scholarly journals Novel Miniature and Selective Combustion-Type CMOS Gas Sensor for Gas-Mixture Analysis—Part 1: Emphasis on Chemical Aspects

Micromachines ◽  
2020 ◽  
Vol 11 (4) ◽  
pp. 345 ◽  
Author(s):  
Dima Shlenkevitch ◽  
Sara Stolyarova ◽  
Tanya Blank ◽  
Igor Brouk ◽  
Yael Nemirovsky
Keyword(s):  
Gas Sensor ◽  
Gas Sensors ◽  
Low Cost ◽  
Gas Mixture ◽  
Catalytic Layer ◽  
Pt Nanoparticle ◽  
Wafer Level ◽  
Sensing Element ◽  
Deposition Techniques ◽  
Nanoparticle Catalyst

There is an ongoing effort to fabricate miniature, low cost, sensitive, and selective gas sensors for domestic and industrial uses. This paper presents a miniature combustion-type gas sensor (GMOS) based on a thermal sensor, where a micromachined CMOS–SOI transistor integrated with a catalytic reaction plate acts as a sensing element. This study emphasizes GMOS performance modeling, technological aspects, and sensing-selectivity issues. Two deposition techniques of a Pt catalytic layer suitable for wafer-level processing were compared, magnetron sputtering and nanoparticle inkjet printing. Both techniques have been useful for the fabrication of GMOS sensor, with good sensitivity to ethanol and acetone in the air. However, a printed Pt nanoparticle catalyst provides almost twice as much sensitivity as compared to that of the sputtered catalyst. Moreover, sensing selectivity in the ethanol/acetone gas mixture was demonstrated for the GMOS with a Pt nanoparticle catalyst. These advantages of GMOS allow for the fabrication of a low-cost gas sensor that requires a low power, and make it a promising technology for future smartphones, wearables, and Internet of Things (IoT) applications.

scholarly journals Reducing Food Waste with a Tiny CMOS-MEMS Gas Sensor, Dubbed GMOS

2020 ◽  
Vol 2 (1) ◽  
pp. 36
Author(s):  
Dima Shlenkevitch ◽  
Sara Stolyarova ◽  
Tanya Blank ◽  
Igor Brouk ◽  
Yossi Levi ◽  
...  
Keyword(s):  
Gas Sensor ◽  
Low Cost ◽  
Catalytic Layer ◽  
Sensing Element ◽  
Detection Systems ◽  
Current Voltage ◽  
Mems Technology ◽  
Cmos Mems ◽  
Sensor Temperature ◽  
Different Gases

We present a tiny combustion-type gas sensor (named GMOS) fabricated using standard CMOS-SOI-MEMS technology. It is a low-cost thermal sensor with an embedded heater, catalytic layer and suspended transistor as a sensing element. The sensor principle relies on the combustion reaction of the gas that takes place on the catalytic layer. The exothermic combustion leads to a sensor temperature increase, which modifies the transistor current-voltage characteristics. The GMOS is useful for detecting different gases, such as ethanol, acetone and especially ethylene, as well as their mixtures. The sensor demonstrates an excellent sensitivity to ethylene of 40 mV/ppm and selective ethylene detection using nanoparticle catalytic layers of Pt, as well as TiO2. Along with its low energy consumption, GMOS is a promising technology for low-cost ethylene detection systems at different stages in the food supply chain, and it may help reduce global fruit and vegetable loss and waste.

scholarly journals A Novel Miniature and Selective CMOS Gas Sensor for Gas Mixture Analysis—Part 2: Emphasis on Physical Aspects

Micromachines ◽  
2020 ◽  
Vol 11 (6) ◽  
pp. 587
Author(s):  
Moshe Avraham ◽  
Sara Stolyarova ◽  
Tanya Blank ◽  
Sharon Bar-Lev ◽  
Gady Golan ◽  
...  
Keyword(s):  
Thermal Conductivity ◽  
Gas Sensor ◽  
Catalytic Reaction ◽  
Analytical Models ◽  
Gas Mixture ◽  
Thermal Sensor ◽  
Catalytic Layer ◽  
Sensing Element ◽  
Hot Plate ◽  
Good Agreement

This is a second part of the paper presenting a miniature, combustion-type gas sensor (dubbed GMOS) based on a novel thermal sensor (dubbed TMOS). The TMOS is a micromachined CMOS-SOI transistor, which acts as the sensing element and is integrated with a catalytic reaction plate, where ignition of the gas takes place. Part 1 focused on the chemical and technological aspects of the sensor. In part 2, the emphasis is on the physical aspects of the reaction micro-hot plate on which the catalytic layer is deposited. The three main challenges in designing the hot plate are addressed: (i) How to design a hot plate operating in air, with a low thermal conductivity; (ii) how to measure the temperature of the hot plate during operation; (iii) how to reduce the total consumed power during operation. Reported simulated as well as analytical models and measured results are in good agreement.

