Grains Observation Using FIB Anisotropic Etch Followed by AFM Imaging

ISTFA 1996: Conference Proceedings from the 22nd International Symposium for Testing and Failure Analysis ◽

10.31399/asm.cp.istfa1996p0089 ◽

1996 ◽

Author(s):

H. Yamashita ◽

Y. Hata

Keyword(s):

Thin Film ◽

Atomic Force Microscope ◽

Conventional Technique ◽

Wet Etching ◽

Atomic Scale ◽

Atomic Force ◽

Afm Imaging ◽

Al Thin Film ◽

Anisotropic Etch ◽

Afm Observation

Abstract It is becoming more important to observe structures and failed sites in LSIs. An atomic force microscope (AFM) can obtain atomic scale topographic images on sample surfaces. To analyze failures in LSIs, several treatments for the AFM observation, such as wet etching and mechanical polishing for a crosssectional imaging, have been proposed so far. A good correlation of AFM images using FIB anisotropic etch with those acquired by conventional technique such as SIM and TEM has been demonstrated A crystallographic information about Al thin film is obtained by AFM using this technique.

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Anin situatomic force microscope for normal-incidence nanofocus X-ray experiments

Journal of Synchrotron Radiation ◽

10.1107/s1600577516011437 ◽

2016 ◽

Vol 23 (5) ◽

pp. 1110-1117 ◽

Cited By ~ 3

Author(s):

M. V. Vitorino ◽

Y. Fuchs ◽

T. Dane ◽

M. S. Rodrigues ◽

M. Rosenthal ◽

...

Keyword(s):

Thin Film ◽

Atomic Force Microscope ◽

High Speed ◽

Normal Incidence ◽

Organic Thin Film ◽

X Ray ◽

Atomic Force ◽

Synchrotron Beamlines

A compact high-speed X-ray atomic force microscope has been developed forin situuse in normal-incidence X-ray experiments on synchrotron beamlines, allowing for simultaneous characterization of samples in direct space with nanometric lateral resolution while employing nanofocused X-ray beams. In the present work the instrument is used to observe radiation damage effects produced by an intense X-ray nanobeam on a semiconducting organic thin film. The formation of micrometric holes induced by the beam occurring on a timescale of seconds is characterized.

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A Finite-Impulse-Response-Based Approach to Control Acoustic-Caused Probe-Vibration in Atomic Force Microscope Imaging

Volume 2: Mechatronics; Estimation and Identification; Uncertain Systems and Robustness; Path Planning and Motion Control; Tracking Control Systems; Multi-Agent and Networked Systems; Manufacturing; Intelligent Transportation and Vehicles; Sensors and Actuators; Diagnostics and Detection; Unmanned, Ground and Surface Robotics; Motion and Vibration Control Applications ◽

10.1115/dscc2017-5103 ◽

2017 ◽

Cited By ~ 1

Author(s):

Sicheng Yi ◽

Qingze Zou

Keyword(s):

Atomic Force Microscope ◽

Impulse Response ◽

Controller Design ◽

Finite Impulse Response ◽

Feedforward Control ◽

Acoustic Noise ◽

Noise Cancellation ◽

Control Approach ◽

Atomic Force ◽

Afm Imaging

In this paper, we propose a finite-impulse-response (FIR)-based feedforward control approach to mitigate the acoustic-caused probe vibration during atomic force microscope (AFM) imaging. Compensation for the extraneous probe vibration is needed to avoid the adverse effects of environmental disturbances such as acoustic noise on AFM imaging, nanomechanical characterization, and nanomanipulation. Particularly, residual noise still exists even though conventional passive noise cancellation apparatus has been employed. The proposed technique exploits a data-driven approach to capture both the noise propagation dynamics and the noise cancellation dynamics in the controller design, and is illustrated through the experimental implementation in AFM imaging application.

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Abnormal switching of ferroelectric domains created by the tip of an atomic force microscope in a congruent LiTaO3 single-crystal thin film

Journal of Applied Physics ◽

10.1063/1.3607302 ◽

2011 ◽

Vol 110 (2) ◽

pp. 024102 ◽

Cited By ~ 9

Author(s):

Antoine Brugère, ◽

Serge Gidon, ◽

Brice Gautier

Keyword(s):

Thin Film ◽

Single Crystal ◽

Atomic Force Microscope ◽

Atomic Force ◽

Ferroelectric Domains

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Modelling atomic scale manipulation with the non-contact atomic force microscope

Nanotechnology ◽

10.1088/0957-4484/17/23/026 ◽

2006 ◽

Vol 17 (23) ◽

pp. 5866-5874 ◽

Cited By ~ 25

Author(s):

T Trevethan ◽

M Watkins ◽

L N Kantorovich ◽

A L Shluger ◽

J Polesel-Maris ◽

...

