scholarly journals An Experimental Study on Irradiated Interface of Silicon

2020 ◽  
pp. 72-79
Author(s):  
Min Raj Lamsal
Keyword(s):  
Mechanical Properties ◽  
Experimental Study ◽  
Surface Morphology ◽  
Energy Loss ◽  
Silicon Surface ◽  
Target Surface ◽  
Electronic Energy ◽  
Electron Volt ◽  
Atomic Force ◽  
Induced Stress

Atomic Force Microscopic (AFM) studies of Mega electron-volt (MeV) ions irradiated silicon surface morphology has been studied to a fluence of 5 x 108 ions/cm2. Interesting features of cracks of 50 nm in depth and 100 nm in width have been observed on the irradiated surface. The features seemed to have been caused by the irradiation-induced stress in the irradiated regions of the target surface. The observed feature of crack seems to be mainly due to the high electronic energy loss of the irradiated ions on the surface that induces the stress in it. It confirms that the coarseness of the microstructure of a material directly affect the mechanical properties.

scholarly journals Morphology and AFM Spectroscopy of Irradiated Interface of Silicon

2014 ◽  
Vol 14 (2) ◽  
pp. 155-160
Author(s):  
SK Lamichhane
Keyword(s):  
Mechanical Properties ◽  
Surface Morphology ◽  
Energy Loss ◽  
Target Surface ◽  
Electronic Energy ◽  
Detectable Level ◽  
Silicon Surfaces ◽  
Electron Volt ◽  
Atomic Force ◽  
Induced Stress

In covalent solids, more energetic irradiation sources are necessary to produce detectable level of damage. The atomic force microscopic (AFM) studies of mega electron-volt (MeV) ions irradiated silicon surfaces have been studied to a fluence of 5×108 ions cm-2 and surface morphology has been studied with AFM. Interesting features of cracks of ~ 50 nm in depth and ~ 100 nm in width have been observed on the irradiated surface. The features seemed to have been caused by the irradiation-induced stress in the irradiated regions of the target surface. The observed feature of cracks seems to be mainly due to the high electronic energy loss of the irradiated ions on the surface induces the stress in it. It confirms that the coarseness of the microstructure of a material directly affects the mechanical properties. DOI: http://dx.doi.org/10.3126/njst.v14i2.10430   Nepal Journal of Science and Technology Vol. 14, No. 2 (2013) 155-160

MICROCRACKS IN ~ 100 MeV Si7+-ION-IRRADIATED p-SILICON SURFACES

2004 ◽  
Vol 11 (03) ◽  
pp. 265-269
Author(s):  
O. P. SINHA ◽  
P. C. SRIVASTAVA ◽  
V. GANESAN
Keyword(s):  
Atomic Force Microscopy ◽  
Surface Morphology ◽  
Target Surface ◽  
Silicon Surfaces ◽  
Force Microscopy ◽  
Atomic Force ◽  
Induced Stress

The p-silicon surfaces have been irradiated with ~ 100 MeV Si 7+ions to a fluence of 2.2×1013 ions cm -2, and surface morphology has been studied with atomic force microscopy (AFM). Interesting features of cracks of ~ 47 nm in depth and ~ 103 nm in width on the irradiated surfaces have been observed. The observed features seemed to have been caused by the irradiation-induced stress in the irradiated regions of the target surface.

scholarly journals Особенности наноструктурирования поверхности кремния в результате ее сверхбыстрого нагрева фемтосекундным лазерным импульсом в воде

2018 ◽  
Vol 44 (14) ◽  
pp. 58
Author(s):  
С.А. Ромашевский
Keyword(s):  
Atomic Force Microscopy ◽  
Laser Pulse ◽  
Femtosecond Laser ◽  
Surface Morphology ◽  
Silicon Surface ◽  
Ablation Threshold ◽  
Water Environment ◽  
Force Microscopy ◽  
Atomic Force ◽  
Minimum Depth

AbstractSilicon surface morphology induced by a femtosecond laser pulse at near-threshold fluences in water environment is investigated by means of atomic-force microscopy (AFM). With increasing fluence, the silicon surface transforms into nanoscale ring-shaped and blister structures, as well as smooth and nanostructured microcraters with a minimum depth of 1 nm. The formation of starlike patterns imprinted at the surface of microcraters at fluences above the ablation threshold is observed.

