Effect Of pH On Chemical-Mechanical Polishing Of Copper And Tantalum

2001 ◽  
Vol 671 ◽  
Author(s):  
Anurag Jindal ◽  
Ying Li ◽  
S. V. Babu
Keyword(s):  
Chemical Mechanical Polishing ◽  
Removal Rate ◽  
Surface Characteristics ◽  
Direct Result ◽  
Rate Variation ◽  
Removal Rates ◽  
Effect Of Ph ◽  
Passivating Layer ◽  
Ph Values ◽  
Glycine Solution

ABSTRACTpH has a strong effect on the polish rates of copper (Cu) and tantalum (Ta) [1]. In this paper, removal rates of Cu and Ta using aqueous slurries containing alumina and silica abrasives in H2O2-glycine solution are studied at varying pH values. It is observed that variation in the Cu and Ta removal rates is a direct result of the change in surface characteristics of the films. Surface characteristics such as presence/absence of a passivating layer and hardness of such layer vary with pH and hence result in removal rate variation. It is also shown that a favorable Cu/Ta polish rate selectivity can be obtained by adjusting the pH of the slurry.

Removal Rate, Uniformity and Defectivity Studies of Chemical Mechanical Polishing of BPSG Films

2000 ◽  
Vol 613 ◽  
Author(s):  
Benjamin A. Bonner ◽  
Boris Fishkin ◽  
Jeffrey David ◽  
Chad Garretson ◽  
Thomas H. Osterheld
Keyword(s):  
Chemical Mechanical Polishing ◽  
Boron Concentration ◽  
Removal Rate ◽  
Mechanical Polishing ◽  
Phosphorus Concentration ◽  
Removal Rates ◽  
Percent Increase

ABSTRACTWafers where deposited with BPSG films having phosphorus concentration varying from 3.65 to 6.25% and boron concentration varying from 4 to 5.7%. These wafers were polished using CMP and the rates were found to depend on dopant concentrations. A fit to the data indicated that removal rates were more than 3 times as sensitive to boron concentration compared to phosphorus concentration. For a constant phosphorus concentration of 5%, each percent increase in boron increases CMP removal rate by 340 Å/min. For a constant boron concentration of 5%, each percent increase in phosphorus increases CMP removal rate by 96 Å/min.

The pH Effect On Chemical Mechanical Planarization Of Copper

2003 ◽  
Vol 767 ◽  
Author(s):  
Tianbao Du ◽  
Vimal Desai
Keyword(s):  
Photoelectron Spectroscopy ◽  
Removal Rate ◽  
Ph Effect ◽  
Chemical Mechanical Planarization ◽  
Electrochemical Techniques ◽  
Surface Layers ◽  
Removal Rates ◽  
Ph Values ◽  
Alkaline Conditions ◽  
Static Conditions

AbstractThis study explores the effect of pH on the chemical mechanical polishing (CMP) characteristics of copper in H2O2 and KIO3 based slurries under various dynamic and static conditions. High purity copper disc was used to study the dissolution and oxidation kinetics at various pH (2 to 10) with 5% H2O2 or 0.1M KIO3. Electrochemical techniques were used to investigate the dissolution/passivation behavior of Cu. The affected surface layers of the statically etched Cu-disc were investigated using X-ray photoelectron spectroscopy (XPS), and scanning electron microscopy (SEM). In 5% H2O2, the Cu removal rate decreases with an increase in pH and reaches minimum at pH 6, and then increases under alkaline conditions. XPS results indicate that the surface oxide formed at various pH values was responsible for this CMP trend. However, with 0.1M KIO3, the CMP removal rates were found to be lower at pH 2. The maximum was observed at pH 4, then the removal rate decreased with the increase of pH. The lower value of removal rate at pH2 was due to the fast interaction between Cu and KIO3 and the precipitation of CuI on the pad, which makes the pad glassy, resulting in lowered removal rates. This was confirmed by XPS measurements. The decreased CMP removal rates when the pH is higher than 4 might be due to the weaker oxidation power of KIO3 with the increase of pH.

Analysis of organic removal rates in the aerated submerged fixed film process

1998 ◽  
Vol 38 (8-9) ◽  
pp. 213-221 ◽  
Author(s):  
Mohamed F. Hamoda ◽  
Ibrahim A. Al-Ghusain
Keyword(s):  
Pilot Plant ◽  
Removal Rate ◽  
Domestic Wastewater ◽  
Removal Rates ◽  
Hydraulic Loading ◽  
Organic Removal ◽  
Wide Range ◽  
Fixed Film ◽  
Cod Removal Rate ◽  
And Performance

Performance data from a pilot-plant employing the four-stage aerated submerged fixed film (ASFF) process treating domestic wastewater were analyzed to examine the organic removal rates. The process has shown high BOD removal efficiencies (> 90%) over a wide range of hydraulic loading rates (0.04 to 0.68 m3/m2·d). It could also cope with high hydraulic and organic loadings with minimal loss in efficiency due to the large amount of immobilized biomass attained. The organic (BOD and COD) removal rate was influenced by the hydraulic loadings applied, but organic removal rates of up to 104 kg BOD/ m2·d were obtained at a hydraulic loading rate of 0.68 m3/m2·d. A Semi-empirical model for the bio-oxidation of organics in the ASFF process has been formulated and rate constants were calculated based on statistical analysis of pilot-plant data. The relationships obtained are very useful for analyzing the design and performance of the ASFF process and a variety of attached growth processes.

