An Orthogonal-Beam Tunnel-Effect MEMS Gyroscope
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Set Up
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Tunnel-effect MEMS gyroscopes have broad applications in astronautics because they have high sensitivity, low measurement ranges, and small volumes. This paper describes the design of a novel orthogonal-beam gyroscope based on the principle of tunnel effect. The mathematical model of this class of gyroscopes is set up and the associated performance is obtained with ANSYS simulation software. Related MEMS technology for the construction of these orthogonal-beam tunnel-effect gyroscopes is also described.
2010 ◽
Vol 2010
(HITEC)
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pp. 000359-000366
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2014 ◽
Vol 945-949
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pp. 777-780
2014 ◽
Vol 651-653
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pp. 693-696
2013 ◽
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2014 ◽
Vol 229
(2)
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pp. 316-324
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2018 ◽
Vol 382
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pp. 042036
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