Chemical composition of an inductively coupled hexamethyldisilazane–argon plasma and properties of films grown in this plasma

2016 ◽  
Vol 52 (6) ◽  
pp. 630-636 ◽  
Author(s):  
V. R. Shayapov ◽  
M. N. Chagin ◽  
Yu. M. Rumyantsev
2021 ◽  
Vol 11 (2) ◽  
pp. 612
Author(s):  
Sergey P. Zimin ◽  
Ildar I. Amirov ◽  
Sergey V. Vasilev ◽  
Ivan S. Fedorov ◽  
Leonid A. Mazaletskiy ◽  
...  

Cu2−xSe films were deposited on Corning glass substrates by radio frequency (RF) magnetron sputtering and annealed at 300 °C for 20 min under N2 gas ambient. The films had a thickness of 850–870 nm and a chemical composition of Cu1.75Se. The initial structure of the films was nanocrystalline with a complex architecture and pores. The investigated films were plasma treated with RF (13.56 MHz) high-density low-pressure inductively coupled argon plasma. The plasma treatment was conducted at average ion energies of 25 and 200 eV for durations of 30, 60, and 90 s. Notably, changes are evident in the surface morphology, and the chemical composition of the films changed from x = 0.25 to x = 0.10 to x = 0.00, respectively, after plasma treatment at average ion energies of 25 and 200 eV, respectively.


1993 ◽  
Vol 58 (8) ◽  
pp. 1821-1831 ◽  
Author(s):  
Jaroslav Jambor ◽  
Tomáš Javorek

The macrophorous hydrophobic sorbent Amberlite XAD-2 proved to be well suited to the preconcentration of minority amounts of Al, Au, Cd, Co, Cr, Cu, Fe, Mn, Ni, Pb, Sn, Ti and V in the form of their chelates with organic reagents. From among 14 reagents tested, 8-hydroxyquinoline and diethyldithiocarbamate appeared most suitable for the quantitative sorption up to level of 1 μg l-1 of analyte. Emission spectrometry served as the analytical finish; the nitrous oxide-acetylene flame, electric arc and inductively coupled argon plasma were chosen according to the nature of the element. The procedure is convenient for the determination of the minority analytes in waters


2021 ◽  
Vol 11 (1) ◽  
Author(s):  
Andrzej Sikora ◽  
Dariusz Czylkowski ◽  
Bartosz Hrycak ◽  
Magdalena Moczała-Dusanowska ◽  
Marcin Łapiński ◽  
...  

AbstractThis paper presents the results of experimental investigations of the plasma surface modification of a poly(methyl methacrylate) (PMMA) polymer and PMMA composites with a [6,6]-phenyl-C61-butyric acid methyl ester fullerene derivative (PC61BM). An atmospheric pressure microwave (2.45 GHz) argon plasma sheet was used. The experimental parameters were: an argon (Ar) flow rate (up to 20 NL/min), microwave power (up to 530 W), number of plasma scans (up to 3) and, the kind of treated material. In order to assess the plasma effect, the possible changes in the wettability, roughness, chemical composition, and mechanical properties of the plasma-treated samples’ surfaces were evaluated by water contact angle goniometry (WCA), atomic force microscopy (AFM), attenuated total reflectance Fourier transform infrared spectroscopy (ATR-FTIR) and X-ray photoelectron spectroscopy (XPS). The best result concerning the water contact angle reduction was from 83° to 29.7° for the PMMA material. The ageing studies of the PMMA plasma-modified surface showed long term (100 h) improved wettability. As a result of plasma treating, changes in the samples surface roughness parameters were observed, however their dependence on the number of plasma scans is irregular. The ATR-FTIR spectra of the PMMA plasma-treated surfaces showed only slight changes in comparison with the spectra of an untreated sample. The more significant differences were demonstrated by XPS measurements indicating the surface chemical composition changes after plasma treatment and revealing the oxygen to carbon ratio increase from 0.1 to 0.4.


Sign in / Sign up

Export Citation Format

Share Document