Three-dimensional Statistical Modeling of the Effects
of the Random Distribution of Dopants
in Deep Sub-micron nMOSFETs
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We have performed a three-dimensional statistical simulation of the threshold voltage distribution of deep submicron nMOSFETs, as a function of gate length, doping density, oxide thickness, based on a multigrid non-linear Poisson solver. We compare our results with statistical simulations presented in the literature, and show that essentially only the vertical distribution of dopants has an effect on the standard deviation of the threshold voltage.
2019 ◽
Vol 963
◽
pp. 639-642
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An analytical subthreshold current/swing model for junctionless cylindrical nanowire FETs (JLCNFETs)
2013 ◽
Vol 26
(3)
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pp. 157-173
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Keyword(s):
Factor B
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2014 ◽
Vol 62
(4)
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pp. 919-927
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2021 ◽
Vol 62
(1)
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pp. 109-121
2000 ◽
Vol 39
(Part 1, No. 4B)
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pp. 2287-2290
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2014 ◽
Vol 18
(11)
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pp. 2709-2714
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2007 ◽
Vol 28
(3)
◽
pp. 217-219
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