Keyword(s):

Atomic Force Microscope ◽

Atomic Scale ◽

Atomic Force

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The Nanostructure Fabrication on Conductive Diamond-like Carbon Thin Film by Nano-Oxidation Technique

Advanced Materials Research ◽

10.4028/www.scientific.net/amr.939.671 ◽

2014 ◽

Vol 939 ◽

pp. 671-678

Author(s):

Jen Ching Huang ◽

Ho Chang ◽

Hui Ti Ling

Keyword(s):

Thin Film ◽

Atomic Force Microscope ◽

Applied Voltage ◽

Processing Parameters ◽

Atmospheric Environment ◽

High Wear Resistance ◽

Mold Material ◽

Diamond Like Carbon ◽

Atomic Force ◽

Carbon Thin Film

This paper mainly focuses in the use of an atomic force microscope, research about the nanooxidation technique of conductive diamond-like carbon thin film in the atmospheric environment. The hardness, high wear resistance and chemical stability of diamond-like carbon thin film is high, and coefficient of friction is low, it is very suitable as a mold material for nanoscale mold. However, tool can only use a diamond cutter to machine the high hardness diamond-like carbon by traditional hard machining method, and tool life is not long. To overcome this drawback, the paper proposed an atomic force microscope (AFM) as a platform, a conductive AFM probe for tool under atmospheric conditions, and imposed nanooxidation technique on conductive diamond-like carbon thin film using electroluminescent etching to carry out nanofabrication processing. During the nanofabrication process, by changing the various processing parameters, such as applied voltage, repeated nanooxidation times and probe speed, etc., in order to understand the effect of processing parameters. The experimental results show, the nanooxidation technique can be carried out nanofabrication on conductive diamond-like carbon thin film successfully. And found that applied voltage, repeated nanooxidation times and probe speed all for the groove depth on the conductive diamond-like carbon thin films have significant influence. Additionally, this study successfully created a nanopattern. Therefore, the adequate machinability of DLC coating was achieved successfully in this study, indicating a promising application in the fabrication of nanopatterns on a nanoscale.

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Atomic force microscope analysis of photodecomposition of pentacene film on the epitaxial thin film photocatalyst library

Measurement Science and Technology ◽

10.1088/0957-0233/16/1/026 ◽

2004 ◽

Vol 16 (1) ◽

pp. 199-202 ◽

Cited By ~ 10

Author(s):

Y Matsumoto ◽

T Ohsawa ◽

K Nakajima ◽

H Koinuma

Keyword(s):

Thin Film ◽

Atomic Force Microscope ◽

Epitaxial Thin Film ◽

Microscope Analysis ◽

Atomic Force ◽

Atomic Force Microscope Analysis

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Nanostructures Fabrication on Ta Thin Film Using Atomic Force Microscope Lithography

Molecular Crystals and Liquid Crystals ◽

10.1080/15421400500369484 ◽

2006 ◽

Vol 445 (1) ◽

pp. 115/[405]-118/[408]

Author(s):

Sunwoo Lee ◽

Haiwon Lee ◽

Do Haing Lee ◽

Byung-Jae Park ◽

Geun Young Yeom

Keyword(s):

Thin Film ◽

Atomic Force Microscope ◽

Atomic Force

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Theoretical Approach to Contrast Mechanism for U-AFM

Nondestructive Engineering: Applications ◽

10.1115/pvp2002-1636 ◽

2002 ◽

Author(s):

C. Miyasaka ◽

B. R. Tittmann ◽

T. Adachi ◽

A. Yamaji

Keyword(s):

Theoretical Analysis ◽

Resonant Frequency ◽

Atomic Force Microscope ◽

Dynamic Theory ◽

Beam Theory ◽

Ultrasonic Waves ◽

Two Dimensional ◽

Atomic Force ◽

Afm Imaging ◽

Contrast Mechanism

When the Ultrasonic-Atomic Force Microscope (U-AFM) is used to form an image of a surface of a specimen having discontinuities, contrast of the specimen in the image is usually stronger than that of an image formed by a conventional Atomic Force Microscope (AFM). In this article, the mechanism of the contrast of the image obtained by the U-AFM was explained by theoretical analysis. A ceramic and metal jointed bar (Steel/Cu/Si3N4) was selected as a specimen for this study. The specimen was located on the surface of a disc transducer generating ultrasonic waves up to 500 KHz, and was vibrated, wherein its first resonant frequency was 133.43 kHz. Both stress and displacement of the specimen were analyzed by classical beam theory and the two-dimensional elasto-dynamic theory. Experimental U-AFM imaging analyses were also carried out to compare the results.

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A Correlative Defect Analyzer Combining Glide Test with Atomic Force Microscope

Advances in Tribology ◽

10.1155/2013/657363 ◽

2013 ◽

Vol 2013 ◽

pp. 1-8 ◽

Cited By ~ 1

Author(s):

Jizhong He

Keyword(s):

High Resolution ◽

Atomic Force Microscope ◽

Optical Imaging ◽

Hard Disk Drive ◽

Disk Drive ◽

Atomic Force ◽

Typical Data ◽

Afm Imaging ◽

Afm Analysis

We have developed a novel instrument combining a glide tester with an Atomic Force Microscope (AFM) for hard disk drive (HDD) media defect test and analysis. The sample stays on the same test spindle during both glide test and AFM imaging without losing the relevant coordinates. This enables an in situ evaluation with the high-resolution AFM of the defects detected by the glide test. The ability for the immediate follow-on AFM analysis solves the problem of relocating the defects quickly and accurately in the current workflow. The tool is furnished with other functions such as scribing, optical imaging, and head burnishing. Typical data generated from the tool are shown at the end of the paper. It is further demonstrated that novel experiments can be carried out on the platform by taking advantage of the correlative capabilities of the tool.

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