On-the-Fly Substrate Eccentricity Recognition for Robotized Manufacturing Systems

2005 ◽  
Vol 127 (1) ◽  
pp. 206-216 ◽  
Author(s):  
Martin Hosek ◽  
Jan Prochazka

This paper describes a method for on-the-fly determination of eccentricity of a circular substrate, such as a silicon wafer in semiconductor manufacturing applications, carried by a robotic manipulator, where eccentricity refers to the difference between the actual location of the center of the substrate and its desired position on the end-effector of the robotic manipulator. The method utilizes a pair of external optical sensors located along the substrate transfer path. When moving a substrate along the transfer path, the robotic manipulator captures the positions and velocities of the end-effector at which the edges of the substrate are detected by the sensors. These data along with the expected radius of the substrate and the coordinates of the sensors are used to determine the eccentricity of the substrate. This information can be used by the robotic manipulator to compensate for eccentricity of the substrate when performing a place operation, resulting in the substrate being placed centered regardless of the amount and direction of the initial eccentricity. The method can also be employed to detect a defect, such as breakage, of a circular substrate and report an error condition which can abort or otherwise adjust operation of the robotic manipulator.

Manufacturing ◽  
2003 ◽  
Author(s):  
Martin Hosek ◽  
Jan Prochazka

This paper describes a method for on-the-fly determination of eccentricity of a circular silicon substrate carried by a robotic manipulator in semiconductor manufacturing applications, where eccentricity refers to the difference between the actual location of the center of the substrate and its desired position on the end-effector of the robotic manipulator. The method utilizes a pair of external optical sensors located along the substrate transfer path. When moving a substrate along the transfer path, the robotic manipulator captures the positions and velocities of the end-effector at which the edges of the substrate are detected by the sensors. These data along with the expected radius of the substrate and the coordinates of the sensors are used to determine the eccentricity of the substrate. This information can be used by the robotic manipulator to compensate for eccentricity of the substrate when performing a place operation, resulting in the substrate being placed centered regardless of the amount and direction of the initial eccentricity. The method can also be employed to detect a defect, such as breakage, of a substrate and report an error condition which can abort or otherwise adjust operation of the robotic manipulator.


Robotica ◽  
2021 ◽  
pp. 1-22
Author(s):  
Limin Shen ◽  
Yuanmei Wen

Abstract Repetitive motion planning (RMP) is important in operating redundant robotic manipulators. In this paper, a new RMP scheme that is based on the pseudoinverse formulation is proposed for redundant robotic manipulators. Such a scheme is derived from the discretization of an existing RMP scheme by utilizing the difference formula. Then, theoretical analysis and results are presented to show the characteristic of the proposed RMP scheme. That is, this scheme possesses the characteristic of cube pattern in the end-effector planning precision. The proposed RMP scheme is further extended and studied for redundant robotic manipulators under joint constraint. Based on a four-link robotic manipulator, simulation results substantiate the effectiveness and superiority of the proposed RMP scheme and its extended one.


1962 ◽  
Vol 41 (1) ◽  
pp. 123-128 ◽  
Author(s):  
Pentti A. Järvinen ◽  
Sykkö Pesonen ◽  
Pirkko Väänänen

ABSTRACT The fractional determination of 17-ketosteroids in the daily urine was performed in nine cases of hyperemesis gravidarum and in four control cases, in the first trimester of pregnancy both before and after corticotrophin administration. The excretion of total 17-KS is similar in the two groups. Only in the hyperemesis group does the excretion of total 17-KS increase significantly after corticotrophin administration. The fractional determination reveals no difference between the two groups of patients with regard to the values of the fractions U (unidentified 17-KS), A (androsterone) and Rest (11-oxygenated 17-KS). The excretion of dehydroepiandrosterone is significantly higher in the hyperemesis group than in the control group. The excretion of androstanolone seems to be lower in the hyperemesis group than in the control group, but the difference is not statistically significant. The differences in the correlation between dehydroepiandrosterone and androstanolone in the two groups is significant. The high excretion of dehydroepiandrosterone and low excretion of androstanolone in cases of hyperemesis gravidarum is a sign of adrenal dysfunction.


Author(s):  
Irina Mordous

The development of modern civilization attests to its decisive role in the progressive development of institutions. They identified the difference between Western civilization and the rest of the world. Confirmation of the institutional advantages of the West was its early industrialization. The genesis and formation of institutionalism in its ideological and conceptualmethodological orientation occurs as a process alternative to neoclassic in the context of world heterodoxia, which quickly spread in social science. Highlighting institutional education as a separate area of sociocultural activity is determined by the factor of differentiation of institutional theory as a whole. A feature of institutional education is its orientation toward the individual and his/her transformation into a personality. The content of institutional education is revealed through the analysis of the institution, which includes a set of established customs, traditions, ways of thinking, behavioral stereotypes of individuals and social groups. The dynamics of socio-political, economic transformations in Ukraine requires a review of the foundations of national education and determination of the prospects for its development in the 21st century in the context of institutionalism.


