Low leakage ZrO2 based capacitors for sub 20 nm dynamic random access memory technology nodes
Keyword(s):
20 Nm
◽
2021 ◽
Vol 16
(1)
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pp. 114-118
Keyword(s):
Keyword(s):
1996 ◽
Vol 35
(Part 1, No. 2B)
◽
pp. 1086-1089
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1996 ◽
Vol 35
(Part 1, No. 9B)
◽
pp. 4976-4979
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2021 ◽
Vol 21
(8)
◽
pp. 4216-4222
2004 ◽
Vol 43
(5A)
◽
pp. 2457-2461
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