scholarly journals Design and simulation of the compact MEMS energy harvester based on aluminium nitride

2021 ◽  
Vol 2086 (1) ◽  
pp. 012066
Author(s):  
P S Shlepakov ◽  
I V Uvarov

Abstract A device for converting the energy of mechanical vibrations to electricity by the piezoelectric effect is presented. A main part of the transducer is a multilayer cantilever with the inertial mass at the tip. A piezoelectric layer is made of 0.5 μm thick aluminum nitride. A feature of the device is the compact lateral size of about 1 mm, which is 10 times smaller in comparison with conventional harvesters. The device is fully compatible with microelectromechanical systems (MEMS) technology. The cantilever has a natural frequency of 45-160 Hz, depending on the size and inertial mass. The transducer generates the output voltage of 0.35 V, which is high enough for rectifying by the diode bridge. The output power of 2.7 nW is relatively low due to the small size. Nevertheless, the figure of merit is higher than that for conventional AlN-based energy harvesters.

2015 ◽  
Vol 645-646 ◽  
pp. 1223-1232
Author(s):  
Yi Ming Lei ◽  
Zhi Yu Wen ◽  
Li Chen

This paper presents two electromagnetic vibration energy harvesters based on micro-electro-mechanical (MEMS) technology. Two prototypes with different vibration structures were designed and fabricated. The energy harvester includes a permanent magnet attached on vibration structure (resonator) made by Si and a fixed wire-wound coil, with the total volume of 0.9 cm3. Two energy harvesters with different resonator are tested and compared. Experiments show that: in the same acceleration and a load resistance, the resonant frequency of prototype B is approximately 95% of prototype A; The peak-peak voltage and the maximum power of prototype B is 1.6 times and 2.7 times of prototype A respectively. The test results was analyzed simply and it indicated that the electromagnetic energy harvesting with the spring B has better performance; also proved that the potential ability of the non-linear spring could extend the frequency bandwidth and improve output voltage.


2019 ◽  
Vol 88 (1) ◽  
pp. 10901 ◽  
Author(s):  
Houda Lifi ◽  
Chouaib Ennawaoui ◽  
Abdelowahed Hajjaji ◽  
Samira Touhtouh ◽  
Said Laasri ◽  
...  

With recent advancements in energy conversion mechanisms, piezoelectric ceramics (1–x)PbMg1/3 Nb2/3Ο3-xPbTiΟ3 (1–x)PMN-xPT have demonstrated their abilities for converting mechanical vibrations into electricity. Three (1–x)PMN-xPT compositions were used in the present work with (x = 0.25, 0.31 and 0.33). The purpose of this paper is to investigate their piezoelectric performance as generators for energy harvesting applications. The energy harvester is numerically analyzed in this work. It consists of a piezoelectric bimorph clamped at one end to vibrating machinery, and a proof mass mounted on its other end. The energy harvester is also analyzed and experimental measurements of the harvested power are compared to the simulation results. A good agreement was observed between the experimental and the simulations results. According the application to exploit the vibrations of a hot air extractor, the results show that the harvested energy density of solid ceramics (1–x)PMN-xPT is 0.043 W/m2.


2014 ◽  
Vol 1051 ◽  
pp. 932-936
Author(s):  
Mun Heng Lam ◽  
Hanim Salleh

This paper presents work on improving piezoelectric energy harvesters. Harvesting energy from vibrations has received massive attention due to it being a renewable energy source that has a wide range of applications. Over the years of development, there is always research to further improve and optimise piezoelectric energy harvesters. For this paper, the piezoelectric specimen is made of PZT (Lead Zirconate Titanate), brass reinforced and has 31.8mm length, 12.7mm width and 0.511mm thick. An external beam is implemented to provide deflection amplification which in turn increases the output of the energy harvester. Depending on the configuration of the external beam, it can amplify output voltage from 100% to 300%.


