Nano-Scale Impact Dynamics of Ultra-Thin Bonded Layers
Keyword(s):
The paper highlights the complex issues involved in impact dynamics at nano-scale, prevalent in MEMS. The role of protective layers on the silicon substrate is investigated. It is found that the expected viscoelastic behavior of these layers is not activated due to the very short (almost instantaneous) impact times.
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1976 ◽
Vol 98
(3)
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pp. 463-469
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Keyword(s):
2016 ◽
Vol 657
◽
pp. 123-135
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Keyword(s):
2016 ◽
Vol 6
(2)
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pp. 895
Keyword(s):
2013 ◽