an incremental measurement. The measurement path cannot be interrupted during the measurement period. We developed a new absolute interferometer system from a short-pulse mode-locked fiber laser. A Fabry–Pérot etalon (FPE) is used to select high-frequency parts of repetition-frequency modes of the mode-locked comb laser at the wavelength of 1.55 μm. The 5-GHz repetition-modified laser beam, which is realized by a new fiber-type FPE, is transmitted to a fiber-type Michelson interferometer. The interference fringes exhibit a temporal coherence interference and can be used for measuring spatial positioning. The temporal coherence between different pairs of modified pulse trains is referred to as absolute length standards. The performance of CMM was determined directly from different positions of two interference fringe patterns.