Synchrotron Radiation X-ray Microdiffraction Study of Cu Interconnects

1999 ◽  
Vol 590 ◽  
Author(s):  
X. Zhang ◽  
H. Solak ◽  
F. Cerrina ◽  
B. Lai ◽  
Z. Cai ◽  
...  
Keyword(s):  
Synchrotron Radiation ◽  
Copper Interconnects ◽  
Strain Variation ◽  
Adhesion Layer ◽  
Dramatic Effect ◽  
Strain Profile ◽  
X Ray ◽  
Strain Change ◽  
Different Types ◽  
Before And After

ABSTRACTWe have used synchrotron radiation x-ray microdiffraction to study the microstructure and strain variation of copper interconnects. Different types of local microstructures have been found in different samples. Our data show that the Ti adhesion layer has a dramatic effect on Cu microstructure. On site electromigration test has been conducted and strain profile along the same interconnect line was measured before and after this electrical stressing. Cu fluorescence scan was used to find the mass variations along the line. Voids and hillocks can be clearly identified in this scan. x-ray micro-diffraction was used to measure the strain change around the interesting regions.

scholarly journals DAFNE-Light DXR1 Soft X-Ray Synchrotron Radiation Beamline: Characteristics and XAFS Applications

2019 ◽  
Vol 4 (1) ◽  
pp. 7 ◽  
Author(s):  
Antonella Balerna
Keyword(s):  
Fine Structure ◽  
Synchrotron Radiation ◽  
Disordered Systems ◽  
Beam Line ◽  
Long Range Order ◽  
X Ray ◽  
Xafs Spectroscopy ◽  
Insertion Device ◽  
Different Types ◽  
X Ray Absorption

X-ray Absorption Fine Structure Spectroscopy (XAFS) is a powerful technique to investigate the local atomic geometry and the chemical state of atoms in different types of materials, especially if lacking a long-range order, such as nanomaterials, liquids, amorphous and highly disordered systems, and polymers containing metallic atoms. The INFN-LNF DAΦNE-Light DXR1 beam line is mainly dedicated to soft X-ray absorption spectroscopy; it collects the radiation of a wiggler insertion device and covers the energy range from 0.9 to 3.0 keV or the range going from the K-edge of Na through to the K-edge of Cl. The characteristics of the beamline are reported here together with the XAFS spectra of reference compounds, in order to show some of the information achievable with this X-ray spectroscopy. Additionally, some examples of XAFS spectroscopy applications are also reported.

X–Ray Diffraction (XRD), Powder X–Ray Diffraction (PXRD) and Energy–Dispersive X–Ray Diffraction (EDXRD) Comparative Study on Malignant and Benign Human Cancer Cells and Tissues under Synchrotron Radiation

2018 ◽  
Vol 1 (1) ◽  
pp. 1-14 ◽  
Keyword(s):  
Synchrotron Radiation ◽  
Comparative Study ◽  
Cancer Cells ◽  
Human Cancer ◽  
Energy Dispersive ◽  
X Ray Diffraction ◽  
X Ray ◽  
Human Cancer Cells ◽  
Before And After

In the current study, we have experimentally and comparatively investigated and compared malignant human cancer cells and tissues before and after irradiating of synchrotron radiation using X–Ray Diffraction (XRD), Powder X–Ray Diffraction (PXRD) and Energy–Dispersive X– Ray Diffraction (EDXRD).

scholarly journals OPPORTUNITIES FOR THE USE OF THE SMALL-SIZE ACCELERATOR VGIK-1

2019 ◽  
pp. 115-121
Author(s):  
D.V. Vinnikiov ◽  
I.V. Buravilov ◽  
V.B. Yuferov ◽  
A.N. Ponomarev ◽  
V.I. Tkachev
Keyword(s):  
Electron Microscopy ◽  
Experimental Data ◽  
X Ray ◽  
Transfer Processes ◽  
Mass Transfer Processes ◽  
Different Types ◽  
Before And After ◽  
Current Electron ◽  
Optic Microscopy ◽  
Modification Of The Surface

