Real time monitor of Cu pollution in clean room ambient near Cu CMP equipment

Author(s):  
M. Sasaki ◽  
Y. Itou ◽  
T. Kanbe ◽  
T. Arikado
Keyword(s):  
Cu Cmp ◽  
2019 ◽  
Vol 44 (1) ◽  
pp. 553-557 ◽  
Author(s):  
Changxing Tan ◽  
Weifeng Zhang ◽  
Oliver Huang ◽  
Hanson Gao ◽  
Runtao Zhao ◽  
...  

2010 ◽  
Vol 1249 ◽  
Author(s):  
John H Zhang ◽  
Laertis Economikos ◽  
Wei-tsu Tseng ◽  
Jihong Choi ◽  
Qiang Fang ◽  
...  

AbstractStudies of the wafer edge uniformity step by step, from hard mask deposition, reactive ion etch, electroplating to post Cu CMP had been done using scanning electron microscopy (SEM) measurements, showed that the major wafer non-uniformity comes from the Cu CMP step. Improvement of Cu CMP edge uniformity had been achieved through engineering of platen 1 using real time profile control as well as CMP head zone pressure adjustment and platen 3 slurry optimizations


2011 ◽  
Vol 27 (8) ◽  
pp. 805 ◽  
Author(s):  
Masaki TAKEUCHI ◽  
Hiromichi TSUNODA ◽  
Hideji TANAKA ◽  
Yoshimi SHIRAMIZU

Author(s):  
M Hengstberger ◽  
M Stark

AbstractParticulates, especially those in the respirable fraction, are generally suspected of being responsible for a host of respiratory and cardiovascular health problems that may include an increase in morbidity and mortality. These effects have been related not only to the carbonaceous particulates, such as diesel soot, but also to more inert dust particles without any specific intrinsic hazard.Therefore, any exposure to respirable dust from consumer products, and especially from tobacco products, is of considerable concern. In this context, a report of particular interest to the general public purported to show that cellulose acetate fibres released from cigarette filters could represent an additional burden and risk to the smoker. The underlying presumption was that these fibres could be respired and retained in portions of the respiratory tract, in particular in the lung.In response to these assertions, studies were performed by and on behalf of the affected industry and the results showed that these fibres did not pose a health risk. The findings revealed that some acetate fibres were generated during the processing of the cigarettes, but they were captured on the cross-section of the cigarette filter and remained on the filter during smoking. Those fibres potentially released during smoking would be deposited inside the mouth area because they were too large to pass the larynx and could not physically enter the bronchial or pulmonary sections of the respiratory tract.A working group from the German StandardisationOrganisation (DIN) recently discussed the experimental findings regarding the fibres generated during the processing of the acetate cigarette filter. Additional examinations on the release of respirable particles were initiated using Scanning Electron Microscope (SEM) to focus special attention on fibre-shaped particulates. The results of these recent analyses and the former findings led the group to the conclusion that ‘from the toxicological perspective, compared to the health risks otherwise associated with cigarette smoking, the release of particles from acetate filters does not constitute a particular health risk’.Subsequent to this review and evaluation of the results some additional examinations were performed to examine further aspects of particle release. Using an improved analytical technique with real-time detection, the particle number and sizes were determined for the release of respirable particles from cigarettes and cigarette filters. The studies were performed by drawing air through filters and filter cigarettes in a clean room under intense smoking conditions, and the particles were analysed in real time with a Laser Aerosol Spectrometer. Using this technique, approximately 10 particles with a size greater than 0.3 ìm were counted per cigarette. This is comparable to a particle load in a clean room environment and representing approx. 0.05% of the particle load in ambient air.


1979 ◽  
Vol 44 ◽  
pp. 41-47
Author(s):  
Donald A. Landman

This paper describes some recent results of our quiescent prominence spectrometry program at the Mees Solar Observatory on Haleakala. The observations were made with the 25 cm coronagraph/coudé spectrograph system using a silicon vidicon detector. This detector consists of 500 contiguous channels covering approximately 6 or 80 Å, depending on the grating used. The instrument is interfaced to the Observatory’s PDP 11/45 computer system, and has the important advantages of wide spectral response, linearity and signal-averaging with real-time display. Its principal drawback is the relatively small target size. For the present work, the aperture was about 3″ × 5″. Absolute intensity calibrations were made by measuring quiet regions near sun center.


Author(s):  
Alan S. Rudolph ◽  
Ronald R. Price

We have employed cryoelectron microscopy to visualize events that occur during the freeze-drying of artificial membranes by employing real time video capture techniques. Artificial membranes or liposomes which are spherical structures within internal aqueous space are stabilized by water which provides the driving force for spontaneous self-assembly of these structures. Previous assays of damage to these structures which are induced by freeze drying reveal that the two principal deleterious events that occur are 1) fusion of liposomes and 2) leakage of contents trapped within the liposome [1]. In the past the only way to access these events was to examine the liposomes following the dehydration event. This technique allows the event to be monitored in real time as the liposomes destabilize and as water is sublimed at cryo temperatures in the vacuum of the microscope. The method by which liposomes are compromised by freeze-drying are largely unknown. This technique has shown that cryo-protectants such as glycerol and carbohydrates are able to maintain liposomal structure throughout the drying process.


Author(s):  
R.P. Goehner ◽  
W.T. Hatfield ◽  
Prakash Rao

Computer programs are now available in various laboratories for the indexing and simulation of transmission electron diffraction patterns. Although these programs address themselves to the solution of various aspects of the indexing and simulation process, the ultimate goal is to perform real time diffraction pattern analysis directly off of the imaging screen of the transmission electron microscope. The program to be described in this paper represents one step prior to real time analysis. It involves the combination of two programs, described in an earlier paper(l), into a single program for use on an interactive basis with a minicomputer. In our case, the minicomputer is an INTERDATA 70 equipped with a Tektronix 4010-1 graphical display terminal and hard copy unit.A simplified flow diagram of the combined program, written in Fortran IV, is shown in Figure 1. It consists of two programs INDEX and TEDP which index and simulate electron diffraction patterns respectively. The user has the option of choosing either the indexing or simulating aspects of the combined program.


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