Low-Temperature Diffusivity of Hydrogen in Different Silicon Substrates
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AbstractThe diffusivity of deuterium (D) at 250°C was determined in silicon samples grown by different techniques. It is found that the diffusivity increases with the growth speed, increase in carbon content and a decrease in oxygen concentration of the substrate. These growth conditions correlate well with the concentration of vacancy-type defects in the as-grown state. Hence, we conclude that a vacancy mechanism is responsible for low-temperature hydrogen diffusion in silicon. The highest diffusivity for hydrogen, calculated from these data, was found to be 3 × 10−7 cm2/s.
1986 ◽
Vol 37
(1)
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pp. 31-36
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2008 ◽
Vol 600-603
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pp. 207-210
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2008 ◽
Vol 202
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pp. 2126-2131
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Vol 8
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pp. 3523-3527
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2021 ◽
Vol 1016
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pp. 1331-1336
2018 ◽
Vol 2018
(1)
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pp. 000728-000733