2018 ◽  
Vol 29 (11) ◽  
pp. 2477-2491 ◽  
Author(s):  
Qingqing Lu ◽  
Fabrizio Scarpa ◽  
Liwu Liu ◽  
Jinsong Leng ◽  
Yanju Liu

We describe in this work a broadband magnetic E-shape piezoelectric energy harvester with wide frequency bandwidth. We develop first a nonlinear electromechanical model of the harvester based on the Hamilton variation principle that simulates the effect of the nonlinear magnetic restoring force at different spacing distances. The model is used to identify the distances existing between two different magnets that enable the system to perform with a specific nonlinearity. The performance of the E-shape piezoelectric energy harvester is also investigated through experiments, with E-shape energy harvesters at different spacing distances tested under several base acceleration excitations. We observe that the frequency domain output voltage of the system shows a general excellent controllable performance, with a widening of the frequency bandwidth. The half-power bandwidth of the linear energy harvester for a distance of 25 mm is 0.8 Hz only, which can be expanded to 2.67 Hz for the larger distance of 11 mm between magnets. The energy harvester presented in this work shows promising performances for broad-spectrum vibration excitations compared to conventional cantilever piezoelectric energy harvester systems with a tip mass.


2017 ◽  
Vol 2017 ◽  
pp. 1-8 ◽  
Author(s):  
In-Ho Kim ◽  
Seon-Jun Jang ◽  
Hyung-Jo Jung

Piezoelectric energy harvesters of cantilevered beam type are studied in various fields due to simplicity. In general, these systems obtain electrical energy from mechanical strain by bending of cantilevered beam. However, conventional systems have disadvantages that they have low efficiency in frequency regions other than resonance frequency. To overcome the limitations, various energy harvesters to apply performance enhancement strategies are proposed and investigated. In this paper, a frequency-changeable L shape energy harvester which is form connected cantilever beam and rigid arm is proposed and investigated. The conventional piezoelectric energy harvester exhibits the principal frequency in the simple bending mode whereas the proposed system features the twisting mode resulting in a higher output voltage than the conventional system. The proposed energy harvester is simplified to a two-degree-of-freedom model and its dynamics are described. How the length of a rigid bar affects its natural frequencies is also studied. To evaluate the performance of the system, experiments by using a vertical shaker and numerical simulation are carried out. As a result, it is shown that the natural frequency for a twisting mode decreases as the arm length increased, and the higher output voltage is generated comparing with those of the conventional energy harvester.


Author(s):  
Jiahua Wang ◽  
Wei-Hsin Liao ◽  
Junyi Cao

Energy harvesting has been regarded as a potential solution for power problems in wireless sensor network applications over batteries. Nonlinear configurations, as one of the most promising methods for broadening bandwidth, still make the system suffer from the coexistence of high-energy orbit and low-energy orbit, which significantly reduces output power. This paper proposes the electromagnetic kick method to enhance the output power of a monostable energy harvester through orbit jumps. The so-called electromagnetic kick is introduced by a solenoid consisting of a coil from the electromagnetic energy harvester and a three-volt button battery. The modeling and analysis demonstrate the excitation capability of the electromagnetic kick for orbit jumps. Inspired by a swing, two strategies are derived as the single kick and cycled kick. Based on an experimental setup, parameters for two strategies are first determined. The single kick and the cycled kick are then respectively employed to realize orbit jumps for the energy harvester under varying excitation and loading conditions. For each scenario, twenty trials are repeated to investigate the probability and capability. The system power output can be boosted from null to over 360 µW after orbit jumps, and the consumed energy can be resumed within 20 s. In addition, to evaluate different orbit jumping approaches in the literature, a figure of merit is developed, and the comprehensive advantages of the electromagnetic kick approach are demonstrated. The proposed effortless and efficient orbit jumping strategy expands the possibilities of realistic applications of nonlinear energy harvesters. The defined figure of merit not only makes it possible to compare different orbit jumping methods but also opens the door to new strategy development.


2014 ◽  
Author(s):  
A. Nayyar ◽  
V. Stoilov

This paper presents piezoelectric energy power generator exploiting direct conversion of airflow into mechanical vibrations. The device consists of two tightly coupled parts: a mechanical resonator, which produces high-frequency mechanical oscillation from quasi-constant airflow, and piezoelectric power generator harvesting the energy from the resonator’s motion. The proposed energy harvester allows for locking up the devices lowest natural frequency to the vortex-shedding resonant frequency induced by the ambient energy source. The Energy Harvester demonstrated a peak-to-peak output voltage of 20V at 10Hz, from an input wind velocity of ∼7 m/s.


