Finite Element Modeling of Pad Deformation due to Diamond Disc Conditioning in Chemical Mechanical Polishing (CMP)

2012 ◽  
Author(s):  
Emmanuel A. Baisie ◽  
Z. C. Li ◽  
X. H. Zhang
Keyword(s):  
Mechanical Properties ◽  
Finite Element ◽  
Material Removal ◽  
High Performance ◽  
Removal Rate ◽  
Chemical Mechanical Planarization ◽  
Element Analysis ◽  
Fea Model ◽  
Pad Wear ◽  
Diamond Disc

Chemical mechanical planarization (CMP) is widely used to planarize and smooth the surface of semiconductor wafers. In CMP, diamond disc conditioning is traditionally employed to restore pad planarity and surface asperity. Pad deformation which occurs during conditioning affects the material removal mechanism of CMP since pad shape, stress and strain are related to cut rate during conditioning, pad wear rate and wafer material removal rate (MRR) during polishing. Available reports concerning the effect of diamond disc conditioning on pad deformation are based on simplified models of the pad and do not consider its microstructure. In this study, a two-dimensional (2-D) finite element analysis (FEA) model is proposed to analyze the interaction between the diamond disc conditioner and the polishing pad. To enhance modeling fidelity, image processing is utilized to characterize the morphological and mechanical properties of the pad. An FEA model of the characterized pad is developed and utilized to study the effects of process parameters (conditioning pressure and pad stiffness) on pad deformation. The study reveals that understanding the morphological and mechanical properties of CMP pads is important to the design of high performance pads.

Contact Pressure Distribution in the Chemical Mechanical Planarization of 450mm Wafers

2010 ◽  
Vol 1249 ◽  
Author(s):  
Padraig Timoney ◽  
Eamonn Ahearne ◽  
Gerald Byrne
Keyword(s):  
Finite Element ◽  
Contact Pressure ◽  
Material Removal ◽  
Removal Rate ◽  
Chemical Mechanical Planarization ◽  
Close Correlation ◽  
Design Tool ◽  
Von Mises Stress ◽  
Wafer Scale ◽  
Scale Models

AbstractOptimisation of spatial uniformity of material removal in chemical mechanical planarization requires an understanding of the mechanics of the wafer carrier system. Finite element analyses have been carried out by researchers identifying relationships between von Mises stress distribution and material removal rate. However, in many of these wafer scale models, the derivation of the material properties of the polishing pad and sub pad is unclear and consequently a large variation in values used is observed. Models are generally validated with a procedure different to that simulated in the model and with different output variables. Few models have incorporated the industry standard method of pressurizing the backside of the wafer independently to the wafer carrier loading using a pressurized air chamber located directly behind the backside of the wafer. The anticipated introduction of 450mm diameter wafers has surprisingly not been accompanied by wafer scale models investigating the issues that will arise from the diameter and thickness scaling ratio of the wafer.This paper presents a unique approach to finite element modeling of CMP incorporating realistic boundary conditions for the wafer carrier and platen assemblies. Model predictions of interfacial contact pressure for a 200mm wafer loaded by a lip seal type carrier head were validated by unique measurements of the contact pressure between the wafer and the pad using Fujifilm Prescale TM pressure measurement film and accompanying analysis software. The results demonstrated a close correlation between the model's prediction and the measured values. Results are presented for the upscaling of this validated model to 450mm wafer dimensions. The results indicate a doubling of the contact pressure maximum values compared to the 200mm wafer model. These results illustrate the extent of the challenge facing CMP tool vendors in increasing the level of control of the mechanical force distributed by the wafer carrier on 450mm wafers. The model can be used as a design tool to optimize machine and process parameters.

Finite Element Analysis of Electrical Explosion Spraying Technology

2012 ◽  
Vol 429 ◽  
pp. 72-77
Author(s):  
Yan Ni Wang ◽  
Xiao Lin Jiang ◽  
Ping Yang
Keyword(s):  
Mechanical Properties ◽  
Finite Element Analysis ◽  
Finite Element ◽  
High Performance ◽  
Electrical Explosion ◽  
Substrate Material ◽  
Interface Temperature ◽  
Analysis Software ◽  
Element Analysis ◽  
Peak Voltage

In order to master the basic laws of preparation coating by electrical explosion spraying technology and obtain coating with higher mechanical properties, finite element analysis software is used to simulate temperature field in process of coated condensation. Some basic rules of process parameters are drawed. To obtain high-performance coatings, coating material whose sedimentary particle has a higher interface temperature is first considered according to the substrate material property parameters. In the process of prepare coating, voltage should be better to use peak Voltage of electric explosion spraying equipment. Self-inductance of circuit should be as low as possible.

