Carrier Lifetime Studies in Diode Structures on Si Substrates with and without Ge Doping
2011 ◽
Vol 178-179
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pp. 347-352
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Keyword(s):
Results are presented of a comparative study of diodes processed on n-type Cz grown Si substrates without and with Ge doping concentration of about 1019 cm-3 and 1020 cm-3. In order to investigate thermal donor formation, isothermal annealing at 450°C for 0.5 – 5 h was carried out. As processed diodes were also irradiated with 2 MeV electrons with fluences in the range between 1014 and 1017 e/cm2 to investigate the Ge doping influence on irradiation induced defect formation. Diodes after thermal and radiation treatments have been investigated by combining different techniques.
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2007 ◽
Vol 131-133
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pp. 393-398
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2005 ◽
Vol 108-109
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pp. 181-186
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Keyword(s):
1993 ◽
Vol 143-147
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pp. 963-968
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1997 ◽
Vol 57-58
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pp. 189-196
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Keyword(s):
2010 ◽
Vol 49
(12)
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pp. 121201
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Keyword(s):