Root Cause Finding of a Diode Leakage Failure Using Scanning Magnetic Microscopy and ToF-SIMS as Key Methods

2006 ◽  
Author(s):  
H. Preu ◽  
W. Mack ◽  
T. Kilger ◽  
B. Seidl ◽  
J. Walter ◽  
...  
Keyword(s):  
Failure Analysis ◽  
Quantum Interference ◽  
Leakage Currents ◽  
Root Cause ◽  
Microelectronic Devices ◽  
Successful Approach ◽  
Magnetic Microscopy ◽  
Leakage Failure ◽  
Root Cause Identification

Abstract One challenge in failure analysis of microelectronic devices is the localization and root cause finding of leakage currents in passives. In this case study we present a successful approach for failure analysis of a diode leakage failure. An analytical flow will be introduced, which contains standard techniques as well as SQUID (superconducting quantum interference device) scanning magnetic microscopy and ToFSIMS as key methods for localization and root cause identification. [1]

Advanced Scan Chain Failure Analysis Using Laser Modulation Mapping and Continuous Wave Probing

2011 ◽  
Author(s):  
Steven Kasapi ◽  
William Lo ◽  
Joy Liao ◽  
Bruce Cory ◽  
Howard Marks
Keyword(s):  
Failure Analysis ◽  
Continuous Wave ◽  
Wafer Level ◽  
Root Cause ◽  
Non Invasive ◽  
Laser Probing ◽  
Volume Yield ◽  
Scan Chain ◽  
Leakage Failure ◽  
Root Cause Identification

Abstract A variety of EFA techniques have been deployed to improve scan chain failure isolation. In contrast to other laser techniques, modulation mapping (MM) does not require electrically perturbing of the device. Beginning with a review of MM and continuous-wave (CW) probing as well as shift debug using MM, this paper presents three case studies involving scan chains with subtle resistive and leakage failure mechanisms, including transition, bridge, and slow-to-rise/fall failures, using a combination of these techniques. Combining modulation mapping with laser probing has proven to be a very effective and efficient methodology for isolating shift defects, even challenging timing-related shift defects. So far, every device submitted for physical failure analysis using this workflow has led to successful root cause identification. The techniques are sufficiently non-invasive and straightforward that they can be successfully applied at wafer level for volume, yield-oriented EFA.

A Case Study of Failure Analysis and Root Cause Identification on ESD-Induced Breakdown

2016 ◽  
Author(s):  
Hongmin Liu ◽  
Zhe Li ◽  
Zheng Weng
Keyword(s):  
Failure Analysis ◽  
Short Circuit ◽  
Resistance Change ◽  
Root Cause ◽  
Parametric Testing ◽  
Root Cause Identification ◽  
Failure Location ◽  
Static Discharge ◽  
Field Failure

Abstract This paper describes the detailed process of failure analysis (FA) of a 16-bit transceiver. The FA included six steps: electronic parametric testing, visual inspection, optical beam induced resistance change to isolate failure location, SEM inspection of the breakdown, electro static discharge (ESD) root identification, and ESD test to prove the identification. FA showed that the short circuit was the result of a breakdown between the I/O resistor and the substrate, and the cause of the breakdown was most likely an ESD event. In a series of electrical over stress/ESD tests performed, the field failure signature was replicated with a MM ESD model, thereby identifying the root cause of the ESD failure.

Case Study of ESD-induced Pin Leakage Failure Solved Using Novel Powered TIVA Technique

2018 ◽  
Author(s):  
Sneta Mishra ◽  
Daniel R. Bockelman
Keyword(s):  
Root Cause ◽  
Leakage Failure

Abstract A case study is presented of a core CPU product where FA/FI debug is performed for an ESD-related pin leakage issue on an IO family to root cause and qualify the product. A Powered TIVA technique is used to localize the damage to the termination resistor circuitry of the affected IO block when the pin is tristated using a device tester. Failure characterization shows a gate to drain short on the transistor, with nanoprobing confirming a solid short on gate to drain and TEM finding a short at the location indicated by the TIVA hits.

