Design of a New XY Flexure Micropositioning Stage With a Large Hollow Platform
Keyword(s):
This paper presents the design of a new flexure-based xy micropositioning stage with a large hollow platform, which is suitable for practical use with a microscope. The designed mechanism has a parallel-kinematic structure and is actuated by two voice coil motors. By employing multistage compound parallelogram flexures, the stage is designed as a four-layer structure, which produces a motion output platform with a large hollow space and large range of motion. Analytical modeling was carried out for parametric design of the stage. Evaluation results show that the designed xy stage exhibits a large safety factor and high natural frequency. Moreover, the large hollow platform is well-suited for practical applications with a microscope.
Keyword(s):
Keyword(s):
2020 ◽
2014 ◽
Vol 538
◽
pp. 79-82
Keyword(s):
2014 ◽
Vol 24
(2)
◽
pp. 233-239
◽
Keyword(s):
Modelling and Simulation of Machine Tool Prototype with 6DOF Parallel Mechanism in Matlab / Simulink
2019 ◽
Vol 254
◽
pp. 03002
◽
Keyword(s):