Synthesis and Characterization of Amorphous Metallic Alloy Thin Films for MEMS Applications

2003 ◽  
Vol 806 ◽  
Author(s):  
Senthil N Sambandam ◽  
Shekhar Bhansali ◽  
Venkat R. Bhethanabotla
Keyword(s):  
Thin Films ◽  
Mechanical Properties ◽  
Surface Morphology ◽  
X Ray Diffraction ◽  
Micro Electro Mechanical Systems ◽  
Force Microscopy ◽  
Target Composition ◽  
Atomic Force ◽  
Deposition Parameters ◽  
Afm Analysis

ABSTRACTMicrostructures of multi-component amorphous metallic glass alloys are becoming increasingly important due to their excellent mechanical properties and low coefficient of friction. In this work, thin films of Zr-Ti-Cu-Ni-Be have been deposited by DC magnetron sputtering in view of exploring their potential technological applications in fields such as Micro Electro Mechanical Systems (MEMS). Their structure, composition, surface morphology, mechanical properties viz., hardness and Young's modulus were analyzed using X-Ray Diffraction (XRD), Atomic Force Microscopy (AFM), Scanning Electron Microscopy (SEM) and Nanoindentation. Influence of the deposition parameters of sputtering pressure and power upon the composition and surface morphology of these films has been evidenced by SEM, and AFM analysis, showing that such a process yields very smooth films with target composition at low sputtering pressures. These studies are useful in understanding the multicomponent sputtering process.

Mechanical Properties and Surface Morphology of Diamond-Like Carbon Films with SiNx Interlayer

2015 ◽  
Vol 723 ◽  
pp. 515-519
Author(s):  
Qing Yun Chen ◽  
Kai Min Shih ◽  
Man Yi Duan ◽  
Lie Lin Wang
Keyword(s):  
Mechanical Properties ◽  
Surface Morphology ◽  
Indentation Test ◽  
Deposition Process ◽  
Industrial Applications ◽  
Carbon Films ◽  
Diamond Like Carbon ◽  
Dc Magnetron Sputtering ◽  
Force Microscopy ◽  
Atomic Force

Diamond-like carbon (DLC) film has remarkable physical, mechanical, biomedical and tribological properties that make it attractive material for numerous industrial applications needs of advanced mechanical systems. In this study, deposition process of DLC films on Si (100) are performed by direct-current (DC) magnetron sputtering method. The effects of interlayer on the compositions, structures and mechanical properties of DLC films are studied. The scanning electron microscopy (SEM) and atomic force microscopy (AFM) studies reveal the creation of high uniform surface morphology and low roughness DLC films with SiNxinterlayer. For comparison, DLC films with different interlayers are also grown. The Raman spectra are analyzed in order to characterize the film compositions. Indentation test was performed to value the mechanical properties of DLC films. Raman, SEM, and AFM analyses are correlated with the mechanical properties of the DLC films.

Experimental Study on the Surface Cutting Mechanical Properties of Single Crystal Silicon in Micro-Nano Scale

2015 ◽  
Vol 1088 ◽  
pp. 779-782
Author(s):  
Xiao Jing Yang ◽  
Yong Li ◽  
Wei Xing Zhang
Keyword(s):  
Mechanical Properties ◽  
Single Crystal ◽  
Cutting Force ◽  
Silicon Surface ◽  
Single Crystal Silicon ◽  
Constant Load ◽  
Crystal Silicon ◽  
Force Microscopy ◽  
Atomic Force ◽  
The Impact

The experiment of cutting mechanical properties of single crystal silicon surface in the micro-nanoscale is researched using nanoindenter and atomic force microscopy. The result of the experiment shows that: in the constant load, the impact of different scratching velocity for single crystal silicon surface scratch groove width and chip accumulation volume are not big; but the cutting force and friction coefficient are not increases with the scratching velocity increases; when the scratching speed is certain, the size of load has a greater impact on the cutting mechanical properties of single crystal silicon surface, with the increase of the load, the cutting force increases, but the cutting force is not linearly growth.

scholarly journals Magnesium Coated Bioresorbable Phosphate Glass Fibres: Investigation of the Interface between Fibre and Polyester Matrices