Author(s):  
Da-Yin Liao

Contemporary 300mm semiconductor manufacturing systems have highly automated and digitalized cyber-physical integration. They suffer from the profound problems of integrating large, centralized legacy systems with small islands of automation. With the recent advances in disruptive technologies, semiconductor manufacturing has faced dramatic pressures to reengineer its automation and computer integrated systems. This paper proposes a Distributed-Ledger, Edge-Computing Architecture (DLECA) for automation and computer integration in semiconductor manufacturing. Based on distributed ledger and edge computing technologies, DLECA establishes a decentralized software framework where manufacturing data are stored in distributed ledgers and processed locally by executing smart contracts at the edge nodes. We adopt an important topic of automation and computer integration for semiconductor research &development (R&D) operations as the study vehicle to illustrate the operational structure and functionality, applications, and feasibility of the proposed DLECA software framework.


Molecules ◽  
2021 ◽  
Vol 26 (13) ◽  
pp. 3983
Author(s):  
Ozren Gamulin ◽  
Marko Škrabić ◽  
Kristina Serec ◽  
Matej Par ◽  
Marija Baković ◽  
...  

Gender determination of the human remains can be very challenging, especially in the case of incomplete ones. Herein, we report a proof-of-concept experiment where the possibility of gender recognition using Raman spectroscopy of teeth is investigated. Raman spectra were recorded from male and female molars and premolars on two distinct sites, tooth apex and anatomical neck. Recorded spectra were sorted into suitable datasets and initially analyzed with principal component analysis, which showed a distinction between spectra of male and female teeth. Then, reduced datasets with scores of the first 20 principal components were formed and two classification algorithms, support vector machine and artificial neural networks, were applied to form classification models for gender recognition. The obtained results showed that gender recognition with Raman spectra of teeth is possible but strongly depends both on the tooth type and spectrum recording site. The difference in classification accuracy between different tooth types and recording sites are discussed in terms of the molecular structure difference caused by the influence of masticatory loading or gender-dependent life events.


Author(s):  
P Bijster ◽  
H L Vader ◽  
C L J Vink

We have shown that the sodium concentration in whole blood measured by direct potentiometry is higher than in plasma. The ‘erythrocyte-effect’, already described by Siggaard Andersen, is most pronounced for instruments equipped with a reference electrode with an open static liquid junction and is thus a general phenomenon. Instruments with a modified liquid junction show less interference. The same phenomenon appears for the determination of the potassium concentration, although the difference between whole blood and plasma, when measured with instruments equipped with a modified liquid junction, can be neglected in practice.


Author(s):  
Martin Hosek ◽  
Michael Valasek ◽  
Jairo Moura

This paper presents single- and dual-end-effector configurations of a planar three-degree of freedom parallel robot arm designed for automated pick-place operations in vacuum cluster tools for semiconductor and flat-panel-display manufacturing applications. The basic single end-effector configuration of the arm consists of a pivoting base platform, two elbow platforms and a wrist platform, which are connected through two symmetric pairs of parallelogram mechanisms. The wrist platform carries an end-effector, the position and angular orientation of which can be controlled independently by three motors located at the base of the robot. The joints and links of the mechanism are arranged in a unique geometric configuration which provides a sufficient range of motion for typical vacuum cluster tools. The geometric properties of the mechanism are further optimized for a given motion path of the robot. In addition to the basic symmetric single end-effector configuration, an asymmetric costeffective version of the mechanism is derived, and two dual-end-effector alternatives for improved throughput performance are described. In contrast to prior attempts to control angular orientation of the end-effector(s) of the conventional arms employed currently in vacuum cluster tools, all of the motors that drive the arm can be located at the stationary base of the robot with no need for joint actuators carried by the arm or complicated belt arrangements running through the arm. As a result, the motors do not contribute to the mass and inertia properties of the moving parts of the arm, no power and signal wires through the arm are necessary, the reliability and maintenance aspects of operation are improved, and the level of undesirable particle generation is reduced. This is particularly beneficial for high-throughput applications in vacuum and particlesensitive environments.


1996 ◽  
Vol 15 (6) ◽  
pp. 497-503 ◽  
Author(s):  
T. Soriano ◽  
M. Menéndez ◽  
P. Sanz ◽  
M. Repetto

1 The described analytical procedure permits the simultaneous determination of the main n-hexane meta bolites in urine. 2-Hexanone, 2-hexanol, 2, 5-hexanediol and 2, 5-hexanedione, were chosen to dose the rats used in this study. All urine samples were collected and analysed on a daily basis, before and after acidic hydrolysis (pH 0.1) by GC/MS. 2-Hexanone, 2, 5-dimethylfurane, γ-valerolac tone and 2, 5-hexanedione were determined before hydro lysis ; 2-hexanol and 2, 5-hexanediol, after hydrolysis; and 5-hydroxy-2-hexanone and 4, 5-dihydroxy-2-hexanone were calculated by the difference between γ-valerolactone and 2, 5-hexanedione with and without hydrolysis, respectively. 2 A metabolic scheme was proposed reflecting the biotransformations undergone by the four compounds assayed. We consider 2, 5-dimethylfurane as a 'true metabolite' because the quantities detected were always greater before hydrolysis. 3 It has been reported that human and rat n-hexane metabolism follow a similar pattern. Therefore, as a practical application and without increasing either sample or time requirements, the simultaneous quantifi cation of the different metabolites and their excretion profile could provide better information about the metabolic situation of exposed workers than the determi nation of 2, 5-hexanedione alone. According to our experimental results, 4, 5-dihydroxy-2-hexanone itself would be a good toxicity indicator.


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