The comparison of trichloroethylene removal rates by methane- and aromatic-utilizing microorganisms

1998 ◽  
Vol 38 (7) ◽  
pp. 19-24 ◽  
Author(s):  
C.-J. Lu ◽  
C. M. Lee ◽  
M.-S. Chung
Keyword(s):  
Cell Concentration ◽  
Removal Rate ◽  
Carbon Sources ◽  
Batch Reactors ◽  
Initial Cell Concentration ◽  
Removal Rates ◽  
Initial Cell ◽  
Toluene Concentration ◽  
Cell Source ◽  
Removal Efficiencies

The comparison of TCE cometabolic removal by methane, toluene, and phenol utilizers was conducted with a series of batch reactors. Methane, toluene, or phenol enriched microorganisms were used as cell source. The initial cell concentration was about 107 cfu/mL. Methane, toluene, and phenol could be readily biodegraded resulting in the cometabolic removal of TCE. Among the three primary carbon sources studied, the presence of phenol provided the best cometabolic removal of TCE. When the concentration of carbon source was 3 mg-C/L, the initial TCE removal rates initiated by methane, toluene, and phenol utilizers were 1.5, 30, and 100 μg/L-hr, respectively. During the incubation period of 80 hours, TCE removal efficiencies were 26% and 96% with the presence of methane and toluene, respectively. However, it was 100% within 20 hours with the presence of phenol. For phenol utilizers, the initial TCE removal rates were about the same, when the phenol concentrations were 1.35, 2.7, and 4.5 mg/L. However, TCE removal was not proportional to the concentrations of phenol. TCE removal was hindered when the phenol concentration was higher than 4.5 mg/L because of the rapid depletion of dissolved oxygen. The presence of toluene also initiated cometabolic removal of TCE. The presence of toluene at 3 and 5 mg/L resulted in similar TCE removal. The initial TCE removal rate was about 95 μg/L-hr at toluene concentrations of 3 and 5 mg/L compared to 20 μg/L-hr at toluene concentration of 1 mg/L.

Relations between carbon removal rates, biofilm size and density of a novel anaerobic reactor: the inverse turbulent bed

2000 ◽  
Vol 41 (4-5) ◽  
pp. 253-260 ◽  
Author(s):  
P. Buffière ◽  
R. Moletta
Keyword(s):  
Removal Rate ◽  
Removal Rates ◽  
Carbon Removal ◽  
Biofilm Growth ◽  
Loading Rates ◽  
Biomass Activity ◽  
High Turbulence ◽  
The One ◽  
High Level ◽  
Very High

An anaerobic inverse turbulent bed, in which the biogas only ensures fluidisation of floating carrier particles, was investigated for carbon removal kinetics and for biofilm growth and detachment. The range of operation of the reactor was kept within 5 and 30 kgCOD· m−3· d−1, with Hydraulic Retention Times between 0.28 and 1 day. The carbon removal efficiency remained between 70 and 85%. Biofilm size were rather low (between 5 and 30 μm) while biofilm density reached very high values (over 80 kgVS· m−3). The biofilm size and density varied with increasing carbon removal rates with opposite trends; as biofilm size increases, its density decreases. On the one hand, biomass activity within the reactor was kept at a high level, (between 0.23 and 0.75 kgTOC· kgVS· d−1, i.e. between 0.6 and 1.85 kgCOD·kgVS · d−1).This result indicates that high turbulence and shear may favour growth of thin, dense and active biofilms. It is thus an interesting tool for biomass control. On the other hand, volatile solid detachment increases quasi linearly with carbon removal rate and the total amount of solid in the reactor levels off at high OLR. This means that detachment could be a limit of the process at higher organic loading rates.

EDM with USM Combination Process of Sintered NdFeB Permanent Magnet

2010 ◽  
Vol 44-47 ◽  
pp. 1066-1069
Author(s):  
Li Li ◽  
Li Ling Qi ◽  
Zong Wei Niu
Keyword(s):  
Permanent Magnet ◽  
Material Removal ◽  
Removal Rate ◽  
Surface Characteristics ◽  
Dielectric Fluid ◽  
Machined Surface ◽  
Combination Process ◽  
Electro Discharge Machining ◽  
Ndfeb Permanent Magnet ◽  
Machining Characteristics

This paper presents an experimental investigation of the machining characteristics of sintered NdFeB permanent magnet using a combination process of electro-discharge machining (EDM) with ultrasonic machining (USM). Concentration of abrasive in the dielectric fluid is changed to explore its effect on the material removal rate (MRR). MRR of EDM /USM, conventional EDM are compared, machined surface characteristics are also compared between them. It is concluded that the combination EDM/USM process can increase the MRR and decrease the thickness of the recast layer. In the combination process, an appropriate abrasive concentration can improve its machining efficiency.

