Dielectric anti-reflection coating application in a 0.175 μm dual-damascene process
Keyword(s):
2003 ◽
Vol 150
(1)
◽
pp. G58
◽
2005 ◽
pp. 353-356
Keyword(s):
2007 ◽
Vol 20
(3)
◽
pp. 245-251
◽
2005 ◽
Vol 38
(11)
◽
pp. 922-928
◽
Keyword(s):
2001 ◽
Vol 40
(Part 1, No. 4B)
◽
pp. 2663-2668
◽