Effects of surface nature of different semiconductor substrates on the plasma enhanced atomic layer deposition growth of Al2O3gate dielectric thin films
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2018 ◽
Vol 44
(2)
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pp. 1556-1565
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2017 ◽
Vol 35
(1)
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pp. 01B140
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2006 ◽
Vol 17
(2-4)
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pp. 145-149
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2015 ◽
Vol 764-765
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pp. 138-142
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