Single-crystal-like GdNdOx thin films on silicon substrates by magnetron sputtering and high-temperature annealing for crystal seed layer application

In this work, we reported a comparative study of ZnO thin films grown on quartz glass and sapphire (001) substrates through magnetron sputtering and high-temperature annealing. Firstly, the ZnO thin films were deposited on the quartz glass and sapphire (001) substrates in the same conditions by magnetron sputtering. Afterwards, the sputtered ZnO thin films underwent an annealing process at 600 °C for 1 h in an air atmosphere to improve the quality of the films. X-ray diffraction, scanning electron microscopy, atomic force microscopy, X-ray photoelectron spectroscopy (XPS), ultraviolet-visible spectra, photoluminescence spectra, and Raman spectra were used to investigate the structural, morphological, electrical, and optical properties of the both as-received ZnO thin films. The ZnO thin films grown on the quartz glass substrates possess a full width of half maximum value of 0.271° for the (002) plane, a surface root mean square value of 0.50 nm and O vacancies/defects of 4.40% in the total XPS O 1s peak. The comparative investigation reveals that the whole properties of the ZnO thin films grown on the quartz glass substrates are comparable to those grown on the sapphire (001) substrates. Consequently, ZnO thin films with high quality grown on the quartz glass substrates can be achieved by means of magnetron sputtering and high-temperature annealing at 600 °C.

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Effects of high-temperature annealing on magnetic properties of (Zn0.91Mn0.09)O thin films grown by RF magnetron sputtering

Materials Science and Engineering B ◽

10.1016/j.mseb.2005.12.007 ◽

2006 ◽

Vol 126 (2-3) ◽

pp. 300-305 ◽

Cited By ~ 7

Author(s):

Sejoon Lee ◽

H.S. Lee ◽

S.J. Hwang ◽

Yoon Shon ◽

T.W. Kang ◽

...

Keyword(s):

Thin Films ◽

Magnetic Properties ◽

High Temperature ◽

Magnetron Sputtering ◽

Rf Magnetron Sputtering ◽

High Temperature Annealing

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JOSEPHSON JUNCTION USING A CROSSED CONTACT OF SUPERCONDUCTING Bi(Pb)-Sr-Ca-Cu-O THIN FILM WITH 110 K-PHASE

Modern Physics Letters B ◽

10.1142/s0217984991001209 ◽

1991 ◽

Vol 05 (14n15) ◽

pp. 985-992

Author(s):

S. HIGO ◽

M. IMAI ◽

Y. HAKURAKU ◽

I. KAWANO ◽

T. OGUSHI

Keyword(s):

Thin Film ◽

Thin Films ◽

High Temperature ◽

Magnetron Sputtering ◽

Induced Current ◽

High Temperature Annealing ◽

Dc Magnetron Sputtering ◽

Single Junction ◽

Assisted Tunneling ◽

Current Steps

Bi 1.75 Pb 0.17 Sr 2 Ca 2.1 Cu 3.2 O y thin films with zero resistivity at 115 K, were prepared by dc magnetron sputtering and subsequent high-temperature annealing. Josephson bridges were fabricated by crossed contact of two cleaved planes of the thin films. Self-induced current steps and multi photon-assisted tunneling currents due to quasi-particles tunneling across the oxide gap barriers were observed. It was proved that the formation of the oxide gap barriers was due to oxidation of the Cu component and the extrication of Ca near the crossed contact of the thin film by soaking the thin film in liquid nitrogen. It seems possible to fabricate smaller bridge with a single junction by the use of thinner as-grown films with smoother surfaces.

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Single Crystal, High Band Gap CdS Thin Films Grown by RF Magnetron Sputtering in Argon Atmosphere for Solar Cell Applications

Journal of Nano- and Electronic Physics ◽

10.21272/jnep.10(3).03005 ◽

2018 ◽

Vol 10 (3) ◽

pp. 03005-1-03005-6 ◽

Cited By ~ 1

Author(s):

Rupali Kulkarni ◽

◽

Amit Pawbake ◽

Ravindra Waykar ◽

Ashok Jadhawar ◽

...

