Xps Study of the Nitridation Process of A Polytitanocarbosilane into Si-Ti-N-O Ceramics
Keyword(s):
X Ray
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ABSTRACTThe nitridation process of a polytitanocarbosilane, leading to the formation of a Si-Ti-N-O ceramics, has been investigated mainly by means of X-ray photoelectron spectroscopy (XPS). Ti2p spectra collected on samples fired at various stages of the transformation process clearly shown that Ti-N bonds of TiOxNy mixed units start to form at 500 °C. By increasing the firing temperature, the Ti2p peak shifts toward values typical of titanium nitride ceramics, so indicating the progressive nitrogen enrichment of the mixed units up to the formation of a TiN phase.