The experimental data on modification of the surface of metals, alloys and materials coated using the method of irradiation by a heavy-current electron beam with the energy of 300 keV have been given. The specimen surface structure was studied before and after the irradiation using the method of optic microscopy and the surface layer microhardness measurement. The method of electron microscopy was used to analyze the structure and the sizes of dispersed anode material. The films consisting of the crystals with the size of 6 to 8 nm were obtained. The mass transfer processes that occur in the material of metal targets made of Cu, Ti, Mo, Al were studied. The spatial map was compiled for the X-ray field of the plant. The experiments were carried out to define the action of X-ray radiation on the different types of conditionally pathogenic microflora, in particular such bacteria as Escherichia coli, Staphylococcus aureus, and Bacillus subtilis. The fields of application of the plant were defined.

High-Resolution X-Ray Computed Tomography—What Synchrotron Sources Can Bring to 3Di Devices Failure Analysis

2016 ◽  
Author(s):  
A. Fraczkiewicz ◽  
A. Jouve ◽  
T. Mourier ◽  
P. Bleuet ◽  
E. Capria ◽  
...  
Keyword(s):  
Synchrotron Radiation ◽  
Failure Analysis ◽  
Phase Contrast ◽  
European Synchrotron Radiation Facility ◽  
Field Of View ◽  
3D Integration ◽  
Synchrotron Source ◽  
X Ray ◽  
Different Types ◽  
X Ray Computed

Abstract To get both the resolution and the field of view needed, 3Di devices are characterized in this paper using phase-contrast X-ray tomography performed in a synchrotron source. The paper shows how the synchrotron-based tomography can be routinely used as a tool for failure analysis, and how some strategies can be applied to make those analyses more time-efficient and automatic without any loss of resolution. It presents and assesses the possibilities offered by a synchrotron radiation facility such as European Synchrotron Radiation Facility for the field of failure analysis in microelectronics. The paper illustrates those possibilities through two main examples, based on two different types of connection of bottom and top tiers in 3D integration, either thermocompression with copper pillars or hybrid bonding using copper pads. Several strategies have been successfully tested for the data acquisition to be faster and to limit the needed human intervention as much as possible.

Spatial Distribution of Metal Ions in Spruce Wood by Synchrotron Radiation Microbeam X-Ray Fluorescence Analysis

Holzforschung ◽  
1999 ◽  
Vol 53 (5) ◽  
pp. 474-480 ◽  
Author(s):  
Annica Berglund ◽  
Harald Brelid ◽  
Anders Rindby ◽  
Per Engström
Keyword(s):  
Synchrotron Radiation ◽  
Metal Ions ◽  
Metal Ion ◽  
Fluorescence Analysis ◽  
X Ray ◽  
Metal Ion Analysis ◽  
Before And After ◽  
Non Destructive

Summary The possibility of using synchrotron radiation microbeam X-ray fluorescence (μ -XRF) for the determination of the morphological distribution of inorganic elements in wood has been investigated. A number of samples were analyzed and some of the results are presented in this paper. The new application of the method showed good results and it was concluded that the technique is useful for specific in situ metal ion analysis of wood. One of its special advantages is that it is a non-destructive method, which may allow analysis of the same sample before and after a chemical treatment. This study shows the natural distribution of a selection of metal ions in wood. Some differences in the distribution and amount of certain metals could also be observed in a sample that had been subjected to treatment with an EDTA-solution.