Keyword(s):

Thin Films ◽

Solar Cell ◽

Magnetron Sputtering ◽

Single Crystal ◽

Band Gap ◽

Rf Magnetron Sputtering ◽

Argon Atmosphere ◽

Cds Thin Films ◽

High Band

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Piezoelectric Coefficients of Aluminum Nitride and Gallium Nitride

MRS Proceedings ◽

10.1557/proc-572-389 ◽

1999 ◽

Vol 572 ◽

Author(s):

C. M. Lueng ◽

H. L. W. Chan ◽

W. K. Fong ◽

C. Surya ◽

C. L. Choy

Keyword(s):

Thin Films ◽

Gallium Nitride ◽

High Temperature ◽

Molecular Beam Epitaxy ◽

Aluminum Nitride ◽

Composite Film ◽

High Frequency ◽

Molecular Beam ◽

Silicon Substrates ◽

Heterodyne Interferometer

ABSTRACTAluminum nitride (AlN) and gallium nitride (GaN) thin films have potential uses in high temperature, high frequency (e.g. microwave) acoustic devices. In this work, the piezoelectric coefficients of wurtzite AlN and GaN/AlN composite film grown on silicon substrates by molecular beam epitaxy were measured by a Mach-Zehnder type heterodyne interferometer. The effects of the substrate on the measured coefficients are discussed.

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Characterization of fluoropolymer films deposited by magnetron sputtering of poly(tetrafluoroethylene) and plasma polymerization of heptadecafluoro-1-decene (HDFD) on (100)-oriented single-crystal silicon substrates

Surface and Interface Analysis ◽

10.1002/sia.1243 ◽

2002 ◽

Vol 34 (1) ◽

pp. 10-18 ◽

Cited By ~ 13

Author(s):

Yan Zhang ◽

G. H. Yang ◽

E. T. Kang ◽

K. G. Neoh ◽

Wei Huang ◽

...

Keyword(s):

Magnetron Sputtering ◽

Single Crystal ◽

Plasma Polymerization ◽

Single Crystal Silicon ◽

Silicon Substrates ◽

Crystal Silicon ◽

Fluoropolymer Films ◽

Oriented Single Crystal

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Comparison Between In-situ Annealing and External Annealing For Barium Ferrite Thin Films Made by RF Magnetron Sputtering

MRS Proceedings ◽

10.1557/proc-875-o4.22 ◽

2005 ◽

Vol 875 ◽

Author(s):

A. R. Abuzir ◽

W. J. Yeh

Keyword(s):

Thin Films ◽

Magnetron Sputtering ◽

Saturation Magnetization ◽

Barium Ferrite ◽

Rf Magnetron Sputtering ◽

Silicon Substrates ◽

Axis Orientation ◽

Average Value ◽

Ferrite Thin Films

AbstractDue to their large magnetic anisotropy perpendicular to the film plane, barium ferrite thick films (BaFe12O19, or BaM) with c-axis orientation are attractive candidates for microwave applications [1,2]. Barium ferrite thin films on silicon substrates without under layer have been deposited under various conditions by RF magnetron sputtering. The structure of the as-grown films is amorphous. External annealing in air has been done at 950°C for ten minutes to crystallize the films. C-axis oriented thin films with squareness of about 0.87 and coercivity of about 3.8KOe are obtained.Thick BaM films with c-axis orientation are difficult to achieve with one single deposition. Multilayer technique looks promising to grow thick films [3]. The external annealing process is difficult to incorporate with the multilayer procedure. An in-situ annealing procedure has been developed to obtain films, which can be used as the basic component for future multilayer deposition. Barium ferrites are first magnetron sputtered on bare silicon substrates in Ar + O2 atmosphere at substrate temperature of 500-600°C, the deposition pressure was kept about 0.008 torr. After the deposition, the temperature of the substrate is immediately increased to about 860°C for ten minutes in 140 torr of argon (80%) and oxygen (20%) mixture of gas, which was introduced into the chamber without breaking the vacuum. With the in-situ process, c-axis oriented thin films of 0.88 squareness and coercivity value of about 4.3KOe are obtained.Both annealing methods seem to have the similar effect on the perpendicular squareness and coercivity at various film thicknesses. The average value of the saturation magnetization Ms obtained from the in-situ annealing using multilayer technique is higher than that of the external one. We have grown films up to 1.0 micron thickness using the multilayer technique, in which three layers of 0.3 μm thickness each are deposited until the final thickness is reached. After the deposition of each layer, it was in-situ annealed before starting the deposition of the next layer. With the multilayer technique, coercivity of about 3.5 KOe and average value of the saturation magnetization Ms of about 4.0 K Gauss is obtained.

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