A logarithmic multi-parameter model using gas sensor main and cross sensitivities to estimate gas concentrations in a gas mixture for SnO2 gas sensors

2007 ◽  
Vol 123 (2) ◽  
pp. 1064-1070 ◽  
Author(s):  
A. Chaiyboun ◽  
R. Traute ◽  
T. Haas ◽  
O. Kiesewetter ◽  
T. Doll
Keyword(s):  
Gas Sensor ◽  
Gas Sensors ◽  
Gas Mixture

Obtaining Highly Selective Responses from a Bulk Tin Oxide Gas Sensor

2013 ◽  
Vol 543 ◽  
pp. 239-242 ◽  
Author(s):  
Faramarz Hossein-Babaei ◽  
Amir Amini
Keyword(s):  
Gas Sensor ◽  
Gas Sensors ◽  
Tin Oxide ◽  
Low Cost ◽  
High Sensitivity ◽  
Thermal Capacity ◽  
Temperature Modulation ◽  
Custom Made ◽  
Metal Oxide Gas Sensors ◽  
Voltage Spike

Generic gas sensors are commonly used for the detection of different airborne contaminants due to their high sensitivity, long life and low cost, but they generally suffer from the variety of drifts and the lack of selectivity. Different techniques have been developed for selectivity enhancement in metal oxide gas sensors, among which operating temperature modulation is well known. It has been observed that sharp pallet temperature changes provide more analyte-related information. Due to the high thermal capacitance of the device, applying step voltage pulses to a bulk tin oxide gas sensor fails to provide step pallet temperature variations. On the other hand, the low thermal capacity of the custom made microheater gas sensors renders them vulnerable to all kinds of thermal noise and agitations. A novel technique is reported for temperature modulation, which facilitates sharp temperature rises of the gas sensitive pallets in generic gas sensors [. In this technique, a sharp heating voltage spike, considerably surpassing the nominal heating voltage, is applied prior to each heating voltage step. The thermal impact of these spikes is adjusted by controlling v2dt for obtaining the closest variations to the ideal temperature profile. Here, the advantages and effectiveness of the technique are demonstrated by differentiating among iso-butanol, tert-butanol, 1-butanol and 2-butanol contaminations in a wide concentration range in air using only a single generic tin oxide gas sensor.

scholarly journals A novel approach to a fully inkjet printed SnO2-based gas sensor on a flexible foil

2019 ◽  
Vol 7 (39) ◽  
pp. 12343-12353 ◽  
Author(s):  
Omar Kassem ◽  
Mohamed Saadaoui ◽  
Mathilde Rieu ◽  
Jean-Paul Viricelle
Keyword(s):  
Gas Sensor ◽  
Gas Sensors ◽  
Low Cost ◽  
Novel Approach

In recent years, printed and flexible gas sensors have quickly emerged as an innovative area of great interest because of their lightness and low cost.

Design and Development of the Stability Test System for Gas Sensor Array Based on ARM

2013 ◽  
Vol 798-799 ◽  
pp. 553-556
Author(s):  
Tao Zhou ◽  
Qing Zhou
Keyword(s):  
Gas Sensor ◽  
Gas Sensors ◽  
Sensor Array ◽  
Low Cost ◽  
Industrial Applications ◽  
Test System ◽  
Stability Test ◽  
Stability Parameters ◽  
Gas Sensor Array ◽  
The Stability

In order to eliminate or minimize the early instability of gas sensors, the aging process is needed. After aging,it is necessary to test stability parameters of gas sensors in a certain batch of the sensors for massive production. In this work, a system for the stability test of gas sensor array has been designed and developed both in hardware and software based ARM. Measurements demonstrate the quality and flexibility of it. It is low cost, excellent cost performance. The stability test system now works well in industrial applications and meets the need of industrial mass-production.

scholarly journals Application of an Array of Metal-Oxide Semiconductor Gas Sensors in an Assistant Personal Robot for Early Gas Leak Detection

Sensors ◽  
2019 ◽  
Vol 19 (9) ◽  
pp. 1957 ◽  
Author(s):  
Jordi Palacín ◽  
David Martínez ◽  
Eduard Clotet ◽  
Tomàs Pallejà ◽  
Javier Burgués ◽  
...  
Keyword(s):  
Metal Oxide ◽  
Mobile Robot ◽  
Gas Sensor ◽  
Gas Sensors ◽  
Sensor Array ◽  
Low Cost ◽  
Gas Sensor Array ◽  
Gas Leak ◽  
Detection Capabilities ◽  
Personal Robot

