Influence of the bias-voltage, the argon pressure and the heating power on the structure and the tribological properties of HiPIMS sputtered MoSx films

2020 ◽  
Vol 385 ◽  
pp. 125358 ◽  
Author(s):  
Wolfgang Tillmann ◽  
Alexandra Wittig ◽  
Dominic Stangier ◽  
Henning Moldenhauer ◽  
Carl-Arne Thomann ◽  
...  
Keyword(s):  
Bias Voltage ◽  
Tribological Properties ◽  
Heating Power ◽  
Argon Pressure

scholarly journals Influence of Applied Bias Voltage on the Composition, Structure, and Properties of Ti:Si-Codoped a-C:H Films Prepared by Magnetron Sputtering

2014 ◽  
Vol 2014 ◽  
pp. 1-7 ◽  
Author(s):  
Jinlong Jiang ◽  
Qiong Wang ◽  
Yubao Wang ◽  
Zhang Xia ◽  
Hua Yang ◽  
...  
Keyword(s):  
Mechanical Properties ◽  
Surface Roughness ◽  
Magnetron Sputtering ◽  
Bias Voltage ◽  
Tribological Properties ◽  
Structure And Properties ◽  
Applied Bias ◽  
Applied Bias Voltage ◽  
Methane Mixture ◽  
Composition Structure

The titanium- and silicon-codoped a-C:H films were prepared at different applied bias voltage by magnetron sputtering TiSi target in argon and methane mixture atmosphere. The influence of the applied bias voltage on the composition, surface morphology, structure, and mechanical properties of the films was investigated by XPS, AFM, Raman, FTIR spectroscopy, and nanoindenter. The tribological properties of the films were characterized on an UMT-2MT tribometer. The results demonstrated that the film became smoother and denser with increasing the applied bias voltage up to −200 V, whereas surface roughness increased due to the enhancement of ion bombardment as the applied bias voltage further increased. The sp3carbon fraction in the films monotonously decreased with increasing the applied bias voltage. The film exhibited moderate hardness and the superior tribological properties at the applied bias voltage of −100 V. The tribological behaviors are correlated to the H/E or H3/E2ratio of the films.

scholarly journals Tribological properties of boron carbonitride coatings sliding against different wood (acerbic, beech, and lauan) balls

2019 ◽  
Vol 28 ◽  
pp. 096369351987573 ◽  
Author(s):  
Zhiwei Wu ◽  
Sihao Li ◽  
Zhaojun Xu ◽  
Qianzhi Wang ◽  
Fei Zhou
Keyword(s):  
Bias Voltage ◽  
Tribological Properties ◽  
Photoelectron Spectroscopy ◽  
Rf Magnetron Sputtering ◽  
Substrate Bias ◽  
Boron Carbonitride ◽  
Friction Behavior ◽  
Substrate Bias Voltage ◽  
Mechanical And Tribological Properties ◽  
C And N

Boron carbonitride (BCN) coatings were prepared using radio frequency (RF) magnetron sputtering via adjusting substrate bias voltage from −50 V to −200 V. The mechanical and tribological properties of the coatings were investigated. The coexistence of B–N, B–C, and N–C bonds was detected in coatings according to X-ray photoelectron spectroscopy analysis, indicating the formation of ternary BCN hybridization. The hardness of BCN coatings increased from 14.4 GPa to 24.3 GPa with an increase of substrate bias voltage, while their adhesion strength on substrate decreased. The friction behavior of BCN coatings sliding against different wood (acerbic, beech, and lauan) balls was examined using a ball-on-disk tribometer. The average friction coefficient fluctuated in a range of 0.74–1.02. The wear track of BCN coating sliding against hardwood (acerbic) presented obvious scratches, which were not noted as sliding against other softwood balls in comparison.

scholarly journals Effect of sp3 Content on Adhesion and Tribological Properties of Non-Hydrogenated DLC Films

Materials ◽  
2020 ◽  
Vol 13 (8) ◽  
pp. 1911 ◽  
Author(s):  
Chao Li ◽  
Lei Huang ◽  
Juntang Yuan
Keyword(s):  
Friction Coefficient ◽  
Magnetron Sputtering ◽  
Adhesion Strength ◽  
Bias Voltage ◽  
Tribological Properties ◽  
Scratch Test ◽  
Graphite Target ◽  
Transfer Layer ◽  
Xps Spectra ◽  
Pure Graphite