2013 ◽  
Vol 2013 ◽  
pp. 1-10 ◽  
Author(s):  
Xiaoling Liu ◽  
David M. Grant ◽  
Andrew J. Parsons ◽  
Lee T. Harper ◽  
Chris D. Rudd ◽  
...  
Keyword(s):  
Mechanical Properties ◽  
Surface Morphology ◽  
Phosphate Glass ◽  
Aqueous Media ◽  
Fibre Surface ◽  
Xrd Analysis ◽  
Glass Fibres ◽  
Atomic Force ◽  
Glass Fibre Reinforced ◽  
Biodegradable Magnesium

Bioresorbable phosphate glass fibre reinforced polyester composites have been investigated as replacement for some traditional metallic orthopaedic implants, such as bone fracture fixation plates. However, composites tested revealed loss of the interfacial integrity after immersion within aqueous media which resulted in rapid loss of mechanical properties. Physical modification of fibres to change fibre surface morphology has been shown to be an effective method to improve fibre and matrix adhesion in composites. In this study, biodegradable magnesium which would gradually degrade to Mg2+in the human body was deposited via magnetron sputtering onto bioresorbable phosphate glass fibres to obtain roughened fibre surfaces. Fibre surface morphology after coating was observed using scanning electron microscope (SEM). The roughness profile and crystalline texture of the coatings were determined via atomic force microscope (AFM) and X-ray diffraction (XRD) analysis, respectively. The roughness of the coatings was seen to increase from40±1 nm to80±1 nm. The mechanical properties (tensile strength and modulus) of fibre with coatings decreased with increased magnesium coating thickness.

Reactive Ion Etching Parameter Effect on Aluminum Bond Pad Surface Morphology

2014 ◽  
Vol 925 ◽  
pp. 140-143
Author(s):  
Moganraj Palianysamy ◽  
Zaliman Sauli ◽  
Uda Hashim ◽  
Vithyacharan Retnasamy ◽  
Steven Taniselass ◽  
...  
Keyword(s):  
Experimental Study ◽  
Surface Roughness ◽  
Surface Morphology ◽  
Gas Flow ◽  
Reactive Ion Etching ◽  
Important Process ◽  
Ion Etching ◽  
Argon Gas ◽  
Atomic Force ◽  
Surface Morphologies

Reactive Ion Etching (RIE) is an important process in fabrication of semiconductor devices. Design Of Experiment (DOE) has been used to study the effect of Reactive Ion Etch (RIE) towards surface morphology of aluminum bond pad. Important RIE factors involved in this experimental study are ratio of Tetrafluoromethane (CF4), Argon gas flow, BIAS, and ICP power. Different combinations of these factors produces different results of surface morphologies which was obtained using Atomic Force Microscopic (AFM). Produced results shows that overall surface roughness of the pad is affected by RIE and DOE offers a better way to optimize the desired outcome.

Reactive Ion Etching Parameter Effect on Aluminum Bond Pad Surface Morphology

2014 ◽  
Vol 925 ◽  
pp. 84-87
Author(s):  
Moganraj Palianysamy ◽  
Zaliman Sauli ◽  
Uda Hashim ◽  
Vithyacharan Retnasamy ◽  
Steven Taniselass ◽  
...  
Keyword(s):  
Experimental Study ◽  
Surface Roughness ◽  
Surface Morphology ◽  
Gas Flow ◽  
Reactive Ion Etching ◽  
Important Process ◽  
Ion Etching ◽  
Argon Gas ◽  
Atomic Force ◽  
Surface Morphologies

Reactive Ion Etching (RIE) is an important process in fabrication of semiconductor devices. Design Of Experiment (DOE) has been used to study the effect of Reactive Ion Etch (RIE) towards surface morphology of aluminum bond pad. Important RIE factors involved in this experimental study are ratio of Tetrafluoromethane (CF4), Argon gas flow, BIAS, and ICP power. Different combinations of these factors produces different results of surface morphologies which was obtained using Atomic Force Microscopic (AFM). Produced results shows that overall surface roughness of the pad is affected by RIE and DOE offers a better way to optimize the desired outcome.

Sign in / Sign up

Export Citation Format

Share Document