A quantitative analysis of room temperature recrystallization kinetics in electroplated copper films using high resolution x-ray diffraction

2011 ◽  
Vol 109 (1) ◽  
pp. 014907 ◽  
Author(s):  
Andrew Ying ◽  
Christian Witt ◽  
Jean Jordan-Sweet ◽  
Robert Rosenberg ◽  
I. C. Noyan
Keyword(s):  
Quantitative Analysis ◽  
High Resolution ◽  
Room Temperature ◽  
Copper Films ◽  
X Ray Diffraction ◽  
X Ray ◽  
Recrystallization Kinetics ◽  
Electroplated Copper

Room Temperature Self-Annealing of Electroplated and Sputtered Copper Films

1999 ◽  
Vol 562 ◽  
Author(s):  
Michelle Chen ◽  
Suraj Rengarajan ◽  
Peter Hey ◽  
Yezdi Dordi ◽  
Hong Zhang ◽  
...  
Keyword(s):  
Electron Microscopy ◽  
Room Temperature ◽  
Copper Film ◽  
Copper Films ◽  
Organic Additives ◽  
X Ray Diffraction ◽  
X Ray ◽  
Transmission Electron ◽  
Electroplated Copper ◽  
Effect Of Copper

ABSTRACTSelf-annealing properties of electroplated and sputtered copper films at room temperature were investigated in this study, in particular, the effect of copper film thickness, electrolyte systems used, as well as their level of organic additives for electroplating. Real-time grain growth was observed by transmission electron microscopy. Sheet resistance and X-ray diffraction measurements further confirmed the recrystallization of the electroplated copper film with time. The recrystallization of electroplated films was then compared with that of sputtered copper films.

Room Temperature Self-Annealing of Electroplated and Sputtered Copper Films

1999 ◽  
Vol 564 ◽  
Author(s):  
Michelle Chen ◽  
Suraj Rengarajan ◽  
Peter Hey ◽  
Yezdi Dordi ◽  
Hong Zhang ◽  
...  
Keyword(s):  
Electron Microscopy ◽  
Room Temperature ◽  
Copper Film ◽  
Copper Films ◽  
Organic Additives ◽  
X Ray Diffraction ◽  
X Ray ◽  
Transmission Electron ◽  
Electroplated Copper ◽  
Effect Of Copper

AbstractSelf-annealing properties of electroplated and sputtered copper films at room temperature were investigated in this study, in particular, the effect of copper film thickness, electrolyte systems used, as well as their level of organic additives for electroplating. Real-time grain growth was observed by transmission electron microscopy. Sheet resistance and X-ray diffraction measurements further confirmed the recrystallization of the electroplated copper film with time. The recrystallization of electroplated films was then compared with that of sputtered copper films.

Quantitative analysis of the quantum dot superlattice by high-resolution x-ray diffraction

2013 ◽  
Vol 113 (16) ◽  
pp. 163506 ◽  
Author(s):  
N. N. Faleev ◽  
C. Honsberg ◽  
V. I. Punegov
Keyword(s):  
Quantitative Analysis ◽  
High Resolution ◽  
Quantum Dot ◽  
X Ray Diffraction ◽  
X Ray

scholarly journals Experimental Investigations of the Interaction of SO2 with MgO

1999 ◽  
Vol 590 ◽  
Author(s):  
Andrea Freitag ◽  
J. A. Rodriguez ◽  
J. Z. Larese
Keyword(s):  
High Resolution ◽  
Film Thickness ◽  
Room Temperature ◽  
Temperature Programmed Desorption ◽  
Experimental Investigations ◽  
X Ray Diffraction ◽  
High Quality ◽  
X Ray ◽  
Temperature Programmed ◽  
X Ray Absorption

ABSTRACTHigh resolution adsorption isotherms, temperature programmed desorption (TPD), x-ray diffraction (XRD) and x-ray absorption near edge spectroscopy (XANES) methods were used to investigate the interaction of SO2 with high quality MgO powders. The results of these investigations indicate that when SO2 is deposited on MgO in monolayer quantities at temperatures near 100K both SO3 and SO4 species form that are not removed by simply pumping on the pre-dosed samples at room temperature. TPD and XANES studies indicate that heating of pre-dosed MgO samples to temperatures above 350 °C is required for full removal of the SO3/SO4 species. XANES measurements made as a function of film thickness indicate for coverages near monolayer completion that the SO4 species form first.

scholarly journals Neutron and high-resolution room-temperature X-ray data collection from crystallized lytic polysaccharide monooxygenase

