Science and Technology of Piezoelectric/Diamond Hybrid Heterostructures for High Performance MEMS/NEMS Devices

2007 ◽  
Vol 1052 ◽  
Author(s):  
Orlando Auciello ◽  
Anirudha Sumant ◽  
Jon Hiller ◽  
Bernd Kabius ◽  
Sudarsan Srinivasa

AbstractMost current micro/nanoelectromechanical systems (MEMS/NEMS) are based on silicon. However, silicon exhibits relatively poor mechanical/tribological properties, compromising applications to some devices. Diamond films with superior mechanical/tribological properties provide an excellent alternative platform material. Ultrananocrystalline diamond (UNCD®) in film form with 2-5 nm grains exhibits excellent mechanical and tribological properties for high-performance MEMS/NEMS devices. Concurrently, piezoelectric Pb(ZrxTi1-x)O3 (PZT) films provide high sensitivity/low electrical noise for sensing/high-force actuation at relatively low voltages. Therefore, integration of PZT and UNCD films provides a high-performance platform for advanced MEMS/NEMS devices. This paper describes the bases of such integration and demonstration of low voltage piezoactuated hybrid PZT/UNCD cantilevers.

2021 ◽  
Vol 56 (12) ◽  
pp. 7171-7230
Author(s):  
Orlando Auciello ◽  
Dean M. Aslam

AbstractA comprehensive review is presented on the advances achieved in past years on fundamental and applied materials science of diamond films and engineering to integrate them into new generations of microelectromechanical system (MEMS) and nanoelectromechanical systems (NEMS). Specifically, the review focuses on describing the fundamental science performed to develop thin film synthesis processes and the characterization of chemical, mechanical, tribological and electronic properties of microcrystalline diamond, nanocrystalline diamond and ultrananocrystalline diamond films technologies, and the research and development focused on the integration of the diamond films with other film-based materials. The review includes both theoretical and experimental work focused on optimizing the films synthesis and the resulting properties to achieve the best possible MEMS/NEMS devices performance to produce new generation of MEMS/NEMS external environmental sensors and energy generation devices, human body implantable biosensors and energy generation devices, electron field emission devices and many more MEMS/NEMS devices, to produce transformational positive impact on the way and quality of life of people worldwide.


2019 ◽  
Vol 32 (6) ◽  
pp. 645-654
Author(s):  
Xiaotao Qiu ◽  
Congli Fu ◽  
Aiqun Gu ◽  
Yang Gao ◽  
Xiuli Wang ◽  
...  

High-performance anti-wear polyetheretherketone/polytetrafluoroethylene (PEEK/PTFE) blends have drawn much attention over the past few years, owing to their wide range of potential applications. However, a convenient and effective method to prepare such blends with superior mechanical and tribological properties is still lacking. In this work, we propose a promising approach that uses melt-processable PTFE (MP PTFE), instead of conventional PTFE, to prepare anti-wear blends. MP PTFE, with melt flow abilities under appropriate conditions, can disperse homogeneously in PEEK, enhancing both the mechanical and tribological properties of the PEEK/PTFE blend. To prove this postulation, in this work, both MP PTFE and commercial PTFE were blended with PEEK, separately, and the effects of PTFE type and content on the tensile and tribological properties of the blends were studied. The results showed that, although the addition of commercial PTFE to PEEK could increase the wear resistance, it decreased the tensile strength of PEEK significantly. Compared to the blends with commercial PTFE, the blends with MP PTFE exhibited better tribological performance and higher tensile strength for PTFE content below 10 wt%. It was confirmed that the better dispersion of MP PTFE in PEEK endowed the blends with higher tensile strength. The surface analysis indicated that the MP PTFE could readily migrate to and enrich the surfaces of the blends. The relatively high PTFE content on the surface favored the formation of tribo-films, enhancing the tribological properties of the blends.


