Nanomachining with a Mechanical Manipulation System

2008 ◽  
Vol 8 (12) ◽  
pp. 6266-6273
Author(s):  
M. Chang ◽  
J. R. Deka ◽  
C. H. Lin

This study describes about the development of a mechanical manipulation system that can perform three-dimensional nano-machining inside a scanning electron microscope (SEM). Experiments are carried out by constructing a precise machining platform integrated with pico-motors, linear stages and monolithic-silicon-based tips which is generally used in atomic-force microscope (AFM). This integrated system can easily manipulate the atoms in a workpiece inside an SEM. The platform consists of three translational stages along XYZ axis direction and one rotational stage, with a resolution of 30 nm. The system can be utilized to produce nanopattern such as nanolines, nanoscale characters on silicon substrate coated with gold (Au) and aluminum (Al). Molecular dynamics simulation model is used to analyze the machining mechanism from various machining parameters. The same AFM tip can be utilized to scratch away the unwanted material from the workpiece surface.

2007 ◽  
Vol 121-123 ◽  
pp. 739-742 ◽  
Author(s):  
H.M. Chi ◽  
Z.D. Xiao ◽  
Xin Xing Xiao

Weng`an fauna in Guizhou, China provides a unique window for the evolution of the early life especially since the animal embryos and sponge is found there. Phosphatization makes the fossils preserve in details including cells and subcellular structure. Here we use atomic force microscope observing the surface of some three dimensional preserved embryo fossils and the ultra membrane-like structure is found under atomic force microscope (AFM) while such structure can`t be found under scanning electron microscope (SEM). The membrane-like structure is approximately 10nm in thickness which maybe one part of the fossil embryos or belong to another nano scale microfossils. Therefore, AFM provides a new method for the study of the ultra structure of the microfossils from Weng`an fauna.


CrystEngComm ◽  
2018 ◽  
Vol 20 (14) ◽  
pp. 1935-1944 ◽  
Author(s):  
E. M. Woo ◽  
G. Lugito ◽  
S. M. Chang

Polarized optical, atomic force, and scanning electron microscopy images showing the correlations of three-dimensional crystal arrangements with optical properties exhibited by poly(dodecamethylene terephthalate).


2002 ◽  
Vol 14 (3) ◽  
pp. 245-252 ◽  
Author(s):  
Lixin Dong ◽  
◽  
Fumihito Arai ◽  
Toshio Fukuda ◽  
◽  
...  

A nanorobotic manipulation system with 10 degreesof-freedom (DOFs) is presented and applied in 3-D manipulation of carbon nanotubes (CNTs) by controlling intermolecular forces. Manipulators are actuated with PicomotorsTM (New Focus Inc.) for coarse motions and PZTs for fine ones, and operated inside a scanning electronic microscope (SEM). Resolutions of manipulators are better than 30nm (linear) and 2mrad (rotary) for coarse motions, and within nanoorder for fine ones. Atomic force microscope (AFM) cantilevers are used as end-effectors, and van der Waals forces between them and objects are controlled by applying dielectrophoresis. Individual multiwalled carbon nanotubes (MWNTs) have been picked up on an AFM cantilever, placed between two cantilevers, and bent between a cantilever and sample substrate. As basic building blocks for more complex nanostructures and devices, CNT-junctions are constructed. A cross-junction was constructed with two MWNTs (∼ø40nm × 6μm and ∼ø50nm ö 7μm), and a T-junction was made of two MWNTs (∼ø40nm × 3μm and ∼ø50nm × 2μm). A kink junction is formed by bending an MWNT (∼ø40nm × 6μm) over its elastic limit for 20 times. Force measurements are performed and the flexural rigidity and Young's Modulus of an ∼ø30nm ∼7μm MWNT are estimated in situ to be 8.641 × 10-20Nm2 and 2.17TPa. Such manipulations are essential for both the property characterization of CNTs and the fabrication of functional nanosystems.


Nanophotonics ◽  
2017 ◽  
Vol 6 (5) ◽  
pp. 923-941 ◽  
Author(s):  
Gediminas Seniutinas ◽  
Armandas Balčytis ◽  
Ignas Reklaitis ◽  
Feng Chen ◽  
Jeffrey Davis ◽  
...  

AbstractThe evolution of optical microscopy from an imaging technique into a tool for materials modification and fabrication is now being repeated with other characterization techniques, including scanning electron microscopy (SEM), focused ion beam (FIB) milling/imaging, and atomic force microscopy (AFM). Fabrication and in situ imaging of materials undergoing a three-dimensional (3D) nano-structuring within a 1−100 nm resolution window is required for future manufacturing of devices. This level of precision is critically in enabling the cross-over between different device platforms (e.g. from electronics to micro-/nano-fluidics and/or photonics) within future devices that will be interfacing with biological and molecular systems in a 3D fashion. Prospective trends in electron, ion, and nano-tip based fabrication techniques are presented.


