Full Silicon Capacitive Force Sensors with Low Temperature Drift and High Temperature Range
Keyword(s):
2013 ◽
Vol 756-759
◽
pp. 101-104
2013 ◽
Vol 753
◽
pp. 181-184
◽
2012 ◽
Vol 2012
(CICMT)
◽
pp. 000411-000416