Advanced IR-OBIRCH Analysis Technique for High Isb Failure Analysis

2010 ◽  
Author(s):  
Kuo Hsiung Chen ◽  
Wen Sheng Wu ◽  
Yu Hsiang Shu ◽  
Jian Chan Lin
Keyword(s):  
Failure Analysis ◽  
Failure Mechanisms ◽  
Fault Localization ◽  
Resistance Change ◽  
The Real ◽  
Analysis Techniques ◽  
Analysis Technique ◽  
Leakage Failure ◽  
Failure Site

Abstract IR-OBIRCH (Infrared Ray – Optical Beam Induced Resistance Change) is one of the main failure analysis techniques [1] [2] [3] [4]. It is a useful tool to do fault localization on leakage failure cases such as poor Via or contact connection, FEoL or BEoL pattern bridge, and etc. But the real failure sites associated with the above failure mechanisms are not always found at the OBIRCH spot locations. Sometimes the real failure site is far away from the OBIRCH spot and it will result in inconclusive PFA Analysis. Finding the real failure site is what matters the most for fault localization detection. In this paper, we will introduce one case using deep sub-micron process generation which suffers serious high Isb current at wafer donut region. In this case study a BEoL Via poor connection is found far away from the OBIRCH spots. This implies that layout tracing skill and relation investigation among OBIRCH spots are needed for successful failure analysis.

Case Study—Failure Analysis of a Multiplexer

2016 ◽  
Author(s):  
Michael Woo ◽  
Marcos Campos ◽  
Luigi Aranda
Keyword(s):  
Failure Analysis ◽  
High Reliability ◽  
Component Failure ◽  
Root Cause ◽  
Knowing That ◽  
Cause Of Failure ◽  
The Cost

Abstract A component failure has the potential to significantly impact the cost, manufacturing schedule, and/or the perceived reliability of a system, especially if the root cause of the failure is not known. A failure analysis is often key to mitigating the effects of a componentlevel failure to a customer or a system; minimizing schedule slips, minimizing related accrued costs to the customer, and allowing for the completion of the system with confidence that the reliability of the product had not been compromised. This case study will show how a detailed and systemic failure analysis was able to determine the exact cause of failure of a multiplexer in a high-reliability system, which allowed the manufacturer to confidently proceed with production knowing that the failure was not a systemic issue, but rather that it was a random “one time” event.

Root Cause Analysis for Pin Leakage

2016 ◽  
Author(s):  
Zhigang Song ◽  
Jochonia Nxumalo ◽  
Manuel Villalobos ◽  
Sweta Pendyala
Keyword(s):  
Failure Analysis ◽  
Root Cause Analysis ◽  
Advanced Technology ◽  
Process Step ◽  
Cause Analysis ◽  
Hard Mask ◽  
Technology Node ◽  
Root Cause ◽  
Tools And Techniques

Abstract Pin leakage continues to be on the list of top yield detractors for microelectronics devices. It is simply manifested as elevated current with one pin or several pins during pin continuity test. Although many techniques are capable to globally localize the fault of pin leakage, root cause analysis and identification for it are still very challenging with today’s advanced failure analysis tools and techniques. It is because pin leakage can be caused by any type of defect, at any layer in the device and at any process step. This paper presents a case study to demonstrate how to combine multiple techniques to accurately identify the root cause of a pin leakage issue for a device manufactured using advanced technology node. The root cause was identified as under-etch issue during P+ implantation hard mask opening for ESD protection diode, causing P+ implantation missing, which was responsible for the nearly ohmic type pin leakage.

Advancement in Data Engineering and Feature Processing Workflow by Using Deep Learning Techniques for the Automation of ESP Failure Root Cause Analyses

2021 ◽  
Author(s):  
Saniya Karnik ◽  
Navya Yenuganti ◽  
Bonang Firmansyah Jusri ◽  
Supriya Gupta ◽  
Prasanna Nirgudkar ◽  
...  
Keyword(s):  
Deep Learning ◽  
Failure Analysis ◽  
Language Processing ◽  
Turnaround Time ◽  
Process Efficiency ◽  
Root Cause ◽  
Feature Processing ◽  
Learning Techniques ◽  
Electrical Submersible Pump ◽  
Root Cause Identification

Abstract Today, Electrical Submersible Pump (ESP) failure analysis is a tedious, human-intensive, and time-consuming activity involving dismantle, inspection, and failure analysis (DIFA) for each failure. This paper presents a novel artificial intelligence workflow using an ensemble of machine learning (ML) algorithms coupled with natural language processing (NLP) and deep learning (DL). The algorithms outlined in this paper bring together structured and unstructured data across equipment, production, operations, and failure reports to automate root cause identification and analysis post breakdown. This process will result in reduced turnaround time (TAT) and human effort thus drastically improving process efficiency.