Cell response analysis to synchrotron radiation X-ray microbeam cytoplasm limited irradiation

Impact ◽  
2020 ◽  
Vol 2020 (7) ◽  
pp. 37-39
Author(s):  
Masao Suzuki
Keyword(s):  
Cell Death ◽  
Synchrotron Radiation ◽  
Cancer Cells ◽  
The Body ◽  
Response Analysis ◽  
X Ray ◽  
Advantages And Disadvantages ◽  
Different Types ◽  
Principal Researcher ◽  
Combine Surgery

The cells responsible for cancer start their journey much like any other in the body. However, they grow uncontrollably through the body as a result of the accumulation of certain mutations. If left unchecked, cancer will impact on a number of the human body's key processes, leading, ultimately, to death. There are many challenges associated with treating this disease, but they generally stem from the difficulty in differentiating the disease from the host and the ability of even a few cells to survive, recover and return. The most common treatments generally combine surgery with some type of chemotherapy or radiotherapy. Chemotherapy utilises chemicals that kill fast-growing cells and thereby disproportionally affect the rapidly multiplying cancer cells. Radiotherapy targets the tumour with radiation to cause damage and cell death. Both have their advantages and disadvantages, and both are often not 100 per cent effective. To improve these treatments, it is necessary to understand more about their precise effects on cells and, particularly, what defences cells have against their effects. Senior Principal Researcher Dr Masao Suzuki of the National Institutes for Quantum and Radiological Science and Technology (QST) is utilising the considerable radiological resources of QST to investigate the effects of different types of radiation on cells under different conditions.

Cell response analysis to synchrotron radiation X-ray microbeam cytoplasm limited irradiation

Impact ◽  
2021 ◽  
Vol 2021 (6) ◽  
pp. 21-23
Author(s):  
Masao Suzuki
Keyword(s):  
Cell Death ◽  
Synchrotron Radiation ◽  
Cancer Cells ◽  
The Body ◽  
Response Analysis ◽  
X Ray ◽  
Advantages And Disadvantages ◽  
Different Types ◽  
Principal Researcher ◽  
Combine Surgery

The cells responsible for cancer start their journey much like any other in the body. However, they grow uncontrollably through the body as a result of the accumulation of certain mutations. If left unchecked, cancer will impact on a number of the human body's key processes, leading, ultimately, to death. There are many challenges associated with treating this disease, but they generally stem from the difficulty in differentiating the disease from the host and the ability of even a few cells to survive, recover and return. The most common treatments generally combine surgery with some type of chemotherapy or radiotherapy. Chemotherapy utilises chemicals that kill fast-growing cells and thereby disproportionally affect the rapidly multiplying cancer cells. Radiotherapy targets the tumour with radiation to cause damage and cell death. Both have their advantages and disadvantages, and both are often not 100 per cent effective. To improve these treatments, it is necessary to understand more about their precise effects on cells and, particularly, what defences cells have against their effects. Senior Principal Researcher Dr Masao Suzuki of the National Institutes for Quantum and Radiological Science and Technology (QST) is utilising the considerable radiological resources of QST to investigate the effects of different types of radiation on cells under different conditions.

scholarly journals Strain and Damage Measurements in Ion Implanted AlxGa1−x As/GaAs Superlattices

1984 ◽  
Vol 37 ◽  
Author(s):  
A. H. Hamdi ◽  
J. L. Tandon ◽  
T. Vreeland ◽  
M.-A. Nicolet
Keyword(s):  
Ion Implantation ◽  
Low Dose ◽  
Rocking Curve ◽  
Strain Measurements ◽  
Strain Profile ◽  
X Ray ◽  
Before And After ◽  
Si Ion Implantation ◽  
Ion Implanted

AbstractStrain measurements in AlxGa1−x As/GaAs superlattices have been carried out before and after Si ion implantation. For doses up to 5 × 1015 cm−2, no atomic intermixing of the sublayers is observed by backscattering spectrometry. However, with x-ray rocking curve measurements, significant changes in the strain profiles are detected for implantations with doses as low as 7 × 1012 cm−2. Interpretation of the rocking curves suggests that low-dose implantations release strain in the AlxGa1−x As sublayers. The strain profile recovery of the implanted samples, upon annealing at ∼ 420°C, implies that the damage caused by implantation is largely reversible.

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