Application of Additive Technologies for Manufactoring Non-Electronic Components of Microsystems
It is problematic to apply traditional microtechnologies for the manufacturing three-dimensional (3D) components of microsystems due to a number of inherent disadvantages. It is much more promising to use additive technologies for these purposes. In present paper various additive technologies used for manufacturing non-electronic components of microsystems as well as various non-electronic components manufactured using these technologies are considered. The peculiarities of the implementation of additive technologies in the manufacture of non-electronic microcomponents are discussed. More than 20 types of additive technologies characterized by different principles for the implementation of 3D printing processes are presented and their brief description is given. Most of these technologies allow manufacturing the components with micrometer feature sizes and some of them — with nanometer feature sizes. Microcomponents produced by additive technologies are intended for use in micromechanics, microoptics and microfluidics. Many examples of such microcomponents are given with indication of their typical feature sizes. Additive technologies make it possible to create both individual parts of microdevices and completely finished micro-devices. Microcomponents are mainly made from photopolymers and thermoplastics, as well as metals. Among additive technologies those that provide the multi-material 3D printing as well as the embedding of discrete components into printed microdevices are especially promising. It is expected that in near future additive technologies will be widely used in the production of various non-electronic components of microsystems.