Subsea Gas Well Late Life Restart Lesson Learned: Failure Analysis and Operating Strategy

2021 ◽  
Author(s):  
Song Wang ◽  
Lawrence Khin Leong Lau ◽  
Wu Jun Tong ◽  
Kun An ◽  
Jiang Nan Duan ◽  
...  
Keyword(s):  
Failure Analysis ◽  
Late Life ◽  
Flow Assurance ◽  
Gas Well ◽  
Subsea Pipeline ◽  
Operating Strategy ◽  
Root Cause ◽  
Financial Impacts ◽  
Transient Multiphase Flow

Abstract This paper elucidates the importance of flow assurance transient multiphase modelling to ensure uninterrupted late life productions. This is discussed in details through the case study of shut-in and restart scenarios of a subsea gas well (namely Well A) located in South China Sea region. There were two wells (Well A and Well B) producing steadily prior to asset shut-in, as a requirement for subsea pipeline maintenance works. However, it was found that Well A failed to restart while Well B successfully resumed production after the pipeline maintenance works. Flow assurance team is called in order to understand the root cause of the failed re-start of Well A to avoid similar failure for Well B and other wells in this region. Through failure analysis of Well A, key root cause is identified and associated operating strategy is proposed for use for Well B, which is producing through the same subsea infrastructure. Transient multiphase flow assurance model including subsea Well A, subsea Well B, associated spools, subsea pipeline and subsea riser is developed and fully benchmarked against field data to ensure realistic thermohydraulics representations of the actual asset. Simulation result shows failed restart of Well A and successful restart of Well B, which fully matched with field observations. Further analysis reveals that liquid column accumulated within the wellbore of Well A associates with extra hydrostatic head which caused failed well restart. Through a series of sensitivity analysis, the possibility of successful Well A restart is investigated by manipulating topsides back pressure settings and production flowrates prior to shut-in. These serve as a methodology to systematically analyze such transient scenario and to provide basis for field operating strategy. The analysis and strategy proposed through detailed modelling and simulation serves as valuable guidance for Well B, should shut-in and restart operation is required. This study shows the importance of modelling prior to late life field operations, in order to avoid similar failed well restart, which causes significant production and financial impacts.

Tri-Directional TEM Failure Analysis on Sample Prepared by In-Situ Lift-Out FIB and Flipstage

2014 ◽  
Author(s):  
Jie Zhu ◽  
An Yan Du ◽  
Bing Hai Liu ◽  
Eddie Er ◽  
Si Ping Zhao ◽  
...  
Keyword(s):  
Sample Preparation ◽  
Failure Analysis ◽  
Cross Section ◽  
Root Cause Analysis ◽  
Wafer Surface ◽  
Tem Analysis ◽  
Cause Analysis ◽  
Root Cause

Abstract In this paper, we report an advanced sample preparation methodology using in-situ lift-out FIB and Flipstage for tridirectional TEM failure analysis. A planar-view and two cross-section TEM samples were prepared from the same target. Firstly, a planar-view lamellar parallel to the wafer surface was prepared using in-situ lift-out FIB milling. Upon TEM analysis, the planar sample was further milled in the along-gate and cross-gate directions separately. Eventually, a pillar-like sample containing a single transistor gate was obtained. Using this technique, we are able to analyze the defect from three perpendicular directions and obtain more information on the defect for failure root-cause analysis. A MOSFETs case study is described to demonstrate the procedure and advantages of this technique.

Understanding the Cu Void Formation by TEM Failure Analysis

2014 ◽  
Author(s):  
Binghai Liu ◽  
Jie Zhu ◽  
Changqing Chen ◽  
Eddie Er ◽  
Siping Zhao ◽  
...  
Keyword(s):  
Electron Diffraction ◽  
Failure Analysis ◽  
Seed Layer ◽  
Void Formation ◽  
Surface Oxidation ◽  
Alkaline Condition ◽  
Electron Diffraction Analysis ◽  
Root Cause ◽  
Cu Cmp

Abstract In this work, we present TEM failure analysis of two typical failure cases related to metal voiding in Cu BEOL processes. To understand the root cause behind the Cu void formation, we performed detailed TEM failure analysis for the phase and microstructure characterization by various TEM techniques such as EDX, EELS mapping and electron diffraction analysis. In the failure case study I, the Cu void formation was found to be due to the oxidation of the Cu seed layer which led to the incomplete Cu plating and thus voiding at the via bottom. While in failure case study II, the voiding at Cu metal surface was related to Cu CMP process drift and surface oxidation of Cu metal at alkaline condition during the final CMP process.

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