2021 ◽  
Vol 3 (1) ◽  
pp. 9-20
Author(s):  
Muhammad Wira Akira ◽  
Hanuna Haritsah ◽  
Anne Zulfia ◽  
Ekavianti Prajatelistia

Nano-Al2O3 particles were incorporated into ADC12 alloy with the addition of Al-5Ti-B, Al-Sr, and Mg to achieve high performance in mechanical and tribological properties. In this study, varied nano-Al2O3 was used from 0.25 vf-% to  0.5 vf-% through stir casting methods to discover the optimum amount to obtain high performance. Besides, the inclusion of grain refiner Al-5Ti-B and microstructure modifier Al-Sr is expected to improve performance to the next level. However, porosity and agglomeration still be a concern in Aluminum alloy matrix composite fabrication. The presence of spinel phase MgAl2O4 in the interface area between nano-Al2O3 particles and ADC12 alloy is relied upon to minimize this porosity and agglomeration issue. The optimum of tensile strength and hardness was found at 0.35 vf-% Al2O3 and wear rate at 0.4 vf%. Although, the optimum point of wear found at 0.4 vf%, porosity began to increase at 0.4 vf% as well. As a result, 0.35 vf% addition of the nano-Al2O3 gives the best performance for the composite.


2021 ◽  
pp. 002199832110492
Author(s):  
Aijiao Li ◽  
Suoxiao Wang ◽  
Zhe Chen ◽  
Hong Liu ◽  
Hongding Wang

The effective means to solve material wear is to develop self-lubricating composite materials with excellent tribological, thermal, and mechanical properties. Herein, the composites of reduced graphene oxide (r-GO) nanosheet decorated with Silicon Carbide (SiC) were facilely prepared with employing a silane coupling agent, and the corresponding r-GO/SiC/thermosetting polyimide (r-GO/SiC/TPI) nanocomposite films were obtained by in situ polymerization method. The mechanical, tribological, and thermal properties of these nanocomposite films were investigated. When the content of r-GO/SiC was at 1.0 wt%, the compression strength and compression modulus of the composite increased by 37.7% and 47.3%, respectively, which were much higher than that of TPI composites addition of r-GO or SiC alone. Furthermore, r-GO/SiC/TPI composites also exhibited the lowest wear rate and friction coefficient in these reinforced TPI nanocomposites. When the content of r-GO/SiC was 0.8 wt%, particularly, the friction coefficient and wear rate of r-GO/SiC/TPI decreased by 22.8% and 79.8% compared to pure TPI, respectively. Additionally, trace amount r-GO/SiC hybrids also significantly enhance the thermal stability of TPI matrix. Compared to the polyimide composites reinforced by common nano-scale inorganic fillers, the outstanding mechanical and tribological properties of this r-GO/SiC/PI composites could be attributed to the ball on plane structure of GO/SiC, which lead to crack reflection, strength increment. These r-GO/SiC/TPI composites demonstrate the promising potential to be used as high-performance tribological materials in industry applications.


2018 ◽  
Vol 8 (1) ◽  
Author(s):  
Revati Rani ◽  
Kalpataru Panda ◽  
Niranjan Kumar ◽  
Kozakov Alexey Titovich ◽  
Kolesnikov Vladimir Ivanovich ◽  
...  

2011 ◽  
Vol 44 (12) ◽  
pp. 2042-2049 ◽  
Author(s):  
N. Kumar ◽  
Neha Sharma ◽  
S. Dash ◽  
C. Popov ◽  
W. Kulisch ◽  
...  

2011 ◽  
Vol 287-290 ◽  
pp. 675-678 ◽  
Author(s):  
Wen Xia Wang

The mechanical and tribological behaviors of the carbon/carbon (C/C) composites were evaluated by three-point bending and sliding wear tests. The effect of carbon fiber content on their mechanical behavior was also investigated. To produce the C/C composites, the precursor was introduced to the preforms by impregnating with phenolic solution. The C/C preforms were densified by thermal gradient chemical vapor infiltration. Results indicated that, the C/C composites show excellent mechanical and tribological properties. A kind of high performance brake materials was obtained.


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