2015 ◽  
Vol 71 (11) ◽  
pp. 1448-1452 ◽  
Author(s):  
John-Paul Bacik ◽  
Sophanit Mekasha ◽  
Zarah Forsberg ◽  
Andrey Kovalevsky ◽  
Jay C. Nix ◽  
...  
Keyword(s):  
High Resolution ◽  
Diffraction Data ◽  
Room Temperature ◽  
X Ray Diffraction ◽  
Lytic Polysaccharide Monooxygenase ◽  
Data Set ◽  
X Ray ◽  
Processing Enzymes ◽  
Bacteria And Fungi ◽  
Polysaccharide Monooxygenase

Bacteria and fungi express lytic polysaccharide monooxgyenase (LPMO) enzymes that act in conjunction with canonical hydrolytic sugar-processing enzymes to rapidly convert polysaccharides such as chitin, cellulose and starch to single monosaccharide products. In order to gain a better understanding of the structure and oxidative mechanism of these enzymes, large crystals (1–3 mm3) of a chitin-processing LPMO from the Gram-positive soil bacteriumJonesia denitrificanswere grown and screened for their ability to diffract neutrons. In addition to the collection of neutron diffraction data, which were processed to 2.1 Å resolution, a high-resolution room-temperature X-ray diffraction data set was collected and processed to 1.1 Å resolution in space groupP212121. To our knowledge, this work marks the first successful neutron crystallographic experiment on an LPMO. Joint X-ray/neutron refinement of the resulting data will reveal new details of the structure and mechanism of this recently discovered class of enzymes.

Combined Room Temperature Photoluminescence And High Resolution X-Ray Diffraction Mapping Of Semiconductor Wafers

1995 ◽  
Vol 406 ◽  
Author(s):  
S Cockerton ◽  
M L Cooke ◽  
D K Bowen ◽  
B K Tanner
Keyword(s):  
High Resolution ◽  
Room Temperature ◽  
Poisson Ratio ◽  
X Ray Diffraction ◽  
Rocking Curve ◽  
X Ray ◽  
Room Temperature Photoluminescence ◽  
Composition Variation ◽  
Line Context ◽  
And Performance

AbstractWe describe the characteristics and performance of a combined desk-side high resolution X-ray diffractometer and room temperature photoluminescence spectrometer designed for rapid mapping of compound semiconductors in a production line context. The combined data for AIGaAs on GaAs suggest that recent measurements of the lattice constant and the Poisson ratio of AlAs may be more reliable than earlier published values. We illustrate the instrument performance in showing that for lattice matched ternary GaInP on GaAs systems, the X-ray rocking curve maps are much more sensitive to composition variation than the photoluminescence spectra.

Digital analysis of X-ray films

1997 ◽  
Vol 61 (406) ◽  
pp. 453-461 ◽  
Author(s):  
David C. Palmer
Keyword(s):  
Image Analysis ◽  
Quantitative Analysis ◽  
High Resolution ◽  
Powder Diffraction ◽  
Digital Analysis ◽  
X Ray Diffraction ◽  
Single Crystal Diffraction ◽  
Computer Image Analysis ◽  
X Ray ◽  
The Cost

AbstractHigh-resolution intensity profiles can be generated from X-ray diffraction films using a desk-top scanner and computer image analysis. The resulting intensity profiles have spatial resolutions equal to, or exceeding that of modern powder diffractometers — at a fraction of the cost. This technique provides an economical way of preserving the information stored in libraries of old (and deteriorating) powder diffraction films. The same technique can also be extended to permit quantitative analysis of single-crystal diffraction films.

High-precision absolute lattice parameter determination of SrTiO3, DyScO3 and NdGaO3 single crystals

2012 ◽  
Vol 68 (1) ◽  
pp. 8-14 ◽  
Author(s):  
Martin Schmidbauer ◽  
Albert Kwasniewski ◽  
Jutta Schwarzkopf
Keyword(s):  
High Resolution ◽  
High Precision ◽  
Room Temperature ◽  
Systematic Errors ◽  
Lattice Parameter ◽  
Parameter Determination ◽  
X Ray Diffraction ◽  
X Ray ◽  
Bond Method

The lattice parameters of three perovskite-related oxides have been measured with high precision at room temperature. An accuracy of the order of 10−5 has been achieved by applying a sophisticated high-resolution X-ray diffraction technique which is based on the modified Bond method. The results on cubic SrTiO3 [a = 3.905268 (98) Å], orthorhombic DyScO3 [a = 5.442417 (54), b = 5.719357 (52) and c = 7.904326 (98) Å], and orthorhombic NdGaO3 [a = 5.428410 (54), b = 5.498407 (55) and c = 7.708878 (95) Å] are discussed in view of possible systematic errors as well as non-stoichiometry in the crystals.

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