Numerical Evaluation of Mechanical Property Change and Collapse Strength of ERW Pipes Considering Manufacturing Process

2018 ◽  
Author(s):  
Seong-Wook Han ◽  
Soo-Chang Kang ◽  
Jiwoon Yi ◽  
Ho-Kyung Kim
Keyword(s):  
Mechanical Properties ◽  
Finite Element ◽  
Analytical Model ◽  
Manufacturing Process ◽  
High Performance ◽  
Oil And Gas ◽  
Large Change ◽  
Outer Diameter ◽  
Element Analysis ◽  
Collapse Strength

Along with the development of the energy industry, demand for oil and gas pipelines has increased, and as the low oil price era has been prolonged, more economical pipe design and construction are required. Typical examples are ERW pipes used as OCTG or reel-lay pipeline. The ERW pipe is made by passing the plate through continuous rollers, where repetitive loading and unloading causes unintentional plastic deformation and changes in initial steel properties. So, this study focused on both the change of mechanical properties during manufacturing process and collapse strength of ERW pipe considering the Bauschinger effect in order to produce more economical and high performance steel pipe. In this paper, the ERW manufacturing process was divided into three stages: forming station, sizing station, and flattening station. The ERW manufacturing process was simulated as 3D nonlinear finite element models using ABAQUS (6.14-1). Then, the change of mechanical properties at each process station was examined through finite element analysis and PEEQ, Alpha, and residual stress in each process station were evaluated for maintaining continuity of analysis. And flattening station where the reverse bending gives a large change in the mechanical properties was also performed. Finally, the collapse strength of the ERW pipe was evaluated in consideration of the change in compression strength during the manufacturing process. The ABAQUS analytical model was verified by showing analytical results to be identical with the outer diameter measured from the full-scale size pipes. Using the developed analytical model, it is possible to numerically predict the mechanical properties and collapse strength of ERW pipe.

scholarly journals Preparation and Finite Element Analysis of Fly Ash/HDPE Composites for Large Diameter Bellows

Polymers ◽  
2021 ◽  
Vol 13 (23) ◽  
pp. 4204
Author(s):  
Angxuan Wu ◽  
Lan Jia ◽  
Wenwen Yu ◽  
Fengbo Zhu ◽  
Fuyong Liu ◽  
...  
Keyword(s):  
Mechanical Properties ◽  
Finite Element Analysis ◽  
Finite Element ◽  
Fly Ash ◽  
High Performance ◽  
Large Diameter ◽  
Value Added ◽  
Ground Subsidence ◽  
Tensile Yield Strength ◽  
Element Analysis

In recent years, buried bellows have often had safety accidents such as pipeline bursts and ground subsidence due to the lack of adequate mechanical properties and other quality problems. In order to improve the mechanical properties of bellows, fly ash (FA) was used as a reinforced filler in high density polyethylene (HDPE) to develop composites. The FA was surface treated with a silane coupling agent and HDPE-g-maleic anhydride was used as compatibilizer. Dumbbell-shaped samples were prepared via extrusion blending and injection molding. The cross-section morphology, thermal stability and mechanical properties of the composites were studied. It was observed that when 10% modified FA and 5% compatibilizer were added to HDPE, the tensile yield strength and tensile breaking strength of the composites were nearly 30.2% and 40.4% higher than those of pure HDPE, respectively, and the Young’s modulus could reach 1451.07 MPa. In addition, the ring stiffness of the bellows was analyzed using finite element analysis. Compared with a same-diameter bellows fabricated from common commercially available materials, the ring stiffness increased by nearly 23%. The preparation method of FA/HDPE is simple, efficient, and low-cost. It is of great significance for the popularization of high-performance bellows and the high value-added utilization of FA.

Three-dimensional finite element analysis of the effects of anisotropy on bone mechanical properties measured by nanoindentation

2004 ◽  
Vol 19 (1) ◽  
pp. 114-123 ◽  
Author(s):  
Z. Fan ◽  
J.Y. Rho ◽  
J.G. Swadener
Keyword(s):  
Mechanical Properties ◽  
Finite Element Analysis ◽  
Finite Element ◽  
Cortical Bone ◽  
Three Dimensional ◽  
Indentation Modulus ◽  
Element Analysis ◽  
Fea Model ◽  
Dimensional Finite Element ◽  
Three Dimensional Finite Element

A three-dimensional finite element analysis (FEA) model with elastic–plastic anisotropy was built to investigate the effects of anisotropy on nanoindentation measurements for cortical bone. The FEA model has demonstrated a capability to capture the cortical bone material response under the indentation process. By comparison with the contact area obtained from monitoring the contact profile in FEA simulations, the Oliver–Pharr method was found to underpredict or overpredict the contact area due to the effects of anisotropy. The amount of error (less than 10% for cortical bone) depended on the indentation orientation. The indentation modulus results obtained from FEA simulations at different surface orientations showed a trend similar to experimental results and were also similar to moduli calculated from a mathematical model. The Oliver–Pharr method has been shown to be useful for providing first-order approximations in the analysis of anisotropic mechanical properties of cortical bone, although the indentation modulus is influenced by anisotropy.

Tire Bead Overheating in Urban Buses and Trucks Using Drum Brake Systems

1998 ◽  
Vol 26 (1) ◽  
pp. 51-62
Author(s):  
A. L. A. Costa ◽  
M. Natalini ◽  
M. F. Inglese ◽  
O. A. M. Xavier
Keyword(s):  
Heat Transfer ◽  
Finite Element Analysis ◽  
Finite Element ◽  
Thermal Energy ◽  
Structural Integrity ◽  
Experimental Temperature ◽  
Temperature Profiles ◽  
Element Analysis ◽  
Drum Brake ◽  
Fea Model

Abstract Because the structural integrity of brake systems and tires can be related to the temperature, this work proposes a transient heat transfer finite element analysis (FEA) model to study the overheating in drum brake systems used in trucks and urban buses. To understand the mechanics of overheating, some constructive variants have been modeled regarding the assemblage: brake, rims, and tires. The model simultaneously studies the thermal energy generated by brakes and tires and how the heat is transferred and dissipated by conduction, convection, and radiation. The simulated FEA data and the experimental temperature profiles measured with thermocouples have been compared giving good correlation.

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