2004 ◽  
Vol 47 (4) ◽  
pp. 343-346 ◽  
Author(s):  
Zdeňka Zapletalová ◽  
Roman Kubínek ◽  
Milan Vůjtek ◽  
Radko Novotný

Atomic force microscopy (AFM) as one the technique of Scanning Probe Microscopy is useful for imaging of surface structure. This method can yield three-dimensional high-resolution topographic images of sample surfaces by using a scanning technique for conductors and insulators on atomic scale. It is based upon mapping of atomic-forces on a surface of an investigated sample. The method is useful not only in physics and chemistry; it can be also applied in biological fields. Special construction of AFM scanner enables to follow biological samples in liquid environments. Artifacts caused by dehydration of samples are removed this way. Dentin of human teeth is a vital hydrated tissue. It is strongly sensitive to dehydration and drying that are commonly used in preparation of samples in examinations by Scanning Electron Microscopy (SEM). We describe our experience in examination of dentin surfaces of extracted human third molars using contact method of AFM under moist conditions.


2005 ◽  
Vol 901 ◽  
Author(s):  
Torben Clausen ◽  
Jan-Ingo Flege ◽  
Thomas Schmidt ◽  
Jens Falta

AbstractWe have investigated the Sb surfactant-mediated growth of Ge on Si(113) over the temperature range from 500°C to 700°C. The surface morphology, film thickness, interface roughness and strain state of the films have been determined by the use of scanning electron microscopy, atomic force microscopy and grazing incidence x-ray diffraction. After growth at temperatures between 500°C and 600°C smooth Ge films have been observed, which show a partial strain relaxation. However, increasing the temperature to 700°C, a rough surface with a high density of three-dimensional islands has been found.


1995 ◽  
Vol 391 ◽  
Author(s):  
George O. Ramseyer ◽  
Joseph V. Beasock ◽  
Herbert F. Helbig ◽  
Lois H. Walsh

AbstractThe volumes of slit, edge, erosion and erosion/slit voids in stressed and electromigrated aluminum conductor lines were quantitatively determined with low resolution standard and high resolution enhanced tips by atomic force microscopy. These three-dimensional results were compared to semiquantitative determinations of void volumes extrapolated from two-dimensional backscattered scanning electron microscopy area determinations of the passivated aluminum conductor. After the passivation was removed by plasma etching, void volumes were also determined from two-dimensional scanning electron microscopy micrographs. The volumes of the nearest hillocks on the anodic side of the voids were quantitatively determined by atomic force microscopy, and these hillock volumes were determined to be independent of the respective void volumes.


Author(s):  
Jane A. Westfall ◽  
S. Yamataka ◽  
Paul D. Enos

Scanning electron microscopy (SEM) provides three dimensional details of external surface structures and supplements ultrastructural information provided by transmission electron microscopy (TEM). Animals composed of watery jellylike tissues such as hydras and other coelenterates have not been considered suitable for SEM studies because of the difficulty in preserving such organisms in a normal state. This study demonstrates 1) the successful use of SEM on such tissue, and 2) the unique arrangement of batteries of nematocysts within large epitheliomuscular cells on tentacles of Hydra littoralis.Whole specimens of Hydra were prepared for SEM (Figs. 1 and 2) by the fix, freeze-dry, coat technique of Small and Màrszalek. The specimens were fixed in osmium tetroxide and mercuric chloride, freeze-dried in vacuo on a prechilled 1 Kg brass block, and coated with gold-palladium. Tissues for TEM (Figs. 3 and 4) were fixed in glutaraldehyde followed by osmium tetroxide. Scanning micrographs were taken on a Cambridge Stereoscan Mark II A microscope at 10 KV and transmission micrographs were taken on an RCA EMU 3G microscope (Fig. 3) or on a Hitachi HU 11B microscope (Fig. 4).


Author(s):  
P. Dayanandan ◽  
P. B. Kaufman

A three dimensional appreciation of the guard cell morphology coupled with ultrastjuctural studies should lead to a better understanding of their still obscure dynamics of movement. We have found the SEM of great value not only in studies of the surface details of stomata but also in resolving the structures and relationships that exist between the guard and subsidiary cells. We now report the isolation and SEM studies of guard cells from nine genera of plants.Guard cells were isolated from the following plants: Psilotum nudum, four species of Equisetum, Cycas revoluta, Ceratozamia sp., Pinus sylvestris, Ephedra cochuma, Welwitschia mirabilis, Euphorbia tirucalli and Allium cepa.


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