Influence of chemical composition and deposition conditions on microstructure evolution during annealing of arc evaporated ZrAlN thin films
2012 ◽
Vol 30
(3)
◽
pp. 031504
◽
Keyword(s):
1999 ◽
Vol 09
(PR8)
◽
pp. Pr8-659-Pr8-666
◽
2021 ◽
Vol 130
◽
pp. 105825
Influence of reactive sputter deposition conditions on crystallization of zirconium oxide thin films
2009 ◽
Vol 27
(3)
◽
pp. 577-583
◽
Keyword(s):
2011 ◽
Vol 172-174
◽
pp. 863-868