scholarly journals Enhanced Wastewater Treatment by Immobilized Enzymes

2021 ◽  
Author(s):  
Jakub Zdarta ◽  
Katarzyna Jankowska ◽  
Karolina Bachosz ◽  
Oliwia Degórska ◽  
Karolina Kaźmierczak ◽  
...  
Keyword(s):  
Wastewater Treatment ◽  
Process Optimization ◽  
Organic Pollutants ◽  
Large Scale ◽  
Removal Rate ◽  
Immobilized Enzymes ◽  
Future Research ◽  
Process Conditions ◽  
Removal Rates ◽  
Catalytic Cycles

Abstract Purpose of Review In the presented review, we have summarized recent achievements on the use of immobilized oxidoreductases for biodegradation of hazardous organic pollutants including mainly dyes, pharmaceuticals, phenols, and bisphenols. In order to facilitate process optimization and achievement of high removal rates, effect of various process conditions on biodegradation has been highlighted and discussed. Recent Findings Current reports clearly show that immobilized oxidoreductases are capable of efficient conversion of organic pollutants, usually reaching over 90% of removal rate. Further, immobilized enzymes showed great recyclability potential, allowing their reuse in numerous of catalytic cycles. Summary Collected data clearly indicates immobilized oxidoreductases as an efficient biocatalytic tools for removal of hazardous phenolic compounds, making them a promising option for future water purification. Data shows, however, that both immobilization and biodegradation conditions affect conversion efficiency; therefore, process optimization is required to achieve high removal rates. Nevertheless, we have demonstrated future trends and highlighted several issues that have to be solved in the near-future research, to facilitate large-scale application of the immobilized oxidoreductases in wastewater treatment.

Lubricant Removal, Degradation, and Recovery on Particulate Magnetic Recording Media

1992 ◽  
Vol 114 (1) ◽  
pp. 61-67 ◽  
Author(s):  
V. J. Novotny ◽  
T. E. Karis ◽  
N. W. Johnson
Keyword(s):  
Bulk Viscosity ◽  
Magnetic Recording ◽  
Photoelectron Spectroscopy ◽  
Removal Rate ◽  
Lateral Diffusion ◽  
Recording Media ◽  
Magnetic Recording Media ◽  
Removal Rates ◽  
Linear Chains ◽  
Mechanical Durability

Lubrication of particulate magnetic recording media improves their mechanical durability in sliding and flying by several orders of magnitude compared with unlubricated media. Lubricant removal, degradation, and recovery were studied using microslit scanning Fourier transform infrared spectroscopy and microspot scanning X-ray photoelectron spectroscopy. These techniques measure the total and surface lubricant amounts in the porous film, respectively. Lubricant dynamics were compared for two physisorbed polyperfluoroalkylether lubricants of similar molecular weight but different molecular structure—Y with a CF3 side group and Z with linear chains. The bulk viscosity of Y was about ten times higher than the viscosity of Z. In sliding, the lubricant removal rate of Y was significantly higher than that of Z while in flying the removal rates were reversed. Removal rates in sliding were orders of magnitude higher than those in flying. Effective lateral diffusion coefficients estimated from the rate of lubricant reflow back to the depleted tracks were close to inversely proportional to the bulk viscosity. During sliding and flying both lubricants degraded as evidenced by chemically altered lubricant detected on the surfaces after dissolution of undegraded lubricant.

Optimization and surface modification in electrical discharge machining of AA 6061/SiCp composite using Cu–W electrode

2015 ◽  
Vol 231 (3) ◽  
pp. 332-348 ◽  
Author(s):  
Balbir Singh ◽  
Jatinder Kumar ◽  
Sudhir Kumar
Keyword(s):  
Process Parameters ◽  
Electrical Discharge Machining ◽  
Removal Rate ◽  
Surface Characteristics ◽  
Electrode Wear ◽  
Material Transfer ◽  
Machined Surface ◽  
Recast Layer Thickness ◽  
Pulse On Time ◽  
Pulse Off Time

This paper presents the experimental investigation on the electro-discharge machining of aluminum alloy 6061 reinforced with SiC particles using sintered Cu–W electrode. Experiments have been designed as per central composite rotatable design, using response surface methodology. Machining characteristics such as material removal rate (MRR), electrode wear ratio (EWR), and surface roughness (SR) have been investigated under the influence of four electrical process parameters; namely peak current, pulse on time, pulse off time, and gap voltage. The process parameters have been optimized to obtain optimal combination of MRR, EWR, and SR. Further, the influence of sintered Cu–W electrode on surface characteristics has been analyzed with scanning electron microscopy, energy dispersive spectroscopy, and Vicker microhardness tests. The results revealed that all the process parameters significantly affect MRR, EWR, and SR. The machined surface properties are modified as a result of material transfer from the electrode. The recast layer thickness is increased at higher setting of electrical parameters. The hardness across the machined surface is also increased by the use of sintered Cu–W electrode.

Sign in / Sign up

Export Citation Format

Share Document