Application of a Dual-spectral-range, Divergent-beam Spectroscopic Ellipsometer for High-Speed Mapping of Large-area, Laterally-inhomogeneous, Photovoltaic Multilayers

2011 ◽  
Vol 1323 ◽  
Author(s):  
M. Fried ◽  
G. Juhasz ◽  
C. Major ◽  
A. Nemeth ◽  
P. Petrik ◽  
...  

ABSTRACTWe have developed a prototype spectroscopic ellipsometer for imaging/mapping purposes requiring only one measurement cycle (one rotation period of a polarizer or analyzer) for the acquisition of a two-dimensional array of data points. Our new measurement technique serves as a novel form of imaging ellipsometry, using a divergent (uncollimated, diffuse) source system and a detection system consisting of an angle-of-incidence-sensitive pinhole camera. By incorporating broad-band sources and wavelength dispersion optics, the instrument provides continuous high-resolution spectra along a line image of the sample surface. As a result, information on multilayer photovoltaics stacks can be obtained over large areas (several dm2) at high speed. The technique can be expanded to even larger areas by scaling-up the optical geometry. The spatial resolution of the line image is limited by the minimum resolved-angle as determined by the detection system. Small-aperture polarizers (25 mm diameter) are incorporated into the instrument, which reduces its cost. Demonstration mapping measurements have been performed ex situ on a multilayer sample deposited on a polymer substrate, including an intentionally graded 80-350 nm thick hydrogenated amorphous silicon (a-Si:H) layer and an intended uniform 400-500 nm thick transparent conducting ZnO:Al layer, both on opaque silver. Alternative commercial instruments for ex situ SE mapping must translate the sample in two dimensions. Even a 15 x 15 cm2 sample requires > 200 measurements with cm-resolution and at least 15 min. By collecting ex situ data in parallel along one dimension through imaging, the divergent-beam system can measure with similar spatial resolution in < 2 min. In situ measurements on both roll-to-roll polymer and rigid glass will be possible in the future.

2011 ◽  
Vol 1321 ◽  
Author(s):  
A. Nemeth ◽  
D. Attygalle ◽  
L. R. Dahal ◽  
P. Aryal ◽  
Z. Huang ◽  
...  

ABSTRACTA prototype expanded-beam spectroscopic ellipsometer has been developed that uses uncollimated (non-parallel, diffuse) illumination with a detection system consisting of an angle-of-incidence-sensitive pinhole camera for high-speed, large-area imaging/mapping applications. The performance of this novel instrument is being tested for imaging/mapping of mixed-phase hydrogenated silicon films having graded amorphous (a-Si:H) and nanocrystalline (nc-Si:H) components throughout the film depth. The speed of the measurement system makes the instrument suitable for use on production lines. The precision enables detection of subnanometer thicknesses, and refractive index and extinction coefficient changes of 0.01. Angle-of-incidence and mirror calibrations are made via well-known sample structures. Alternative commercial instrumentation for mapping by spectroscopic ellipsometry must translate the sample or ellipsometer in two dimensions. For this instrumentation, even a 15 × 15 cm2 sample with cm2 resolution requires > 200 measurements and at least 15 min. By imaging along one dimension in parallel, the expanded-beam system can measure with similar resolution in < 2 min. The focus of recent instrumentation efforts is on improving the overall system spectral range and its performance.


Author(s):  
Brian Cross

A relatively new entry, in the field of microscopy, is the Scanning X-Ray Fluorescence Microscope (SXRFM). Using this type of instrument (e.g. Kevex Omicron X-ray Microprobe), one can obtain multiple elemental x-ray images, from the analysis of materials which show heterogeneity. The SXRFM obtains images by collimating an x-ray beam (e.g. 100 μm diameter), and then scanning the sample with a high-speed x-y stage. To speed up the image acquisition, data is acquired "on-the-fly" by slew-scanning the stage along the x-axis, like a TV or SEM scan. To reduce the overhead from "fly-back," the images can be acquired by bi-directional scanning of the x-axis. This results in very little overhead with the re-positioning of the sample stage. The image acquisition rate is dominated by the x-ray acquisition rate. Therefore, the total x-ray image acquisition rate, using the SXRFM, is very comparable to an SEM. Although the x-ray spatial resolution of the SXRFM is worse than an SEM (say 100 vs. 2 μm), there are several other advantages.