Author(s):  
Muhammad Irsyad Suhaimi ◽  
Anis Nurashikin Nordin ◽  
Aliza Aini Md Ralib ◽  
Lai Ming Lim ◽  
Zambri Samsudin

Aims: Recent advancements in sensing technology and wireless communications have accelerated the development of the Internet of Things (IoT) which promote the usage of wearable sensors. An emerging trend is to develop self-sustainable wearable devices, thus eliminating the necessity of the user to carry bulky batteries. In this work, the development of a flexible piezoelectric energy harvester that is capable of harvesting energy from low frequency vibrations is presented. The target application of this energy harvester is for usage in smart shoes. Objectives: The objectives of this research is to design, fabricate and test an energy harvester on PET substrate using Aluminum Zinc Oxide as its piezoelectric layer. Methods: The energy harvester was designed as a cantilever structure using PET/AZO/Ag layers in d33 mode which can generate large output voltages with small displacements. The electrodes were designed as an interdigitated structure in which two significant design parameters were chosen, namely the effect of gap between electrodes, g and number of interdigital electrodes (IDE) pairs, N to the output voltage and resonant frequency. Results: The sputtered AZO on PET showed c-axis orientation at 002 peak with 2 values of 34.45° which indicates piezoelectric behaviour. The silver IDE pairs were screen-printed on the AZO thin film. Functionality of the device as an energy harvester was demonstrated by testing it using a shaker. The energy harvester was capable of generating 0.867 Vrms output voltage when actuated at 49.6 Hz vibrations. Conclusion: This indicates that the AZO thin films with printed silver electrodes can be used as flexible, d33 energy harvesters.


2015 ◽  
Vol 77 (17) ◽  
Author(s):  
‘Aqilah Abd. Tahrim ◽  
Anita Ahmad ◽  
Mohamed Sultan Mohamed Ali

There are various types of micro-scale energy harvesters (EH) that have been reported by many researchers around the world such as photovoltaic cells, piezoelectric transducers, electromagnetic transducers, thermoelectric and others. Energy harvester that harvest ambient energy which exists naturally or produced by mankind or machines, are able to be an alternative source for low-power devices such as mobile phone, laptop, health implant and many more. Thermoelectric is an energy harvester that converts heat waste from any sources such as vehicle engines, laptops or human body into electricity. Numerous kind of thermoelectric materials including metals and semiconductors have been investigated by researchers that produce different performances and efficiencies. Recently, researchers are looking forward to nanostructured semiconductors such as nanoribbons, nanotubes, nanowires and quantum dots as a potential to increase the figure of merit (ZT) and efficiency of thermoelectric EH. This paper reviews on silicon as the second most abundant element on earth and commonly used in electronic components is possible to be used as thermoelectric material. Silicon in bulk has high thermal conductivity which is less desirable for thermoelectric application. However, many studies regarding nanostructured silicon such as silicon nanowires have been carried out with promising results in reducing thermal conductivity.


2018 ◽  
Vol 8 (11) ◽  
pp. 2091 ◽  
Author(s):  
Ramalingam Usharani ◽  
Gandhi Uma ◽  
Mangalanathan Umapathy ◽  
Seung-Bok Choi

In vibration-based piezoelectric energy harvesters, one of the major critical issues is increasing the bandwidth and output voltage simultaneously. This manuscript explores a new technique for broadening the operating frequency range and enhancing the output voltage of the piezoelectric material-based energy harvester by appropriate structural tailoring. The wide bandwidth and the improvement in harvested output are accomplished by means of a multi-stepped cantilever beam shaped with rectangular cavities. The harvester is mathematically modeled and analyzed for modal characteristics. It was demonstrated from the outcome that the first two consecutive mode frequencies could be brought closer and the output power was large at both the resonant frequencies compared to the regular cantilever beam energy harvester. The results obtained from experimentation were in agreement with analytical results.


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