This paper proposes the application of a low-cost gas sensor array in an assistant personal robot (APR) in order to extend the capabilities of the mobile robot as an early gas leak detector for safety purposes. The gas sensor array is composed of 16 low-cost metal-oxide (MOX) gas sensors, which are continuously in operation. The mobile robot was modified to keep the gas sensor array always switched on, even in the case of battery recharge. The gas sensor array provides 16 individual gas measurements and one output that is a cumulative summary of all measurements, used as an overall indicator of a gas concentration change. The results of preliminary experiments were used to train a partial least squares discriminant analysis (PLS-DA) classifier with air, ethanol, and acetone as output classes. Then, the mobile robot gas leak detection capabilities were experimentally evaluated in a public facility, by forcing the evaporation of (1) ethanol, (2) acetone, and (3) ethanol and acetone at different locations. The positive results obtained in different operation conditions over the course of one month confirmed the early detection capabilities of the proposed mobile system. For example, the APR was able to detect a gas leak produced inside a closed room from the external corridor due to small leakages under the door induced by the forced ventilation system of the building.

scholarly journals Semiconductor Metal Oxide Nanoparticles: A Review for the Potential of H2S Gas Sensor Application

2020 ◽  
pp. 199-208
Author(s):  
Zaid Hameed Mahmoud ◽  
Omar Dhaa Abdalstar ◽  
Noor Sabah
Keyword(s):  
Metal Oxide ◽  
Gas Sensor ◽  
Gas Sensors ◽  
Low Cost ◽  
Metal Oxide Nanoparticles ◽  
High Sensitivity ◽  
Modern World ◽  
H2s Gas Sensor ◽  
Work Mechanism ◽  
Semiconductor Metal Oxide

In modern world, gas sensors play important role in many fields of technology used for air pollution, breath analysis, public safety and many others. Gas sensor based semiconductor metal oxide is mostly used in these applications because of low cost, ease-to-use, high sensitivity and lower power consumption. This paper gives an overview about the semiconductor metal oxide and reviews why using it as sensing of gases in electrical applications and then it addresses to the work mechanism of a sensor to sensing H2S gas.

Chemiresistive Gas Sensors Based on Conducting Polymers

2017 ◽  
pp. 150-180 ◽  
Author(s):  
Sajad Pirsa
Keyword(s):  
Surface Modification ◽  
Gas Sensor ◽  
Conducting Polymer ◽  
Gas Sensors ◽  
Low Cost ◽  
Portable Devices ◽  
Response Mechanism ◽  
Fast Detection ◽  
Chemiresistive Gas Sensors ◽  
Change Response

Chemiresistive gas sensor based on conducting polymer is a type of sensors that presents gas sensors with excellent characters; low-cost fabrication, fast detection, simultaneous determination (array gas sensor), portable devices and so. Theses gas sensors are commonly based on polyaniline (PANI), polypyrrole (PPy), polythiophene (PTh) and their derivatives as a transducer. Common configuration and response mechanism of these sensors are reported in this section. Some factors that induce selectivity to these sensors are discussed. Different materials (conductor or insulant) can be used as a substrate of polymerization. Type of substrate, selective membranes, surface modification of conducting polymer and so can change response behavior of these sensors.

Chemiresistive Gas Sensors Based on Conducting Polymers

2017 ◽  
pp. 543-574
Author(s):  
Sajad Pirsa
Keyword(s):  
Surface Modification ◽  
Gas Sensor ◽  
Conducting Polymer ◽  
Gas Sensors ◽  
Low Cost ◽  
Portable Devices ◽  
Response Mechanism ◽  
Fast Detection ◽  
Chemiresistive Gas Sensors ◽  
Change Response

Chemiresistive gas sensor based on conducting polymer is a type of sensors that presents gas sensors with excellent characters; low-cost fabrication, fast detection, simultaneous determination (array gas sensor), portable devices and so. Theses gas sensors are commonly based on polyaniline (PANI), polypyrrole (PPy), polythiophene (PTh) and their derivatives as a transducer. Common configuration and response mechanism of these sensors are reported in this section. Some factors that induce selectivity to these sensors are discussed. Different materials (conductor or insulant) can be used as a substrate of polymerization. Type of substrate, selective membranes, surface modification of conducting polymer and so can change response behavior of these sensors.

Sign in / Sign up

Export Citation Format

Share Document