Non-hydrogenated diamond-like carbon (DLC) films with various ratios of sp3/sp2 were prepared on cemented carbide YG8 with DC magnetron sputtering technology. A pure graphite target was selected as the carbon source. Before DLC deposition, a surface etching pretreatment was carried out by mid-frequency magnetron sputtering method, using Ti atoms to improve adhesion strength. The ratios of sp3/sp2 were adjusted by bias voltages. In order to investigate the effect of the ratio of sp3/sp2 on adhesion and tribological properties, Raman spectra, XPS spectra, adhesion scratch test and ball-on-disk dry friction tests were applied. The results indicated that the ratio of sp3/sp2 fluctuated with bias voltage, increasing in the range of 0.74 to 0.98. The adhesion strength decreased from 31.5 to 18.4 N with the increasing ratio of sp3/sp2, while the friction coefficient rose in DLC-Si3N4 and dropped in DLC-Ti6Al4V. For DLC-Ti6Al4V, the oxidation of Ti6Al4V had a greater influence than graphitization of DLC. The hard oxides of Ti6Al4V broke the graphite transfer layer leading to a high friction coefficient. The wear rate was approximately linearly related to bias voltage. The coefficients of the linear regression equation were influenced by different friction materials. The adhesion strength and the friction coefficient were fitted as a function of the ratio of sp3/sp2.

scholarly journals Effect of substrate bias voltage on the microstructure and tribological properties or CrN coating

2016 ◽  
Vol 40 (1-2) ◽  
pp. 9-15 ◽  
Author(s):  
Khalil Aouadi ◽  
Corinne Nouveau ◽  
Aurélien Besnard ◽  
Brahim Tlili ◽  
Moez Chafra
Keyword(s):  
Bias Voltage ◽  
Tribological Properties ◽  
Substrate Bias ◽  
Substrate Bias Voltage ◽  
Crn Coating

Influence of bias voltage on residual stresses and tribological properties of TiAlVN-coatings at elevated temperatures

2013 ◽  
Vol 231 ◽  
pp. 122-125 ◽  
Author(s):  
Wolfgang Tillmann ◽  
Tobias Sprute ◽  
Fabian Hoffmann ◽  
Yin-Yu Chang ◽  
Ching-Yu Tsai
Keyword(s):  
Residual Stresses ◽  
Bias Voltage ◽  
Tribological Properties ◽  
Elevated Temperatures

scholarly journals Deposition and Tribological Properties of Sulfur-Doped DLC Films Deposited by PBII Method

2010 ◽  
Vol 2010 ◽  
pp. 1-7 ◽  
Author(s):  
Nutthanun Moolsradoo ◽  
Shuichi Watanabe
Keyword(s):  
Elastic Modulus ◽  
Friction Coefficient ◽  
Sulfur Content ◽  
Bias Voltage ◽  
Tribological Properties ◽  
Relative Concentration ◽  
High Vacuum ◽  
Ambient Air ◽  
Flow Rate Ratio ◽  
Negative Pulse

Sulfur-doped diamond-like carbon films (S-DLC) fabricated fromC2H2andSF6mixtures were used to study the effects of sulfur content and negative pulse bias voltage on the deposition and tribological properties of films prepared by plasma-based ion implantation (PBII). The structure and relative concentration of the films were analyzed by Raman spectroscopy and Auger electron spectroscopy. Hardness and elastic modulus of films were measured by nanoindentation hardness testing. Tribological characteristics of films were performed using a ball-on-disk friction tester. The results indicate that with the increasing sulfur content, the hardness and elastic modulus decrease. Additionally, by changing the negative pulse bias voltage from 0 kV to−5 kV, the hardness and elastic modulus increase, while the friction coefficient and specific wear rate tends to decrease. Moreover, at a negative pulse bias voltage of−5 kV and flow-rate ratio of 1 : 2, there is considerable improvement in friction coefficient of 0.05 under ambient air is due to the formation of a transfer films on the interface. The decrease in the friction coefficient of films doped with 4.9 at.% sulfur is greater under high vacuum (0.03) than under ambient air (>0.1).

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