Auto Focus and Leveling Control of Large-Scale High-Precision Scan-Stage Using Driving Force and Surface Shape of the Stage
2009 ◽
Vol 129
(6)
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pp. 564-570
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2020 ◽
Vol 140
(4)
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pp. 272-280
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2009 ◽
Vol 29
(4)
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pp. 1177-1179
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2020 ◽
Vol 1
(1)
◽
pp. 38
2004 ◽
Vol 28
(4)
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pp. 281-290
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2019 ◽
Vol 16
(6)
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pp. 172988141989351
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