Chemical composition of an inductively coupled hexamethyldisilazane–argon plasma and properties of films grown in this plasma
1993 ◽
Vol 58
(8)
◽
pp. 1821-1831
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Keyword(s):
1992 ◽
Vol 47
(4)
◽
pp. 553-559
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2012 ◽
Vol 6
(4)
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pp. 643-646
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Keyword(s):
1986 ◽
Vol 41
(1-2)
◽
pp. 27-38
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