Numerical Simulation of Plasma Chemical Vapor Deposition from Silane: Effects of the Plasma-Substrate Distance and Hydrogen Dilution
1997 ◽
Vol 36
(Part 1, No. 6A)
◽
pp. 3396-3407
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1998 ◽
Vol 16
(5)
◽
pp. 3134-3137
◽
2001 ◽
Vol 11
(PR3)
◽
pp. Pr3-691-Pr3-702
1989 ◽
Vol 50
(C5)
◽
pp. C5-667-C5-672
2009 ◽
Vol 23
(09)
◽
pp. 2159-2165
◽
2015 ◽
Vol 18
(1)
◽