Flow-Through Self-Standing Porous Silicon Sensor
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Lift Off
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A self-standing porous silicon (PS) multilayer structure detached from the substrate by the lift-off method and integrated with a microfluidic cell is presented. Experiments of refractive index changes sensing flow through open-ended pores are reported. We continuously recorded the reflectance spectra of the PS membrane each 30 s and measured the shift as different substances flowed through the structure. The experimental sensitivity values are in good agreement with the theoretical simulations performed.
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1985 ◽
Vol 17
(8)
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pp. 1475-1478
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1992 ◽
Vol 114
(1)
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pp. 14-30
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2011 ◽
Vol 25
(07)
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pp. 497-507
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