Effect of the Addition of Acrylic Monomers on Mechanical Properties of Patterns Applied in Negative-Type Photoresists
2010 ◽
Vol 524
(1)
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pp. 44-53
2020 ◽
Vol 58
(17)
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pp. 2366-2375
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2003 ◽
Vol 40
(8)
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pp. 817-832
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2005 ◽
Vol 13
(2)
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pp. 193-201
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1974 ◽
Vol 32
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pp. 514-515
1983 ◽
Vol 41
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pp. 220-221
Keyword(s):
1977 ◽
Vol 35
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pp. 114-115
1982 ◽
Vol 40
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pp. 680-681
1976 ◽
Vol 34
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pp. 592-593