Hydrogen Barriers Based on Chemical Trapping Using Chemically Modulated Al2O3 Grown by Atomic Layer Deposition for InGaZnO Thin-Film Transistors

2021 ◽  
Author(s):  
Yujin Lee ◽  
Taewook Nam ◽  
Seunggi Seo ◽  
Hwi Yoon ◽  
Il-Kwon Oh ◽  
...  
Keyword(s):  
Thin Film ◽  
Atomic Layer Deposition ◽  
Thin Film Transistors ◽  
Atomic Layer ◽  
Chemical Trapping ◽  
Layer Deposition

Low-temperature high-performance In-Ga-Sn-O thin-film transistors with Al2O3 grown by a facile dual-atomic layer deposition

2021 ◽  
pp. 160053
Author(s):  
Hyunjae Jang ◽  
Changyong Oh ◽  
Tae Hyun Kim ◽  
Hyeong Wook Kim ◽  
Sang Ik Lee ◽  
...  
Keyword(s):  
Thin Film ◽  
Low Temperature ◽  
Atomic Layer Deposition ◽  
Thin Film Transistors ◽  
High Performance ◽  
Atomic Layer ◽  
Layer Deposition

Enhancement of Electrical Stability in Oxide Thin-Film Transistors Using Multilayer Channels Grown by Atomic Layer Deposition

2014 ◽  
Vol 61 (1) ◽  
pp. 73-78 ◽  
Author(s):  
Cheol Hyoun Ahn ◽  
Myung Gu Yun ◽  
Sang Yeol Lee ◽  
Hyung Koun Cho
Keyword(s):  
Thin Film ◽  
Atomic Layer Deposition ◽  
Thin Film Transistors ◽  
Atomic Layer ◽  
Oxide Thin Film ◽  
Electrical Stability ◽  
Layer Deposition

8.2: High Performance Oxide Thin Film Transistors Fabricated by Atomic Layer Deposition Process

2021 ◽  
Vol 52 (S2) ◽  
pp. 141-141
Author(s):  
Dedong Han ◽  
Huijin Li ◽  
Junchen Dong ◽  
Xiaobin Zhou ◽  
Qi Li ◽  
...  
Keyword(s):  
Thin Film ◽  
Atomic Layer Deposition ◽  
Thin Film Transistors ◽  
High Performance ◽  
Atomic Layer ◽  
Deposition Process ◽  
Oxide Thin Film ◽  
Atomic Layer Deposition Process ◽  
Layer Deposition

scholarly journals Review Article: Atomic layer deposition for oxide semiconductor thin film transistors: Advances in research and development

2018 ◽  
Vol 36 (6) ◽  
pp. 060801 ◽  
Author(s):  
Jiazhen Sheng ◽  
Jung-Hoon Lee ◽  
Wan-Ho Choi ◽  
TaeHyun Hong ◽  
MinJung Kim ◽  
...  
Keyword(s):  
Thin Film ◽  
Atomic Layer Deposition ◽  
Research And Development ◽  
Thin Film Transistors ◽  
Atomic Layer ◽  
Review Article ◽  
Oxide Semiconductor ◽  
Layer Deposition ◽  
Semiconductor Thin Film

36.3: Flexible ZnO Thin‐Film Transistors Fabricated on PEN Substrate by Atomic Layer Deposition at Low Temperature

2021 ◽  
Vol 52 (S2) ◽  
pp. 472-476
Author(s):  
Qi Li ◽  
Huijin Li ◽  
Junchen Dong ◽  
Jingyi Wang ◽  
Dedong Han ◽  
...  
Keyword(s):  
Thin Film ◽  
Low Temperature ◽  
Atomic Layer Deposition ◽  
Thin Film Transistors ◽  
Atomic Layer ◽  
Zno Thin Film ◽  
Layer Deposition

P‐1.7: Atomic‐Layer‐Deposition Deposited Superlattice‐Structure Al‐Zn‐O Films for Thin Film Transistors Application

2021 ◽  
Vol 52 (S2) ◽  
pp. 696-698
Author(s):  
Jingyi Wang ◽  
Junchen Dong ◽  
Qi Li ◽  
Dengqin Xu ◽  
Yi Wang ◽  
...  
Keyword(s):  
Thin Film ◽  
Atomic Layer Deposition ◽  
Thin Film Transistors ◽  
Atomic Layer ◽  
Superlattice Structure ◽  
Layer Deposition

scholarly journals Reliability enhancement in thin film transistors using Hf and Al co-incorporated ZnO active channels deposited by atomic-layer-deposition

RSC Advances ◽  
2018 ◽  
Vol 8 (60) ◽  
pp. 34215-34223
Author(s):  
So-Yeong Na ◽  
Sung-Min Yoon
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Atomic Layer Deposition ◽  
Thin Film Transistors ◽  
Atomic Layer ◽  
Oxide Thin Films ◽  
Layer Deposition ◽  
Reliability Enhancement ◽  
Active Channels

Oxide thin films transistors (TFTs) with Hf and Al co-incorporated ZnO active channels prepared by atomic-layer deposition are presented.

P‐28: Novel Asymmetric Source‐drain Thin Film Transistors Fabricated by Atomic Layer Deposition

2019 ◽  
Vol 50 (1) ◽  
pp. 1317-1320
Author(s):  
Huijin Li ◽  
Junchen Dong ◽  
Dedong Han ◽  
Wen Yu ◽  
Zhuang Yi ◽  
...  
Keyword(s):  
Thin Film ◽  
Atomic Layer Deposition ◽  
Thin Film Transistors ◽  
Atomic Layer ◽  
Layer Deposition
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