Sensors ◽  
2021 ◽  
Vol 21 (16) ◽  
pp. 5279
Author(s):  
Dong-Hoon Kwak ◽  
Guk-Jin Son ◽  
Mi-Kyung Park ◽  
Young-Duk Kim

The consumption of seaweed is increasing year by year worldwide. Therefore, the foreign object inspection of seaweed is becoming increasingly important. Seaweed is mixed with various materials such as laver and sargassum fusiforme. So it has various colors even in the same seaweed. In addition, the surface is uneven and greasy, causing diffuse reflections frequently. For these reasons, it is difficult to detect foreign objects in seaweed, so the accuracy of conventional foreign object detectors used in real manufacturing sites is less than 80%. Supporting real-time inspection should also be considered when inspecting foreign objects. Since seaweed requires mass production, rapid inspection is essential. However, hyperspectral imaging techniques are generally not suitable for high-speed inspection. In this study, we overcome this limitation by using dimensionality reduction and using simplified operations. For accuracy improvement, the proposed algorithm is carried out in 2 stages. Firstly, the subtraction method is used to clearly distinguish seaweed and conveyor belts, and also detect some relatively easy to detect foreign objects. Secondly, a standardization inspection is performed based on the result of the subtraction method. During this process, the proposed scheme adopts simplified and burdenless calculations such as subtraction, division, and one-by-one matching, which achieves both accuracy and low latency performance. In the experiment to evaluate the performance, 60 normal seaweeds and 60 seaweeds containing foreign objects were used, and the accuracy of the proposed algorithm is 95%. Finally, by implementing the proposed algorithm as a foreign object detection platform, it was confirmed that real-time operation in rapid inspection was possible, and the possibility of deployment in real manufacturing sites was confirmed.


2012 ◽  
Vol 542-543 ◽  
pp. 828-832 ◽  
Author(s):  
Jing Fang Yang ◽  
Xian Ying Feng ◽  
Hong Jun Fu ◽  
Lian Fang Zhao

Tire dynamic balance detection plays an important part in tire quality detection area. This paper uses the two-sided balance method to obtain the unbalance of the tire. According to the engineering practice, builds kinetic model and then introduces the calculating principle and operating procedures. In order to accurately determine the influence coefficient, a calibration method without tire is put forward. Further more, this new method is able to eliminate the unbalance caused by non-quality factors to some extent. But this method is presented based on the relative position invariance of the upper rim and lower rim, even both of them are under high-speed rotation situation. Finally, the experimental data acquired from both of the two methods are compared. The calibration method without tire is proved to be more feasible, efficient and accurate.


2013 ◽  
Vol 712-715 ◽  
pp. 2323-2326
Author(s):  
Xing Guang Qi ◽  
Hai Lun Zhang ◽  
Xiao Ting Li

This paper presents an on-line surface defects detection system based on machine vision, which has high speed architecture and can perform high accurate detection for cold-rolled aluminum plate. The system consists of high speed camera and industrial personal computer (IPC) array which connected through Gigabit Ethernet, achieved seamless detection by redundant control. In order to acquire high processing speed, single IPC as processor receives from and deals with only one or two cameras' image. Experimental results show that the system with high accurate detection capability can satisfy the requirement of real time detection and find out the defects on the production line effectively.


2012 ◽  
Vol 263-266 ◽  
pp. 2915-2919
Author(s):  
Gao Long Ma ◽  
Wen Tang

With the great increasing of high-speed networks,the traditional network intrusion detection system(NIDS) has a serious problem with handling heavy traffic loads in real-time ,which may result in packets loss and error detection . In this paper we will introduce the efficient load balancing scheme into NIDS and improve rule sets of the detection engine so as to make NIDS more suitable to high-speed networks environment.


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