Piezoelectric Response in WO3-x Thin Films by Aluminum Clustering
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Abstract We report piezoelectric response of d33 = 35 ± 5 pm V− 1 on aluminum doped tungsten trioxide thin films (Al-WO3 − x), prepared by RF-sputtering and post annealing treatment in air atmosphere. Using XPS characterization indicate a stoichiometry of WO2.7 and Raman a distorted octahedral tungsten vibration mode of monoclinic WO3 at 236.9 cm− 1, 691 cm− 1 and 803 cm− 1 corresponding to O-W-O chemical bonds. The grazing incidence X-ray diffraction revealed a non-centrosymmetric monoclinic (P21/c) and tetragonal (P4/nmm) mixed phases of WO3 − x with islands of piezoelectric domains as observed by atomic force microscope, additionally atom probe tomography revealed diffusion of aluminum ions from Al2O3 substrate.